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公开(公告)号：US09267879B2
公开(公告)日：2016-02-23
申请号：US14291764
申请日：2014-05-30
Applicant: Samsung Electronics Co., Ltd.
Inventor： Kang-woong Ko , Hyoung-Jo Jeon , Gil-Woo Song
CPC classification number: G01N21/211 , G01N2021/213 , G01N2021/214
Abstract: An ellipsometer for detecting a surface including a light source irradiating a substrate with light, a polarization unit polarizing the light irradiated from the light source and analyzing the polarized light, a detector measuring a light quantity of the polarized light passing through the polarization unit, and a driver rotating the detector by an azimuth angle as the substrate rotates in a direction of the azimuth angle direction may be provided.
Abstract translation: 一种用于检测包括用光照射衬底的光源的表面的椭偏仪，将从光源照射的光偏振并分析偏振光的偏振单元，测量通过偏振单元的偏振光的光量的检测器，以及 可以提供当基板沿着方位角方向的方向旋转时将检测器旋转方位角的驱动器。
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公开(公告)号：US10001444B2
公开(公告)日：2018-06-19
申请号：US14955635
申请日：2015-12-01
Applicant: Samsung Electronics Co., Ltd.
Inventor： Kang-woong Ko , Sung-yoon Ryu , Young-hoon Sohn , Gil-woo Song , Tae-heung Ahn , Hyoung-jo Jeon , Sang-kyeong Han , Masahiro Horie , Woo-seok Ko , Yu-sin Yang , Sang-kil Lee , Byeong-hwan Jeon
IPC: G01N21/88 , G01J4/00 , G01N21/21 , G01N21/956 , G01N21/95
CPC classification number: G01N21/8806 , G01J4/00 , G01J2004/001 , G01N21/21 , G01N21/211 , G01N21/9501 , G01N21/956 , G01N2021/213 , G01N2021/8848
Abstract: A surface inspecting method includes: irradiating an incident light beam of a first polarized state on a target object, the incident light beam comprising parallel light and having a cross-sectional area: measuring a second polarized state of a reflected light beam reflected from the target object; and performing inspection on an entire area of the target object on which the incident light beam is irradiated, based on a variation between the first polarized state and the second polarized state.
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公开(公告)号：US20160153915A1
公开(公告)日：2016-06-02
申请号：US14955635
申请日：2015-12-01
Applicant: Samsung Electronics Co., Ltd.
Inventor： Kang-woong Ko , Sung-yoon Ryu , Young-hoon Sohn , Gil-woo Song , Tae-heung Ahn , Hyoung-jo Jeon , Sang-kyeong Han , Masahiro Horie , Woo-seok Ko , Yu-sin Yang , Sang-kil Lee , Byeong-hwan Jeon
CPC classification number: G01N21/8806 , G01J4/00 , G01J2004/001 , G01N21/21 , G01N21/211 , G01N21/9501 , G01N21/956 , G01N2021/213 , G01N2021/8848
Abstract: A surface inspecting method includes: irradiating an incident light beam of a first polarized state on a target object, the incident light beam comprising parallel light and having a cross-sectional area: measuring a second polarized state of a reflected light beam reflected from the target object; and performing inspection on an entire area of the target object on which the incident light beam is irradiated, based on a variation between the first polarized state and the second polarized state.
Abstract translation: 表面检查方法包括：在目标物体上照射第一偏振态的入射光束，入射光束包括平行光并具有横截面积：测量从目标反射的反射光束的第二偏振状态 目的; 并且基于第一极化状态和第二极化状态之间的变化，对照射入射光的目标物体的整个区域进行检查。
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