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1.发明授权
公开(公告)号：US5024918A
公开(公告)日：1991-06-18
申请号：US754041
申请日：1976-12-23
Applicant: Vernon R. Porter , Thomas C. Penn
Inventor： Vernon R. Porter , Thomas C. Penn
Abstract: Heat activated method for developing and improving the definition of a patterned heat-photoresist layer as applied to a substrate surface of different material, such as a semiconductor slice, in the fabrication of an electronic structure or photomask, through the use of a reactive species of oxygen including monatomic oxygen or ozone in an oxygen-containing gas. A layer of photoresist material upon being selectively exposed to an energy source, such as ultraviolet radiation, X-ray, or E-beam radiation acquires a predetermined patterned definition therein because of chemical changes in the photoresist material which is photosensitive. After such selective exposure, the photoresist layer is characterized by a differential reactivity which is heightened by a chemical or a physical change occurring in either one of the exposed or unexposed portions of the layer of photoresist material enabling the selective removal thereof. In a preferred embodiment, the photoresist material is of a character undergoing a reduction in thickness in areas unexposed to the energy source which may be accentuated by a further heat treatment to produce regions of reduced thickness in the photoresist layer corresponding to the desired pattern. The regions of photoresist material of reduced thickness are then selectively removed from the layer of photoresist material by the differential reaction of the gaseous reactive oxygen species therewith to develop the pattern in the layer of photoresist material as defined by its selective exposure to the energy source.
Abstract translation: 热激活方法用于显影和改进图案化热致抗蚀剂层的定义，其应用于电子结构或光掩模的制造中的诸如半导体片的不同材料的衬底表面，通过使用反应性物质 在含氧气体中包括单原子氧或臭氧的氧。 选择性地暴露于诸如紫外线辐射，X射线或电子束辐射的能量源的光致抗蚀剂材料层由于光致抗蚀剂材料中的化学变化而获得预定的图案化定义。 在这种选择性曝光之后，光致抗蚀剂层的特征在于差异反应性，其由在光致抗蚀剂材料层的曝光或未曝光部分中的任一个中发生的化学或物理变化而升高，从而能够进行选择性去除。 在优选实施例中，光致抗蚀剂材料具有在未暴露于能量源的区域中经历厚度减小的特征，其可以通过进一步的热处理来加强，以在对应于期望图案的光致抗蚀剂层中产生厚度减小的区域。 然后通过气态活性氧的差异反应从光致抗蚀剂材料层中选择性地除去厚度减小的光致抗蚀剂材料的区域，以形成光刻胶材料层中的图案，如通过其选择性暴露于能量源所界定的。
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公开(公告)号：US4678437A
公开(公告)日：1987-07-07
申请号：US781047
申请日：1985-09-27
Applicant: Bentley N. Scott , Vernon R. Porter , Samuel R. Shortes
Inventor： Bentley N. Scott , Vernon R. Porter , Samuel R. Shortes
CPC classification number: F41A33/02
Abstract: Marksmanship training apparatus which provides for simulated firing of projectile-type weapons is disclosed and comprises a substitute cartridge and a receiver/detector target device. The substitute cartridge is self contained and includes a power source, an energy emitting device which emits a pulse or pulses or energy with predetermined characteristics, a lens device to concentrate the emitted energy, an energy activation device and a transfer device to transfer the energy from the firing mechanism of the weapon to the energy activation device to activate same. The receiver/detector target device includes devices to detect the presence of the pulse or pulses of energy while ignoring the ambient light level surrounding the target device. The target device initiates a time cycle and provides a display of the elapsed time from initiation to the receipt of a hit from the pulse or pulses of energy emitted from the substitute cartridge in the weapon. An audio indication is also provided when a hit occurs.
Abstract translation: 公开了提供射弹型武器的模拟射击的标记训练装置，其包括替代筒和接收器/检测器目标装置。 替代墨盒是自包含的，并且包括电源，发射具有预定特性的脉冲或脉冲或能量的能量发射装置，用于集中发射的能量的透镜装置，能量激活装置和传送装置，以将能量从 武器的射击机制到能量激活装置激活相同。 接收器/检测器目标装置包括用于检测脉冲或能量脉冲的存在的装置，同时忽略目标装置周围的环境光级。 目标装置启动时间周期，并且提供从从武器中的替代筒发射的能量的脉冲或脉冲的从起始到接收命中的经过时间的显示。 当发生命中时也提供音频指示。
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公开(公告)号：US4621411A
公开(公告)日：1986-11-11
申请号：US656048
申请日：1984-09-28
Applicant: Robert H. Havemann , Vernon R. Porter
Inventor： Robert H. Havemann , Vernon R. Porter
IPC: H01L29/78 , H01L21/225 , H01L21/26 , H01L21/268 , H01L21/336 , H01L21/263 , H01L21/265
CPC classification number: H01L21/268 , H01L21/2254 , Y10S148/091
Abstract: Optical illumination rather than furnace heating is used to drive in MOSFET source and drain diffusions, preferably using a surface layer of antimony as the dopant source. This results in substantially less overlap between the gate and the source and drain diffusions. Similarly, if the present invention is practiced in a process having gate sidewalls less than zero overlap can be achieved.
