METHODS OF FABRICATING PELLICLES USING SUPPORTING LAYER
    1.
    发明申请
    METHODS OF FABRICATING PELLICLES USING SUPPORTING LAYER 有权
    使用支撑层制作胶囊的方法

    公开(公告)号:US20160195804A1

    公开(公告)日:2016-07-07

    申请号:US14972258

    申请日:2015-12-17

    CPC classification number: G03F1/62 C23C16/26

    Abstract: The method includes forming a graphite layer on a substrate, forming a supporting layer on the graphite layer to form a stack of the graphite layer and the supporting layer, removing the substrate to separate the stack from the substrate, transferring the stack of the graphite layer and the supporting layer onto a frame, and removing the supporting layer from the frame.

    Abstract translation: 该方法包括在基底上形成石墨层,在石墨层上形成支撑层,形成石墨层和支撑层的叠层,去除衬底以将堆叠与衬底分离,转移石墨层的堆叠 和支撑层到框架上,并且从框架移除支撑层。

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