公开(公告)号：US20160126119A1

公开(公告)日：2016-05-05

申请号：US14881414

申请日：2015-10-13

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Joonghan SHIN ,  Bongjin KUH ,  Wanit MANOROTKUL ,  Hanmei CHOI

IPC: H01L21/67 ,  H01L21/683 ,  H01L21/324 ,  B23K26/00 ,  H01L21/687

CPC classification number: H01L21/67115 ,  H01L21/268 ,  H01L21/68742

Abstract: A laser annealing apparatus includes a process chamber with a chamber window to transmit a laser beam, and a chuck in the process chamber, a top surface of the chuck supporting a loaded substrate, and a width of the chuck being smaller than a width of the loaded substrate.

Abstract translation: 激光退火装置包括具有腔室窗口以传递激光束的处理室和处理室中的卡盘，卡盘的顶表面支撑加载的基板，并且卡盘的宽度小于 加载基板。

公开(公告)号：US20150115368A1

公开(公告)日：2015-04-30

申请号：US14330777

申请日：2014-07-14

Applicant: Samsung Electronics Co., Ltd.

Inventor： Ki-Chul KIM ,  Joonghan SHIN ,  Bongjin KUH ,  Taegon KIM ,  Hanmei CHOI

IPC: H01L29/06 ,  H01L21/8238 ,  H01L27/092

CPC classification number: H01L29/0696 ,  H01L21/823807 ,  H01L21/845 ,  H01L27/092 ,  H01L27/1211

Abstract: Provided are a semiconductor device and a method of fabricating the same. The semiconductor device may include a plurality of unit cells provided on a semiconductor substrate. Each of the unit cells may include a buried insulating pattern buried in the semiconductor substrate, a first active pattern provided on the buried insulating pattern, and a second active pattern provided on the buried insulating pattern and spaced apart from the first active pattern. The buried insulating pattern may define a unit cell region, in which each of the unit cells may be disposed.

Abstract translation: 提供半导体器件及其制造方法。 半导体器件可以包括设置在半导体衬底上的多个单元电池。 每个单电池可以包括埋在半导体衬底中的掩埋绝缘图案，设置在掩埋绝缘图案上的第一有源图案和设置在掩埋绝缘图案上并与第一有源图案间隔开的第二有源图案。 埋置的绝缘图案可以限定单位单元区域，其中可以布置每个单位单元。