公开(公告)号：US09270281B1

公开(公告)日：2016-02-23

申请号：US14051818

申请日：2013-10-11

申请人： Sandia Corporation

发明人： Kenneth Wojciechowski ,  Roy H. Olsson

IPC分类号： H03L7/00

CPC分类号： H03L7/00 ,  H03H9/0207 ,  H03H9/25 ,  H03H2009/02188 ,  H03J3/00

摘要： Apparatuses and methods for tuning center frequencies are described herein. Examples of tuning described herein including tuning using feedback from the resonator. Variable gain feedback for tuning of acoustic wave resonators is provided in some examples. An example apparatus may include a resonator and a feedback loop. The resonator may be configured to receive a tuning signal and to provide a feedback signal. The feedback signal may be based on the tuning signal. The feedback loop may be configured to receive the feedback signal from the resonator. The feedback loop further may be configured to provide the tuning signal to actively tune a center frequency of the resonator. The tuning signal may be based on the feedback signal.

摘要翻译： 本文描述了用于调谐中心频率的装置和方法。 这里描述的调谐示例包括使用来自谐振器的反馈的调谐。 在一些示例中提供了用于调谐声波谐振器的可变增益反馈。 示例性设备可以包括谐振器和反馈回路。 谐振器可以被配置为接收调谐信号并提供反馈信号。 反馈信号可以基于调谐信号。 反馈回路可被配置为从谐振器接收反馈信号。 反馈环路还可以被配置为提供调谐信号以主动调谐谐振器的中心频率。 调谐信号可以基于反馈信号。

公开(公告)号：US10009002B1

公开(公告)日：2018-06-26

申请号：US15239662

申请日：2016-08-17

申请人： Sandia Corporation

发明人： Darren W. Branch ,  Roy H. Olsson

IPC分类号： H03H9/15 ,  H03H9/25 ,  H03H3/02 ,  H03H3/08 ,  H03H9/02 ,  H03H3/007

CPC分类号： H03H9/02228 ,  H03H3/007 ,  H03H3/02 ,  H03H3/08 ,  H03H9/02086 ,  H03H9/02818 ,  H03H2003/027 ,  H03H2009/02503 ,  H03H2009/155

摘要： The present invention relates to methods for suppressing spurious modes in microresonators. In particular embodiments, such spurious modes can be reduced by providing one or more structural components that effectively reduce the acoustic velocity in the transducer domain. Additional methods and microresonators are described herein.

公开(公告)号：US09641154B2

公开(公告)日：2017-05-02

申请号：US15349593

申请日：2016-11-11

申请人： Sandia Corporation

发明人： Roy H. Olsson ,  Thomas A. Friedmann ,  Sara Jensen Homeijer ,  Michael Wiwi ,  Khalid Mikhiel Hattar ,  Blythe Clark ,  Todd Bauer ,  Stuart B. Van Deusen

IPC分类号： H03H9/54 ,  H03H3/02 ,  H03H9/02 ,  H03H9/17 ,  H03H9/205

CPC分类号： H03H9/54 ,  H03H3/02 ,  H03H9/02228 ,  H03H9/17 ,  H03H9/205 ,  H03H2003/027

摘要： A single crystal micromechanical resonator includes a suspended plate of lithium niobate or lithium tantalate. The suspended plate and a support structure are formed from a single crystal.

公开(公告)号：US09484216B1

公开(公告)日：2016-11-01

申请号：US14728810

申请日：2015-06-02

申请人： Sandia Corporation

发明人： Todd Bauer ,  Andrew John Gross ,  Peggy J. Clews ,  Roy H. Olsson

IPC分类号： H01L21/3065 ,  H01L41/332 ,  H01L41/331 ,  H01L41/18 ,  H01L21/308 ,  H01L21/311 ,  H01L21/3213

CPC分类号： H01L21/3065 ,  H01L21/308 ,  H01L21/31116 ,  H01L21/31122 ,  H01L21/32136 ,  H01L21/32139 ,  H01L41/332 ,  H03H2003/021 ,  H03H2009/155

摘要： The present invention provides methods for etching semiconductor devices, such aluminum nitride resonators. The methods herein allow for devices having improved etch profiles, such that nearly vertical sidewalls can be obtained. In some examples, the method employs a dry etch step with a primary etchant gas that omits BCl3, a common additive.

摘要翻译： 本发明提供了蚀刻这种氮化铝谐振器的半导体器件的方法。 这里的方法允许具有改进的蚀刻轮廓的装置，使得可以获得几乎垂直的侧壁。 在一些实例中，该方法采用干蚀刻步骤，其中初始蚀刻剂气体省略了常见的添加剂BCl3。

公开(公告)号：US09203134B1

公开(公告)日：2015-12-01

申请号：US13780285

申请日：2013-02-28

申请人： Sandia Corporation

发明人： Michael David Henry ,  Roy H. Olsson ,  Karl Douglas Greth ,  Travis Ryan Young ,  Janet Nguyen ,  James E. Stevens

IPC分类号： H03H9/00 ,  H01P11/00 ,  H01P1/201 ,  H03H3/007 ,  H03H9/46

CPC分类号： H01P11/007 ,  H03H3/0077 ,  H03H3/04 ,  H03H9/02228 ,  H03H2003/0478

摘要： A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material can be deposited on a facial surface of the element. The resonance of the element can be tuned by annealing the deposited film. Also disclosed are methods of applying a film on a resonator and annealing the film, thereby tuning one or more resonant properties of the resonator.

