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1.
公开(公告)号:US09203134B1
公开(公告)日:2015-12-01
申请号:US13780285
申请日:2013-02-28
申请人: Sandia Corporation
发明人: Michael David Henry , Roy H. Olsson , Karl Douglas Greth , Travis Ryan Young , Janet Nguyen , James E. Stevens
CPC分类号: H01P11/007 , H03H3/0077 , H03H3/04 , H03H9/02228 , H03H2003/0478
摘要: A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material can be deposited on a facial surface of the element. The resonance of the element can be tuned by annealing the deposited film. Also disclosed are methods of applying a film on a resonator and annealing the film, thereby tuning one or more resonant properties of the resonator.
摘要翻译: 公开了一种微机械谐振器。 谐振器包括谐振微机械元件。 可以将退火材料的膜沉积在元件的表面上。 可以通过退火沉积膜来调节元件的谐振。 还公开了在共振器上施加膜并退火膜的方法,从而调谐谐振器的一个或多个谐振特性。