公开(公告)号：US20160079260A1

公开(公告)日：2016-03-17

申请号：US14729111

申请日：2015-06-03

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jin-woo Bae ,  Byoung-ho Kwon ,  Jong-hyuk Park ,  Hye-sung Park ,  Jun-seok Lee ,  Ki-vin Im ,  Hee-sook Cheon ,  In-seak Hwang

IPC: H01L27/115 ,  H01L21/768 ,  H01L21/3205 ,  H01L21/311 ,  H01L21/31 ,  H01L21/3213 ,  H01L29/66 ,  H01L21/3105

CPC classification number: H01L27/11573 ,  C09G1/02 ,  H01L21/31 ,  H01L21/31053 ,  H01L21/31058 ,  H01L21/31138 ,  H01L21/32051 ,  H01L21/32135 ,  H01L21/76831 ,  H01L21/76834 ,  H01L21/76877 ,  H01L21/76895 ,  H01L21/76897 ,  H01L27/10814 ,  H01L27/10817 ,  H01L27/10823 ,  H01L27/10826 ,  H01L27/10855 ,  H01L27/10876 ,  H01L27/10879 ,  H01L27/10885 ,  H01L27/10888 ,  H01L27/10891 ,  H01L27/11582 ,  H01L29/66833

Abstract: A method of fabricating a semiconductor device includes providing a substrate having a cell region and a peripheral circuit region. A plurality of bit line structures are formed on the substrate in the cell region, and a gate structure having the same structure as each of the bit line structures is formed on the substrate in the peripheral circuit region. A spacer is formed on sidewalls of the bit line structures and the gate structure. The bit line structures extend in a first direction and are spaced apart from each other in a second direction that is perpendicular to the first direction by first grooves that extend in the first direction. A sacrificial layer is formed to fill the first grooves and to cover top surfaces of the bit line structures and the gate structure. The sacrificial layer is planarized until the top surfaces of the bit line structures and the gate structure are exposed.

Abstract translation: 制造半导体器件的方法包括提供具有单元区域和外围电路区域的衬底。 在单元区域中的基板上形成多个位线结构，并且在外围电路区域中的基板上形成具有与每个位线结构相同结构的栅极结构。 在位线结构和栅极结构的侧壁上形成间隔物。 位线结构在第一方向上延伸并且在垂直于第一方向的第二方向上通过在第一方向上延伸的第一凹槽彼此间隔开。 形成牺牲层以填充第一凹槽并覆盖位线结构和栅极结构的顶表面。 牺牲层被平坦化，直到位线结构的顶表面和栅极结构被暴露。

公开(公告)号：US09269720B1

公开(公告)日：2016-02-23

申请号：US14729111

申请日：2015-06-03

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jin-woo Bae ,  Byoung-ho Kwon ,  Jong-hyuk Park ,  Hye-sung Park ,  Jun-seok Lee ,  Ki-vin Im ,  Hee-sook Cheon ,  In-seak Hwang

IPC: H01L27/10 ,  H01L27/115 ,  H01L29/66 ,  H01L21/768 ,  H01L21/3105 ,  H01L21/311 ,  H01L21/31 ,  H01L21/3213 ,  H01L21/3205

CPC classification number: H01L27/11573 ,  C09G1/02 ,  H01L21/31 ,  H01L21/31053 ,  H01L21/31058 ,  H01L21/31138 ,  H01L21/32051 ,  H01L21/32135 ,  H01L21/76831 ,  H01L21/76834 ,  H01L21/76877 ,  H01L21/76895 ,  H01L21/76897 ,  H01L27/10814 ,  H01L27/10817 ,  H01L27/10823 ,  H01L27/10826 ,  H01L27/10855 ,  H01L27/10876 ,  H01L27/10879 ,  H01L27/10885 ,  H01L27/10888 ,  H01L27/10891 ,  H01L27/11582 ,  H01L29/66833

Abstract: A method of fabricating a semiconductor device includes providing a substrate having a cell region and a peripheral circuit region. A plurality of bit line structures are formed on the substrate in the cell region, and a gate structure having the same structure as each of the bit line structures is formed on the substrate in the peripheral circuit region. A spacer is formed on sidewalls of the bit line structures and the gate structure. The bit line structures extend in a first direction and are spaced apart from each other in a second direction that is perpendicular to the first direction by first grooves that extend in the first direction. A sacrificial layer is formed to fill the first grooves and to cover top surfaces of the bit line structures and the gate structure. The sacrificial layer is planarized until the top surfaces of the bit line structures and the gate structure are exposed.

Abstract translation: 制造半导体器件的方法包括提供具有单元区域和外围电路区域的衬底。 在单元区域中的基板上形成多个位线结构，并且在外围电路区域中的基板上形成具有与每个位线结构相同结构的栅极结构。 在位线结构和栅极结构的侧壁上形成间隔物。 位线结构在第一方向上延伸并且在垂直于第一方向的第二方向上通过在第一方向上延伸的第一凹槽彼此间隔开。 形成牺牲层以填充第一凹槽并覆盖位线结构和栅极结构的顶表面。 牺牲层被平坦化，直到位线结构的顶表面和栅极结构被暴露。