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    Method for removing photoresist layer from substrate by ozone treatment
    1.
    发明授权
    Method for removing photoresist layer from substrate by ozone treatment 失效
    通过臭氧处理从基底去除光致抗蚀剂层的方法

    公开(公告)号：US4341592A

    公开(公告)日：1982-07-27

    申请号：US601861

    申请日：1975-08-04

    Applicant: Samuel R. Shortes ,  Thomas C. Penn

    Inventor： Samuel R. Shortes ,  Thomas C. Penn

    IPC: H01L21/302 ,  G03F7/42 ,  H01L21/027 ,  H01L21/30 ,  H01L21/3065 ,  H01L21/311 ,  B44C1/22 ,  C03C15/00 ,  C23F1/00 ,  H01L21/306

    CPC classification number: H01L21/31138 ,  G03F7/42

    Abstract: Method and apparatus for removing a photoresist layer from a substrate surface of different material, such as a semiconductor slice, in the fabrication of an electronic structure, involving exposure of the photoresist layer to an ozone-containing gaseous atmosphere in a reaction zone of a reactor. The ozone is present as an active reagent in the gaseous atmosphere to which the layer of photoresist material is exposed in an amount sufficient to react with all of the photoresist material in the layer thereof, with the photoresist material being removed from the underlying substrate surface in response to its exposure to the ozone. The photoresist material being treated by the ozone for stripping thereof may be either a negative or positive photoresist. Gaseous reaction products resulting from treatment of the substrate and removal of the photoresist layer therefrom are directed through an ozone reduction chamber prior to the discharge of the exhaust gases created by the reaction of the ozone with the photoresist material, wherein any excess ozone contained in the exhaust gases is reduced to molecular oxygen.

    Abstract translation: 用于在电子结构的制造中从不同材料（例如半导体片）的衬底表面去除光致抗蚀剂层的方法和装置，包括在反应器的反应区中将光致抗蚀剂层暴露于含臭氧的气态气氛 。 臭氧作为活性试剂存在于气态气氛中，光致抗蚀剂材料层以足以与其中的所有光致抗蚀剂材料反应的量暴露于光致抗蚀剂材料层，光致抗蚀剂材料从下面的基底表面被去除 对其暴露于臭氧的反应。 被臭氧处理以除去的光致抗蚀剂材料可以是负性或正性光致抗蚀剂。 通过处理基材和从其中除去光致抗蚀剂层而产生的气态反应产物在通过臭氧与光致抗蚀剂材料的反应产生的废气排出之前通过臭氧还原室引导，其中包含在 废气被还原成分子氧。

    Method and apparatus for cleaning the surface of a semiconductor slice with a liquid spray of de-ionized water
    2.
    发明授权
    Method and apparatus for cleaning the surface of a semiconductor slice with a liquid spray of de-ionized water 失效

    公开(公告)号：US4027686A

    公开(公告)日：1977-06-07

    申请号：US320400

    申请日：1973-01-02

    Applicant: Samuel R. Shortes ,  Edwin Graham Millis

    Inventor： Samuel R. Shortes ,  Edwin Graham Millis

    IPC: H01L21/304 ,  H01L21/00 ,  B08B3/00 ,  B08B3/04

    CPC classification number: H01L21/67051 ,  Y10S134/902

    Abstract: Method and apparatus for cleaning the surface of a slice of semiconductor material through the use of a liquid spray, wherein the liquid spray is delivered at an angle to the exposed surface of a rotating semiconductor slice at a controlled pressure and velocity, and strikes the surface of the semiconductor slice substantially along a linear path coinciding with the diameter of the slice. The apparatus includes an upstanding pedestal having a slice-supporting surface on which the slice of semiconductor material to be cleaned is disposed. The pedestal is mounted within a housing which includes a motor for imparting rotation to the pedestal and a vacuum pump for inducing a suction in openings provided in the slice-supporting surface of the pedestal so as to retain the slice in place when rotary movement is imparted thereto. A spray nozzle for delivering a flat fan-shaped spray pattern is disposed within the housing, the spray nozzle being positioned above the level of the slice-supporting surface for dispensing a liquid spray onto the exposed surface of the slice positioned thereon. The housing is also provided with a transparent dome-shaped cover overlying the upstanding pedestal and the spray nozzle to define a cleaning chamber. The cover in its closed position completes an electric circuit operating the motor and the vacuum pump to impart rotation to the pedestal and to retain the semiconductor slice upon the surface of the pedestal by inducing suction in the openings provided therein. De-ionized water is delivered from the spray nozzle as a liquid spray to the surface of the semiconductor slice at a high pressure and velocity to produce a corona discharge for effecting a cleaning operation of the exposed surface of the semiconductor slice wherein particulate surface debris of a particle size smaller than the width of the theoretically determined dead space layer associated with the exposed slice surface is removed therefrom.

