公开(公告)号：US20240231219A1

公开(公告)日：2024-07-11

申请号：US18469743

申请日：2023-09-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Nam Jin CHO ,  Yi Hwan KIM ,  Seok Jun HONG ,  Seong Keun CHO ,  Sang Chul HAN

IPC: G03F1/48 ,  G03F1/60 ,  H01L21/02 ,  H01L21/033

CPC classification number: G03F1/48 ,  G03F1/60 ,  H01L21/02592 ,  H01L21/0332

Abstract: A hard mask may include a first layer and a second layer on the first layer. Each of the first layer and the second layer may include an amorphous carbon layer. The first layer may have a first extinction coefficient. The second layer may have a second extinction coefficient and the second extinction coefficient may be different from the first extinction coefficient. The first extinction coefficient and the second extinction coefficient each may be in a range of 0.4 to 0.7.