-
1.
公开(公告)号:US20170088755A1
公开(公告)日:2017-03-30
申请号:US15254701
申请日:2016-09-01
发明人: Byungchul YOO , Sungyong CHO , Jaehyuck CHOI , Jeongsu Yang , Donghoon CHUNG , Han-Shin LEE , Myungjun KIM , Ikjun KIM , Jikang KIM , Jeonghwan MIN , Kyoungchae SEO
IPC分类号: C09J133/10 , G03F1/82 , B08B1/00 , C09J133/06 , B08B3/08 , B08B3/12 , G03F1/64 , C09J133/08
CPC分类号: C09J133/10 , C08F6/02 , C08F8/44 , C08F220/06 , C09J133/02 , C09J133/068 , C09J133/08 , C09J133/26 , G03F1/64 , G03F1/82
摘要: A pellicle including a water-soluble adhesive and a photomask assembly including the pellicle are provided. A pellicle may include a membrane, a pellicle frame, and a water-soluble adhesive disposed on the pellicle frame. The water-soluble adhesive may be prepared by a mixture including a water-soluble acrylic adhesive material in an amount of about 40% to about 55% by weight of the mixture, water or a solution of water and alcohol in an amount of about 40% to about 55% by weight of the mixture, and an additive in an amount of about 1% to about 5% by weight of the mixture.
-
2.
公开(公告)号:US20210032514A1
公开(公告)日:2021-02-04
申请号:US16801677
申请日:2020-02-26
发明人: Byungchul YOO , Byunghoon LEE , Myungjun KIM , Jikang KIM , Jeonghwan MIN , Kyoungchae SEO , Changyoung JEONG
IPC分类号: C09J163/00 , G03F1/22 , G03F1/82
摘要: An adhesive for an EUV mask includes an epoxy resin composition in an amount of 50 wt % to 80 wt % based on a total weight of the adhesive, the epoxy resin composition including an epoxy resin, a hardener, a toughening agent, a filler, and a curing accelerator, and an inorganic filler in an amount of 20 wt % to 50 wt % based on the total weight of the adhesive, the inorganic filler including one or more of aluminum hydroxide or calcium carbonate.
-
公开(公告)号:US20200225573A1
公开(公告)日:2020-07-16
申请号:US16541895
申请日:2019-08-15
发明人: Jong Keun OH , Jin-Sang YOON , Byungchul YOO , Sunpyo LEE , Changyoung JEONG
摘要: A reticle assembly includes a reticle plate; a reticle pattern provided on the reticle plate; and a pellicle member provided on the reticle pattern and the reticle plate. The pellicle member includes: a pellicle provided on the reticle pattern; and a pellicle frame provided on the reticle plate and surrounding the reticle pattern, and supporting the pellicle to be space apart from the reticle pattern and the reticle plate. A thermal expansion coefficient of the pellicle frame is less than six times of a thermal expansion coefficient of the reticle plate
-
公开(公告)号:US20240296131A1
公开(公告)日:2024-09-05
申请号:US18662097
申请日:2024-05-13
发明人: Sangmuk HWANG , Jaegeun PARK , Hojun SHIM , Byungchul YOO
CPC分类号: G06F13/1642 , G06F13/161 , G06F13/1689 , G06F13/28
摘要: A storage controller includes a command manager and a direct memory access (DMA) engine. The command manager receives a first submission queue doorbell from an external device, fetches a first command including a first latency from the external device in response to the first submission queue doorbell, and determines a first timing to write a first completion into the external device based on the first latency, the first completion indicating that the first command is completely processed. The DMA engine receives a request signal requesting processing of the first command from the command manager, transfer data, which the first command requests, based on a DMA transfer in response to the request signal, and outputs a complete signal, which indicates that the first command is completely processed, to the command manager.
-
公开(公告)号:US20220380643A1
公开(公告)日:2022-12-01
申请号:US17884077
申请日:2022-08-09
发明人: Byungchul YOO , Byunghoon LEE , Myungjun KIM , Jikang KIM , Jeonghwan MIN , Kyoungchae SEO , Changyoung JEONG
IPC分类号: C09J163/00 , G03F1/82 , G03F1/22 , B08B3/04
摘要: An adhesive for an EUV mask includes an epoxy resin composition in an amount of 50 wt % to 80 wt % based on a total weight of the adhesive, the epoxy resin composition including an epoxy resin, a hardener, a toughening agent, a filler, and a curing accelerator, and an inorganic filler in an amount of 20 wt % to 50 wt % based on the total weight of the adhesive, the inorganic filler including one or more of aluminum hydroxide or calcium carbonate.
-
6.
公开(公告)号:US20220100076A1
公开(公告)日:2022-03-31
申请号:US17211165
申请日:2021-03-24
发明人: Byungchul YOO , Sunghoon PARK , Mun Ja KIM
IPC分类号: G03F1/22
摘要: A stud attachment device for attaching a plurality of studs to a photomask constituting a reticle. The stud attachment device including a body; a plurality of holders extending from the body, the holders allowing the studs to be laid thereon, respectively; and a pressure regulator for independently controlling pressures of the holders when the studs are attached to the photomask.
-
公开(公告)号:US20240174902A1
公开(公告)日:2024-05-30
申请号:US18404861
申请日:2024-01-04
发明人: Mun Ja KIM , Byungchul YOO , Haeshin LEE , Chang Young JEONG , Yunhan LEE
IPC分类号: C09J129/04 , C08K3/04 , C08K3/36 , C08K5/05 , G03F1/64
摘要: An adhesive composition, a method for preparing the same, a reticle assembly including the same, and a method for fabricating the reticle assembly including the same are provided. The adhesive composition includes a polyphenol compound including tannic acid, a polymer including polyvinyl alcohol, and a solvent including water and alcohol.
-
公开(公告)号:US20230408905A1
公开(公告)日:2023-12-21
申请号:US18299301
申请日:2023-04-12
发明人: Mun Ja KIM , Ki Bong NAM , Jin Ho YEO , Byungchul YOO , Ji Beom YOO , Changyoung JEONG
IPC分类号: G03F1/62
CPC分类号: G03F1/62
摘要: A method of manufacturing a pellicle for an extreme ultraviolet exposure includes forming a graphite-containing layer on a catalyst substrate; surface-treating a first surface of the graphite-containing layer to form a first treatment layer; and forming a first passivation layer on the first treatment layer, wherein the forming of the first treatment layer includes removing a C—O—C bond included in the graphite-containing layer through the surface-treating of the first surface.
-
公开(公告)号:US20220135855A1
公开(公告)日:2022-05-05
申请号:US17516428
申请日:2021-11-01
发明人: Mun Ja KIM , Byungchul YOO , Haeshin LEE , Chang Young JEONG , Yunhan LEE
IPC分类号: C09J129/04 , C08K3/36 , C08K3/04 , G03F1/64 , C08K5/05
摘要: An adhesive composition, a method for preparing the same, a reticle assembly including the same, and a method for fabricating the reticle assembly including the same are provided. The adhesive composition includes a polyphenol compound including tannic acid, a polymer including polyvinyl alcohol, and a solvent including water and alcohol.
-
-
-
-
-
-
-
-