Abstract translation: 使用光学照明而不是炉加热来驱动MOSFET源极和漏极扩散，优选使用锑的表面层作为掺杂剂源。 这导致栅极和源极和漏极扩散之间的重叠相当少。 类似地，如果本发明在具有小于零的栅极侧壁的工艺中实现，则可以实现重叠。
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公开(公告)号：US5790402A
公开(公告)日：1998-08-04
申请号：US307880
申请日：1994-09-16
Applicant: Gabriel Liebermann , T. Clifton Penn , Vernon R. Porter , Don Crockett
Inventor： Gabriel Liebermann , T. Clifton Penn , Vernon R. Porter , Don Crockett
CPC classification number: G06Q10/043 , Y10S83/936 , Y10T83/533 , Y10T83/853
Abstract: A row of light emitting diodes approximately one inch apart are mounted along the edge of a spreading table. A small computer reads a cut file which specifies (among other items) the splice zone locations. The computer then controls the lighting of appropriate LEDs to define the beginning and ending of these splice zones. Locations between the LEDs may be identified by lighting LEDs on either side of the appropriate location.
Abstract translation: 大约一英寸的一排发光二极管沿扩展台的边缘安装。 一台小型计算机读取一个剪切文件，其中指定（其他项目）拼接区位置。 然后，计算机控制适当LED的照明以定义这些接合区的开始和结束。 可以通过在适当位置的任一侧照明LED来识别LED之间的位置。
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公开(公告)号：US4912487A
公开(公告)日：1990-03-27
申请号：US173775
申请日：1988-03-25
Applicant: Vernon R. Porter , William G. Manns , Anthony B. Wood , S. Charles Baber , Thomas C. Penn
Inventor： Vernon R. Porter , William G. Manns , Anthony B. Wood , S. Charles Baber , Thomas C. Penn
CPC classification number: G03F7/70633 , B23K26/0853 , G01N21/956 , G03F7/704 , G03F7/70641 , G03F7/70725 , G01N21/9501
Abstract: A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.
Abstract translation: 激光图案检查和/或写入系统，其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。 检查也可以通过非激光的分层照明进行。 组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。 每个多边形的数据描述都包含在单个数据帧中。 将数据库转换为转折点多边形表示，然后转换为左和右向量表示，然后转换为寻址像素表示，然后是整个目标的位映射表示。 大多数转换是在并行管道中进行的。 多边形周围的保护带用于检查过程中的错误过滤。 保卫带是多边形，仅包含保护带信息的帧被发送到专用管道。 在理想与实际图案的像素比较时，随后在缺陷区域合并期间，也进行误差滤波。 缺陷区域被视为理想和实际目标区域的颜色叠加，从实时生成的数据。 缺陷区域可以去放大，以允许查看较大的目标区域。 自动对焦将扫描激光束保持在目标上。 检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。 干涉仪或玻璃刻度尺可以让舞台位置知道。
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Patent Agency Ranking
公开(公告)号：US4673592A
公开(公告)日：1987-06-16
申请号：US384353
申请日：1982-06-02
Applicant: Vernon R. Porter , Samuel C. Baber
Inventor： Vernon R. Porter , Samuel C. Baber
IPC: H01L21/768 , H01L21/268
CPC classification number: H01L21/76877 , H01L21/7684
Abstract: The present invention discloses a method for planarizing contact holes, vias, and other surface depressions, during the fabrication of an integrated circuit structure. Differential thermal conductivities are exploited to selectively remove a deposited film of metal from high-thermal-resistance areas, such as silicon dioxide or other insulators, and not from low-thermal-resistance areas, such as silicon or metal. By repetition of this step, very deep depressions, having a high aspect ratio, are reliably filled.
