公开(公告)号：US10001444B2

公开(公告)日：2018-06-19

申请号：US14955635

申请日：2015-12-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kang-woong Ko ,  Sung-yoon Ryu ,  Young-hoon Sohn ,  Gil-woo Song ,  Tae-heung Ahn ,  Hyoung-jo Jeon ,  Sang-kyeong Han ,  Masahiro Horie ,  Woo-seok Ko ,  Yu-sin Yang ,  Sang-kil Lee ,  Byeong-hwan Jeon

IPC: G01N21/88 ,  G01J4/00 ,  G01N21/21 ,  G01N21/956 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01J4/00 ,  G01J2004/001 ,  G01N21/21 ,  G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/213 ,  G01N2021/8848

Abstract: A surface inspecting method includes: irradiating an incident light beam of a first polarized state on a target object, the incident light beam comprising parallel light and having a cross-sectional area: measuring a second polarized state of a reflected light beam reflected from the target object; and performing inspection on an entire area of the target object on which the incident light beam is irradiated, based on a variation between the first polarized state and the second polarized state.

公开(公告)号：US20160153915A1

公开(公告)日：2016-06-02

申请号：US14955635

申请日：2015-12-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kang-woong Ko ,  Sung-yoon Ryu ,  Young-hoon Sohn ,  Gil-woo Song ,  Tae-heung Ahn ,  Hyoung-jo Jeon ,  Sang-kyeong Han ,  Masahiro Horie ,  Woo-seok Ko ,  Yu-sin Yang ,  Sang-kil Lee ,  Byeong-hwan Jeon

IPC: G01N21/88 ,  G01N21/95 ,  G01N21/21

CPC classification number: G01N21/8806 ,  G01J4/00 ,  G01J2004/001 ,  G01N21/21 ,  G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/213 ,  G01N2021/8848

Abstract: A surface inspecting method includes: irradiating an incident light beam of a first polarized state on a target object, the incident light beam comprising parallel light and having a cross-sectional area: measuring a second polarized state of a reflected light beam reflected from the target object; and performing inspection on an entire area of the target object on which the incident light beam is irradiated, based on a variation between the first polarized state and the second polarized state.

Abstract translation: 表面检查方法包括：在目标物体上照射第一偏振态的入射光束，入射光束包括平行光并具有横截面积：测量从目标反射的反射光束的第二偏振状态 目的; 并且基于第一极化状态和第二极化状态之间的变化，对照射入射光的目标物体的整个区域进行检查。