Three-dimensional semiconductor memory devices

    公开(公告)号:US09356159B2

    公开(公告)日:2016-05-31

    申请号:US14830299

    申请日:2015-08-19

    IPC分类号: H01L27/115 H01L29/792

    摘要: Three-dimensional (3D) nonvolatile memory devices include a substrate having a well region of second conductivity type (e.g., P-type) therein and a common source region of first conductivity type (e.g., N-type) on the well region. A recess extends partially (or completely) through the common source region. A vertical stack of nonvolatile memory cells on the substrate includes a vertical stack of spaced-apart gate electrodes and a vertical active region, which extends on sidewalls of the vertical stack of spaced-apart gate electrodes and on a sidewall of the recess. Gate dielectric layers extend between respective ones of the vertical stack of spaced-apart gate electrodes and the vertical active region. The gate dielectric layers may include a composite of a tunnel insulating layer, a charge storage layer, a relatively high bandgap barrier dielectric layer and a blocking insulating layer having a relatively high dielectric strength.

    THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICES

    公开(公告)号:US20180151590A1

    公开(公告)日:2018-05-31

    申请号:US15871375

    申请日:2018-01-15

    摘要: Three-dimensional (3D) nonvolatile memory devices include a substrate having a well region of second conductivity type (e.g., P-type) therein and a common source region of first conductivity type (e.g., N-type) on the well region. A recess extends partially (or completely) through the common source region. A vertical stack of nonvolatile memory cells on the substrate includes a vertical stack of spaced-apart gate electrodes and a vertical active region, which extends on sidewalls of the vertical stack of spaced-apart gate electrodes and on a sidewall of the recess. Gate dielectric layers extend between respective ones of the vertical stack of spaced-apart gate electrodes and the vertical active region. The gate dielectric layers may include a composite of a tunnel insulating layer, a charge storage layer, a relatively high bandgap barrier dielectric layer and a blocking insulating layer having a relatively high dielectric strength.

    Three-dimensional semiconductor memory devices

    公开(公告)号:US09905574B2

    公开(公告)日:2018-02-27

    申请号:US15602886

    申请日:2017-05-23

    摘要: Three-dimensional (3D) nonvolatile memory devices include a substrate having a well region of second conductivity type (e.g., P-type) therein and a common source region of first conductivity type (e.g., N-type) on the well region. A recess extends partially (or completely) through the common source region. A vertical stack of nonvolatile memory cells on the substrate includes a vertical stack of spaced-apart gate electrodes and a vertical active region, which extends on sidewalls of the vertical stack of spaced-apart gate electrodes and on a sidewall of the recess. Gate dielectric layers extend between respective ones of the vertical stack of spaced-apart gate electrodes and the vertical active region. The gate dielectric layers may include a composite of a tunnel insulating layer, a charge storage layer, a relatively high bandgap barrier dielectric layer and a blocking insulating layer having a relatively high dielectric strength.

    THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICES
    6.
    发明申请
    THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICES 审中-公开
    三维半导体存储器件

    公开(公告)号:US20150357345A1

    公开(公告)日:2015-12-10

    申请号:US14830299

    申请日:2015-08-19

    IPC分类号: H01L27/115

    摘要: Three-dimensional (3D) nonvolatile memory devices include a substrate having a well region of second conductivity type (e.g., P-type) therein and a common source region of first conductivity type (e.g., N-type) on the well region. A recess extends partially (or completely) through the common source region. A vertical stack of nonvolatile memory cells on the substrate includes a vertical stack of spaced-apart gate electrodes and a vertical active region, which extends on sidewalls of the vertical stack of spaced-apart gate electrodes and on a sidewall of the recess. Gate dielectric layers extend between respective ones of the vertical stack of spaced-apart gate electrodes and the vertical active region. The gate dielectric layers may include a composite of a tunnel insulating layer, a charge storage layer, a relatively high bandgap barrier dielectric layer and a blocking insulating layer having a relatively high dielectric strength.

    摘要翻译: 三维(3D)非易失性存储器件包括其中具有第二导电类型(例如,P型)的阱区和在该区域上具有第一导电类型(例如,N型)的公共源极区的衬底。 凹部部分(或完全)延伸穿过公共源区域。 衬底上的垂直堆叠的非易失性存储器单元包括间隔开的栅电极的垂直堆叠和垂直有源区,该垂直有源区延伸在间隔开的栅电极的垂直叠层的侧壁上并在凹槽的侧壁上延伸。 栅极电介质层在相互间隔开的栅电极的垂直叠层和垂直有源区之间延伸。 栅极电介质层可以包括隧道绝缘层,电荷存储层,相对高的带隙势垒介电层和具有相对高的介电强度的阻挡绝缘层的复合材料。

