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公开(公告)号：US20180275508A1
公开(公告)日：2018-09-27
申请号：US15690879
申请日：2017-08-30
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Mun-Ja KIM , Ji-Beom YOO , Soo-Young KIM , Hee-Bom KIM , Hwan-Chul JEON , Seul-Gi KIM , Tae-Sung KIM , Dong-Wook SHIN
IPC: G03F1/64
CPC classification number: G03F1/64
Abstract: A method of manufacturing a pellicle includes preparing a pellicle frame having an adhesive layer coated thereon, treating a pellicle membrane with vapor under vapor atmosphere, attaching the pellicle membrane onto the pellicle frame, and drying the pellicle membrane.
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公开(公告)号：US20160195804A1
公开(公告)日：2016-07-07
申请号：US14972258
申请日：2015-12-17
Applicant: Samsung Electronics Co., Ltd.
Inventor： Munja KIM , Ji-Beom YOO , Sooyoung KIM , Taesung KIM , Dong-Wook SHIN , Hwanchul JEON , Seul-Gi KIM
Abstract: The method includes forming a graphite layer on a substrate, forming a supporting layer on the graphite layer to form a stack of the graphite layer and the supporting layer, removing the substrate to separate the stack from the substrate, transferring the stack of the graphite layer and the supporting layer onto a frame, and removing the supporting layer from the frame.
Abstract translation: 该方法包括在基底上形成石墨层，在石墨层上形成支撑层，形成石墨层和支撑层的叠层，去除衬底以将堆叠与衬底分离，转移石墨层的堆叠 和支撑层到框架上，并且从框架移除支撑层。
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公开(公告)号：US20200333701A1
公开(公告)日：2020-10-22
申请号：US16918106
申请日：2020-07-01
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Mun-Ja KIM , Ji-Beom YOO , Soo-Young KIM , Hee-Bom KIM , Hwan-Chul JEON , Seul-Gi KIM , Tae-Sung KIM , Dong-Wook SHIN
IPC: G03F1/64
Abstract: A method of manufacturing a pellicle includes preparing a pellicle frame having an adhesive layer coated thereon, treating a pellicle membrane with vapor under vapor atmosphere, attaching the pellicle membrane onto the pellicle frame, and drying the pellicle membrane.
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