公开(公告)号：US10355099B2

公开(公告)日：2019-07-16

申请号：US15871055

申请日：2018-01-14

Applicant: Samsung Electronics Co., Ltd.

Inventor： Eun Yeoung Choi ,  Jun Kyu Yang ,  Young Jin Noh ,  Jae Young Ahn ,  Jae Hyun Yang ,  Dong Chul Yoo ,  Jae Ho Choi

IPC: H01L29/51 ,  H01L27/11565 ,  H01L27/11582 ,  H01L27/1157

Abstract: A plurality of gate electrodes is stacked on an upper surface of a substrate in a direction perpendicular to an upper surface of the substrate. A channel region penetrates through the plurality of gate electrodes to extend perpendicularly to the upper surface of the substrate. A gate dielectric layer includes a tunneling layer, a charge storage layer and a blocking layer that are sequentially disposed between the channel region and the plurality of gate electrodes. The charge storage layer includes a plurality of doping elements and a plurality of deep level traps generated by the plurality of doping element. A concentration distribution of the plurality of doping elements in a thickness direction of the charge storage layer is non-uniform.

公开(公告)号：US11913114B2

公开(公告)日：2024-02-27

申请号：US16983142

申请日：2020-08-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jae Hyun Yang ,  Sang Yub Ie ,  Tae Yong Kim ,  Phil Ouk Nam

IPC: C23C16/455 ,  H01L21/67 ,  H01L21/673

CPC classification number: C23C16/45578 ,  C23C16/45546 ,  C23C16/45595 ,  H01L21/67 ,  H01L21/673

Abstract: A semiconductor manufacturing apparatus including a process chamber and a boat having a support member supporting substrates arranged in a first direction. An inner tube encloses the boat and includes a slit along a side wall. A nozzle supplies a process gas and includes a gas injection port at a position corresponding to the slit. The gas injection port includes a first inlet and first outlet. The slit includes a second inlet and second outlet. A distance to an end of the first inlet from a center line that connects a center of the first inlet and a center of the second outlet is different from the distance from the center line to an end of the first outlet and/or a distance from the center line to an end of the second inlet is different from a distance from the center line to an end of the second outlet.