公开(公告)号：US20180033612A1

公开(公告)日：2018-02-01

申请号：US15641454

申请日：2017-07-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hye Kyoung LEE ,  Il Yong JANG ,  Hwan Seok SEO ,  Byung Gook KIM

IPC: H01L21/027 ,  G03F7/00 ,  G03F1/32 ,  G03F1/58 ,  H01L21/033 ,  G03F1/00

CPC classification number: G03F1/32 ,  G03F1/0069 ,  G03F1/34 ,  G03F1/58 ,  G03F7/001 ,  H01L21/0274 ,  H01L21/0337

Abstract: A mask blank includes: a light transmitting substrate; a first layer disposed on the light transmitting substrate, and including a chromium compound that contains chromium and at least one element selected from oxygen, nitrogen, and carbon; and a second layer disposed on the first layer as an outermost layer from among the first and second layers, and including a silicon compound that contains silicon and at least one element selected from oxygen, nitrogen, and carbon, an alloy of a transition metal and silicon, or a transition metal and silicon compound that contains a transition metal, silicon, and at least one element selected from oxygen, nitrogen, and carbon. The thickness of the first layer is 45 nm or less, and the thickness of the second layer is 5 nm or greater. An optical density of a stack composed of the first layer and the second layer is 3 or greater.