Abstract translation: 本发明公开了一种在制造集成电路结构期间平面化接触孔，通孔和其它表面凹陷的方法。 利用差分热导率来选择性地从高热阻区域（例如二氧化硅或其它绝缘体）中除去金属沉积膜，而不是从低热阻区域（例如硅或金属）去除沉积的金属膜。 通过重复该步骤，具有高纵横比的非常深的凹陷被可靠地填充。
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公开(公告)号：US4388517A
公开(公告)日：1983-06-14
申请号：US189495
申请日：1980-09-22
Applicant: Eric F. Schulte , Vernon R. Porter
Inventor： Eric F. Schulte , Vernon R. Porter
IPC: H01L21/302 , H01L21/3065 , H01L21/321 , H01L21/768 , H05K3/14 , B23K27/00
CPC classification number: H01L21/321 , H01L21/76879 , H05K3/143 , Y10S438/94
Abstract: A method for patterning layers of material on a substrate without photoresist by using a selective sublimation process. Differences in thermal conductivity of materials underneath a layer of material to be patterned cause patterning by sublimation over areas of low thermal conductivity, initiated by a pulsed or swept radiated energy source.
Abstract translation: 通过使用选择性升华方法来在基板上图案化材料层的方法，而不使用光致抗蚀剂。 待图案化材料层下方的材料的热导率差异通过在脉冲或扫描辐射能源引发的低热导率区域升华来形成图案。
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公开(公告)号：US4886958A
公开(公告)日：1989-12-12
申请号：US173707
申请日：1988-03-25
Applicant: Jerry D. Merryman , Vernon R. Porter
Inventor： Jerry D. Merryman , Vernon R. Porter
CPC classification number: G03F1/84 , G02B26/10 , G03F7/704 , G03F7/70641 , G03F7/70725
Abstract: A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. An autofocus keeps the scanning laser beam in focus on the target. The autofocus system includes an objective lens assembly through which a first laser beam is directed onto a writing surface, an autofocus laser which is detected by a photodetector after it is reflected from the surface of a target, and a linear magnetic motor for moving a lens in the objective lens assembly to keep the first laser beam focused on the writing surface.
Abstract translation: 激光图案检查和/或写入系统，其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。 自动对焦将扫描激光束保持在目标上。 自动对焦系统包括物镜组件，第一激光束通过该物镜组件被引导到书写表面上;自动对焦激光器，由光电检测器在从靶表面反射之后检测;以及线性磁电机，用于移动透镜 在物镜组件中保持第一激光束聚焦在书写表面上。
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公开(公告)号：US4465716A
公开(公告)日：1984-08-14
申请号：US384354
申请日：1982-06-02
Applicant: Samuel C. Baber , Vernon R. Porter
Inventor： Samuel C. Baber , Vernon R. Porter
IPC: H01L21/268 , H01L21/285
CPC classification number: H01L21/268 , H01L21/28562
Abstract: A method for selectively depositing a composite material over high-thermal-conductivity areas (such as silicon) and not over low-thermal-conductivity areas (such as oxide), which does not require any additional patterning step. A composite material, such as TiW is deposited overall by sputtering. A short pulse of light is then applied, and the composite material over the oxide separates and flakes off, while the composite material over the high-thermal-conductivity area remains in place.
Abstract translation: 一种用于在高热导率区域（例如硅）上选择性地沉积复合材料的方法，而不是在不需要任何附加图案化步骤的低热导率区域（例如氧化物）上沉积复合材料。 通过溅射整体地沉积诸如TiW的复合材料。 然后施加短脉冲的光，并且氧化物上的复合材料分离和剥落，而高导热区域上的复合材料保持原位。
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公开(公告)号：US4178224A
公开(公告)日：1979-12-11
申请号：US870912
申请日：1978-01-19
Applicant: Vernon R. Porter
Inventor： Vernon R. Porter
CPC classification number: C25B1/00 , C25B9/08 , Y10S438/909
Abstract: A system for supplying arsine having automatic arsine monitoring and controls to a semiconductor reactor is described wherein arsine is electrochemically generated from an electrolyte solution such as an inorganic acid and an arsenite salt. The electrolytic cell vessel also comprises the cathode structure. A circular concentric barrier is provided to isolate the oxygen produced at the cathode in an annular region from the arsine generated at the anode located centrally within the cell.
Abstract translation: 描述了一种用于向半导体反应器提供具有自动胂监测和控制的胂的系统，其中胂由诸如无机酸和亚砷酸盐的电解质溶液电化学产生。 电解池容器还包括阴极结构。 提供圆形同心屏障以将在阴极处产生的氧气与在位于电池中心的阳极处产生的胂隔离。
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