    System and method for monitoring substances and reactions
    4.
    发明授权
    System and method for monitoring substances and reactions 失效
    用于监测物质和反应的系统和方法

    公开(公告)号：US5025222A

    公开(公告)日：1991-06-18

    申请号：US442980

    申请日：1989-11-27

    Applicant: Bentley N. Scott ,  Samuel R. Shortes

    Inventor： Bentley N. Scott ,  Samuel R. Shortes

    IPC: B01D11/04 ,  G01N22/00 ,  G01N33/28 ,  G05D7/00 ,  G05D21/02

    CPC classification number: G01N22/00 ,  G01N33/28 ,  G01N33/2823

    Abstract: A system and method for monitoring conditions in a fluid medium. A stream of the fluid medium is flowed through a fluid container which is electrically configured as a transmission line segment and which is electrically connected to load to UHF or microwave oscillator. The oscillator is not isolated from the load, and is operated free-running, at a starting frequency which is chosen to provide a particularly strong shift in permittivity of the fluid medium, as the chemical reaction progresses. Preferably the frequency and insertion loss of the oscillator are monitored, to gauge the progress of the reaction.

    Abstract translation: 一种用于监测流体介质中的状况的系统和方法。 流体介质的流动通过流体容器，流体容器被电气地配置为传输线段并且电连接到负载到UHF或微波振荡器。 振荡器不与负载隔离，并且以起始频率运行自由运行，起始频率被选择为当化学反应进行时提供流体介质的介电常数的特别强的偏移。 最好监测振荡器的频率和插入损耗，以衡量反应进程。

    Cartridge and target device for markmanship training
    5.
    发明授权
    Cartridge and target device for markmanship training 失效
    用于标记技术培训的墨盒和目标装置

    公开(公告)号：US4678437A

    公开(公告)日：1987-07-07

    申请号：US781047

    申请日：1985-09-27

    Applicant: Bentley N. Scott ,  Vernon R. Porter ,  Samuel R. Shortes

    Inventor： Bentley N. Scott ,  Vernon R. Porter ,  Samuel R. Shortes

    IPC: F41A33/02 ,  G09B9/00

    CPC classification number: F41A33/02

    Abstract: Marksmanship training apparatus which provides for simulated firing of projectile-type weapons is disclosed and comprises a substitute cartridge and a receiver/detector target device. The substitute cartridge is self contained and includes a power source, an energy emitting device which emits a pulse or pulses or energy with predetermined characteristics, a lens device to concentrate the emitted energy, an energy activation device and a transfer device to transfer the energy from the firing mechanism of the weapon to the energy activation device to activate same. The receiver/detector target device includes devices to detect the presence of the pulse or pulses of energy while ignoring the ambient light level surrounding the target device. The target device initiates a time cycle and provides a display of the elapsed time from initiation to the receipt of a hit from the pulse or pulses of energy emitted from the substitute cartridge in the weapon. An audio indication is also provided when a hit occurs.

