PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD USING THE SAME

    公开(公告)号:US20240192154A1

    公开(公告)日:2024-06-13

    申请号:US18243835

    申请日:2023-09-08

    CPC classification number: G01N23/2251 G01N2223/42 G01N2223/6116

    Abstract: A pattern inspection apparatus includes a sample including a plurality of holes having thicknesses that are different from each other, an electron gun configured to generate an input electron beam and emit the input electron beam onto a wafer and the sample, a stage configured to support the wafer and the sample, a detector configured to generate a scanning electron microscope (SEM) image by detecting emitted electrons from the wafer and the sample, and a processor configured to process the SEM image into a three-dimensional profiling image containing depth information of the wafer and determine whether a condition of the input electron beam has changed based on the processing of the SEM image.

    Foreign substance detecting circuits, electronic devices having the same, and foreign substance detecting methods

    公开(公告)号:US11181561B2

    公开(公告)日:2021-11-23

    申请号:US16686757

    申请日:2019-11-18

    Inventor: Sungeun Lee

    Abstract: A foreign substance detecting circuit may include a voltage detector that may detect a voltage level from a first pin of a connector, a slope detector that may detect a voltage slope indicating a change of the voltage level based two voltage levels from the first pin, and a foreign substance determining device that may determine a presence of a foreign substance in the connector. The foreign substance determining device may determine whether a resistance range of an external device is detected from the at least one first pin based on the detected voltage level. The foreign substance determining device may, when the resistance range is detected, determine that the foreign substance is present in the connector, based on the voltage slope having a value determined to correspond to charge and discharge characteristics due to a capacitance element of the foreign substance.

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