公开(公告)号：US20200333701A1

公开(公告)日：2020-10-22

申请号：US16918106

申请日：2020-07-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Mun-Ja KIM ,  Ji-Beom YOO ,  Soo-Young KIM ,  Hee-Bom KIM ,  Hwan-Chul JEON ,  Seul-Gi KIM ,  Tae-Sung KIM ,  Dong-Wook SHIN

IPC: G03F1/64

Abstract: A method of manufacturing a pellicle includes preparing a pellicle frame having an adhesive layer coated thereon, treating a pellicle membrane with vapor under vapor atmosphere, attaching the pellicle membrane onto the pellicle frame, and drying the pellicle membrane.

公开(公告)号：US20160355001A1

公开(公告)日：2016-12-08

申请号：US15014054

申请日：2016-02-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： MUN JA KIM ,  Byung-Gook KIM ,  HWAN CHUL JEON ,  Ji-Beom YOO ,  Dong-Wook SHIN ,  Taesung KIM ,  Sooyoung KIM

IPC: B32B37/00 ,  B32B37/14

CPC classification number: B32B37/025 ,  B32B37/0038 ,  B32B37/12 ,  B32B37/14 ,  B32B38/10 ,  B32B2038/166 ,  B32B2305/026 ,  B32B2457/08 ,  G03F1/62 ,  H01L21/00

Abstract: A method of manufacturing a pellicle assembly, the method including attaching a carbon-containing thin film onto a transfer membrane in a wet atmosphere; attaching the carbon-containing thin film to a pellicle frame in a dry atmosphere while the carbon-containing thin film is attached onto the transfer membrane; and separating the transfer membrane from the carbon-containing thin film while the carbon-containing thin film is attached to the pellicle frame.

Abstract translation: 一种制造防护薄膜组件的方法，所述方法包括在湿气氛中将含碳薄膜附着在转移膜上; 在含碳薄膜附着在转印膜上的同时，将干燥气氛中的含碳薄膜附着在防尘薄膜组件框架上; 并且在含碳薄膜附着到防护薄膜框架上的同时将转移膜与含碳薄膜分离。

公开(公告)号：US20160201201A1

公开(公告)日：2016-07-14

申请号：US14969645

申请日：2015-12-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Mun-Ja KIM ,  Tae-Sung KIM ,  Ji-Beom YOO ,  Byung-Gook KIM ,  Soo-Young KIM ,  Dong-Wook SHIN ,  Jae-Hyuck CHOI

IPC: C23F1/14

CPC classification number: G03F1/62 ,  C01B32/182 ,  C01B32/194 ,  C01B32/20 ,  C23C16/01 ,  C23C16/26 ,  C23C16/56 ,  C23F1/00 ,  C23F1/02 ,  C23F1/14 ,  G03F1/64

Abstract: A method of manufacturing a pellicle includes forming a membrane on a first surface of a substrate from a chemical reaction in which the substrate serves as a catalyst, forming a protective pattern on a second surface of the substrate, immersing the substrate in an etchant solution, such that a portion of the substrate exposed through the protective pattern is removed to form a frame, and replacing the etchant solution with a solvent.

Abstract translation: 防护薄膜组件的制造方法包括：从基板作为催化剂的化学反应在基板的第一面上形成膜，在基板的第二面上形成保护图案，将基板浸渍在蚀刻液中， 使得通过保护图案曝光的基板的一部分被去除以形成框架，并用溶剂替换蚀刻剂溶液。

公开(公告)号：US20180275508A1

公开(公告)日：2018-09-27

申请号：US15690879

申请日：2017-08-30

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Mun-Ja KIM ,  Ji-Beom YOO ,  Soo-Young KIM ,  Hee-Bom KIM ,  Hwan-Chul JEON ,  Seul-Gi KIM ,  Tae-Sung KIM ,  Dong-Wook SHIN

IPC: G03F1/64

CPC classification number: G03F1/64

Abstract: A method of manufacturing a pellicle includes preparing a pellicle frame having an adhesive layer coated thereon, treating a pellicle membrane with vapor under vapor atmosphere, attaching the pellicle membrane onto the pellicle frame, and drying the pellicle membrane.

公开(公告)号：US20160195804A1

公开(公告)日：2016-07-07

申请号：US14972258

申请日：2015-12-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Munja KIM ,  Ji-Beom YOO ,  Sooyoung KIM ,  Taesung KIM ,  Dong-Wook SHIN ,  Hwanchul JEON ,  Seul-Gi KIM

IPC: G03F1/64 ,  C23C16/44

CPC classification number: G03F1/62 ,  C23C16/26

Abstract: The method includes forming a graphite layer on a substrate, forming a supporting layer on the graphite layer to form a stack of the graphite layer and the supporting layer, removing the substrate to separate the stack from the substrate, transferring the stack of the graphite layer and the supporting layer onto a frame, and removing the supporting layer from the frame.

Abstract translation: 该方法包括在基底上形成石墨层，在石墨层上形成支撑层，形成石墨层和支撑层的叠层，去除衬底以将堆叠与衬底分离，转移石墨层的堆叠 和支撑层到框架上，并且从框架移除支撑层。