    Abstract translation: 公开了提供射弹型武器的模拟射击的标记训练装置，其包括替代筒和接收器/检测器目标装置。 替代墨盒是自包含的，并且包括电源，发射具有预定特性的脉冲或脉冲或能量的能量发射装置，用于集中发射的能量的透镜装置，能量激活装置和传送装置，以将能量从 武器的射击机制到能量激活装置激活相同。 接收器/检测器目标装置包括用于检测脉冲或能量脉冲的存在的装置，同时忽略目标装置周围的环境光级。 目标装置启动时间周期，并且提供从从武器中的替代筒发射的能量的脉冲或脉冲的从起始到接收命中的经过时间的显示。 当发生命中时也提供音频指示。

    Dielectric Barrier Discharge Apparatus
    8.
    发明申请
    Dielectric Barrier Discharge Apparatus 审中-公开
    介质阻挡放电装置

    公开(公告)号：US20150022075A1

    公开(公告)日：2015-01-22

    申请号：US14332834

    申请日：2014-07-16

    Applicant: Samuel R. Shortes

    Inventor： Samuel R. Shortes

    IPC: H05H1/24

    CPC classification number: H05H1/2406 ,  H05H2001/2412

    Abstract: This invention relates to dielectric barrier discharges devices. More particularly, it relates to dielectric barrier discharge apparatus which employ a dielectric barrier disposed within the discharge gap between spaced apart electrodes to generate a plasma when subjected to pulsed high voltages. The dielectric barrier material has a high thermal conductivity and is held in physical contact with a heat sink which aids in dissipation of thermal energy released in formation of the plasma.

    Abstract translation: 本发明涉及介电阻挡放电装置。 更具体地说，本发明涉及介电阻挡放电装置，它采用设置在间隔开的电极之间的放电间隙内的电介质阻挡层，以在经受脉冲高电压时产生等离子体。 介电阻挡材料具有高的导热性并且与散热器保持物理接触，该散热器有助于在形成等离子体时释放的热能的耗散。

    Method for monitoring the state of microcrystalline change of solid materials
    9.
    发明授权
    Method for monitoring the state of microcrystalline change of solid materials 有权
    监测固体材料微晶变化状态的方法

    公开(公告)号：US6166551A

    公开(公告)日：2000-12-26

    申请号：US416306

    申请日：1999-10-12

    Applicant: Bentley N. Scott ,  Samuel R. Shortes

    Inventor： Bentley N. Scott ,  Samuel R. Shortes

    IPC: G01N22/00 ,  G01N27/26

    CPC classification number: G01N22/00 ,  G01N33/02 ,  G01N33/146 ,  G01N33/442

    Abstract: A process for monitoring the state of microcrystalline change of solid materials, by observing the frequency of a load-pull oscillator which is RF-coupled to the material under test (preferably by a simple single-ended RF probe). Areas where this technique is of particular interest are in monitoring the curing of shaped aerodynamic composite materials, and in monitoring the curing of concrete and cement compositions.

    Abstract translation: 通过观察RF耦合到待测材料（优选通过简单的单端射频探针）的负载拉 - 拉振荡器的频率来监测固体材料的微晶变化状态的过程。 这种技术特别有意义的领域是监测成型的空气动力学复合材料的固化，以及监测混凝土和水泥组合物的固化。

    Marksmanship training apparatus
    10.
    发明授权
    Marksmanship training apparatus 失效
    标识训练器具

    公开(公告)号：US4983123A

    公开(公告)日：1991-01-08

    申请号：US431902

    申请日：1989-11-06

    Applicant: Bentley N. Scott ,  Samuel R. Shortes

    Inventor： Bentley N. Scott ,  Samuel R. Shortes

    IPC: F41A33/02

    CPC classification number: F41A33/02

    Abstract: Marksmanship training apparatus is used with air guns or weapons firing blank cartridges and comprises a housing member with an attached muzzle alignment tube for insertion into the bore of the barrel of the weapon and includes sealing apparatus around the muzzle alignment tube to minimize leakage of gas between the bore and the muzzle alignment tube and to prevent the gas from pushing the muzzle alignment tube out of the bore. The housing member includes a switch which is activated by the gas to complete an electrical circuit positioned in the housing to cause light energy to be emitted from the housing member.

    Abstract translation: 标枪训练装置用于空气枪或武器射击空白墨盒，并且包括具有附接的枪口对准管的壳体构件，用于插入武器枪管的孔中，并且包括围绕枪口对准管的密封装置，以最小化气体在两者之间的泄漏 孔和枪口对准管，并防止气体将枪口对准管推出孔。 壳体构件包括由气体启动的开关，以完成位于壳体中的电路，以使得能量从壳体构件发射。

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