    Three-dimensional semiconductor memory devices
    7.
    发明授权
    Three-dimensional semiconductor memory devices 有权
    三维半导体存储器件

    公开(公告)号:US09136395B2

    公开(公告)日:2015-09-15

    申请号:US14057380

    申请日:2013-10-18

    IPC分类号: H01L29/792 H01L27/115

    摘要: Three-dimensional (3D) nonvolatile memory devices include a substrate having a well region of second conductivity type (e.g., P-type) therein and a common source region of first conductivity type (e.g., N-type) on the well region. A recess extends partially (or completely) through the common source region. A vertical stack of nonvolatile memory cells on the substrate includes a vertical stack of spaced-apart gate electrodes and a vertical active region, which extends on sidewalls of the vertical stack of spaced-apart gate electrodes and on a sidewall of the recess. Gate dielectric layers extend between respective ones of the vertical stack of spaced-apart gate electrodes and the vertical active region. The gate dielectric layers may include a composite of a tunnel insulating layer, a charge storage layer, a relatively high bandgap barrier dielectric layer and a blocking insulating layer having a relatively high dielectric strength.

    摘要翻译: 三维(3D)非易失性存储器件包括其中具有第二导电类型(例如,P型)的阱区和在该区域上具有第一导电类型(例如,N型)的公共源极区的衬底。 凹部部分(或完全)延伸穿过公共源区域。 衬底上的垂直堆叠的非易失性存储器单元包括间隔开的栅电极的垂直堆叠和垂直有源区,该垂直有源区延伸在间隔开的栅电极的垂直叠层的侧壁上并在凹槽的侧壁上延伸。 栅极电介质层在相互间隔开的栅电极的垂直叠层和垂直有源区之间延伸。 栅极电介质层可以包括隧道绝缘层,电荷存储层,相对高的带隙势垒介电层和具有相对高的介电强度的阻挡绝缘层的复合材料。

    Three-dimensional semiconductor memory devices

    公开(公告)号:US10978479B2

    公开(公告)日:2021-04-13

    申请号:US16804982

    申请日:2020-02-28

    摘要: Three-dimensional (3D) nonvolatile memory devices include a substrate having a well region of second conductivity type (e.g., P-type) therein and a common source region of first conductivity type (e.g., N-type) on the well region. A recess extends partially (or completely) through the common source region. A vertical stack of nonvolatile memory cells on the substrate includes a vertical stack of spaced-apart gate electrodes and a vertical active region, which extends on sidewalls of the vertical stack of spaced-apart gate electrodes and on a sidewall of the recess. Gate dielectric layers extend between respective ones of the vertical stack of spaced-apart gate electrodes and the vertical active region. The gate dielectric layers may include a composite of a tunnel insulating layer, a charge storage layer, a relatively high bandgap barrier dielectric layer and a blocking insulating layer having a relatively high dielectric strength.

    Three-dimensional semiconductor memory devices

    公开(公告)号:US10600801B2

    公开(公告)日:2020-03-24

    申请号:US15871375

    申请日:2018-01-15

    摘要: Three-dimensional (3D) nonvolatile memory devices include a substrate having a well region of second conductivity type (e.g., P-type) therein and a common source region of first conductivity type (e.g., N-type) on the well region. A recess extends partially (or completely) through the common source region. A vertical stack of nonvolatile memory cells on the substrate includes a vertical stack of spaced-apart gate electrodes and a vertical active region, which extends on sidewalls of the vertical stack of spaced-apart gate electrodes and on a sidewall of the recess. Gate dielectric layers extend between respective ones of the vertical stack of spaced-apart gate electrodes and the vertical active region. The gate dielectric layers may include a composite of a tunnel insulating layer, a charge storage layer, a relatively high bandgap barrier dielectric layer and a blocking insulating layer having a relatively high dielectric strength.

    Three-dimensional semiconductor memory devices

    公开(公告)号:US09793292B2

    公开(公告)日:2017-10-17

    申请号:US15142533

    申请日:2016-04-29

    摘要: Three-dimensional (3D) nonvolatile memory devices include a substrate having a well region of second conductivity type (e.g., P-type) therein and a common source region of first conductivity type (e.g., N-type) on the well region. A recess extends partially (or completely) through the common source region. A vertical stack of nonvolatile memory cells on the substrate includes a vertical stack of spaced-apart gate electrodes and a vertical active region, which extends on sidewalls of the vertical stack of spaced-apart gate electrodes and on a sidewall of the recess. Gate dielectric layers extend between respective ones of the vertical stack of spaced-apart gate electrodes and the vertical active region. The gate dielectric layers may include a composite of a tunnel insulating layer, a charge storage layer, a relatively high bandgap barrier dielectric layer and a blocking insulating layer having a relatively high dielectric strength.