摘要翻译： 公开了一种微机械谐振器。 谐振器包括谐振微机械元件。 可以将退火材料的膜沉积在元件的表面上。 可以通过退火沉积膜来调节元件的谐振。 还公开了在共振器上施加膜并退火膜的方法，从而调谐谐振器的一个或多个谐振特性。

公开(公告)号：US09941857B1

公开(公告)日：2018-04-10

申请号：US15072611

申请日：2016-03-17

申请人： Sandia Corporation

发明人： Roy H. Olsson ,  Vincent M. Hietala

IPC分类号： H03H9/02 ,  H03H9/54 ,  H03H9/46 ,  H03H9/64

CPC分类号： H03H9/02433 ,  H03H9/462 ,  H03H9/54 ,  H03H9/64

摘要： A spur cancelling, electromechanical filter includes a first resonator having a first resonant frequency and one or more first spurious responses, and it also includes, electrically connected to the first resonator, a second resonator having a second resonant frequency and one or more second spurious responses. The first and second resonant frequencies are approximately identical, but the first resonator is physically non-identical to the second resonator. The difference between the resonators makes the respective spurious responses different. This allows for filters constructed from a cascade of these resonators to exhibit reduced spurious responses.

公开(公告)号：US09646874B1

公开(公告)日：2017-05-09

申请号：US13959136

申请日：2013-08-05

申请人： Sandia Corporation

发明人： Kenneth Wojciechowski ,  Roy H. Olsson ,  Peggy J. Clews ,  Todd Bauer

IPC分类号： H01L21/00 ,  H01L21/764 ,  H01L29/06 ,  H01L21/762

CPC分类号： H01L21/823481 ,  B81C1/00 ,  H01L21/02178 ,  H01L21/02532 ,  H01L21/02592 ,  H01L21/30604 ,  H01L21/31111 ,  H01L21/3213 ,  H01L21/762 ,  H01L21/764 ,  H01L21/84 ,  H01L23/34 ,  H01L27/12 ,  H01L29/0649 ,  H03H3/02 ,  H03H2009/02181

摘要： Thermally isolated devices may be formed by performing a series of etches on a silicon-based substrate. As a result of the series of etches, silicon material may be removed from underneath a region of an integrated circuit (IC). The removal of the silicon material from underneath the IC forms a gap between remaining substrate and the integrated circuit, though the integrated circuit remains connected to the substrate via a support bar arrangement that suspends the integrated circuit over the substrate. The creation of this gap functions to release the device from the substrate and create a thermally-isolated integrated circuit.

公开(公告)号：US20170054432A1

公开(公告)日：2017-02-23

申请号：US15349593

申请日：2016-11-11

申请人： Sandia Corporation

发明人： Roy H. Olsson ,  Thomas A. Friedmann ,  Sara Jensen Homeijer ,  Michael Wiwi ,  Khalid Mikhiel Hattar ,  Blythe Clark ,  Todd Bauer ,  Stuart B. Van Deusen

IPC分类号： H03H9/54 ,  H03H9/205 ,  H03H3/02 ,  H03H9/17

CPC分类号： H03H9/54 ,  H03H3/02 ,  H03H9/02228 ,  H03H9/17 ,  H03H9/205 ,  H03H2003/027

摘要： The present invention relates to a single crystal micromechanical resonator. In particular, the resonator includes a lithium niobate or lithium tantalate suspended plate. Also provided are improved microfabrication methods of making resonators, which does not rely on complicated wafer bonding, layer fracturing, and mechanical polishing steps. Rather, the methods allow the resonator and its components to be formed from a single crystal.

摘要翻译： 本发明涉及单晶微机械谐振器。 特别地，谐振器包括铌酸锂或钽酸锂悬浮板。 还提供了制造谐振器的改进的微细加工方法，其不依赖于复杂的晶片接合，层压裂和机械抛光步骤。 相反，这些方法允许谐振器及其部件由单晶形成。

公开(公告)号：US09525398B1

公开(公告)日：2016-12-20

申请号：US14288236

申请日：2014-05-27

申请人： Sandia Corporation

发明人： Roy H. Olsson ,  Thomas A. Friedmann ,  Sara Jensen Homeijer ,  Michael Wiwi ,  Khalid Mikhiel Hattar ,  Blythe Clark ,  Todd Bauer ,  Stuart B. Van Deusen

IPC分类号： H03H9/17 ,  H03H9/205 ,  H03H9/54 ,  H03H3/02

CPC分类号： H03H9/54 ,  H03H3/02 ,  H03H9/02228 ,  H03H9/17 ,  H03H9/205 ,  H03H2003/027

摘要： The present invention relates to a single crystal micromechanical resonator. In particular, the resonator includes a lithium niobate or lithium tantalate suspended plate. Also provided are improved microfabrication methods of making resonators, which does not rely on complicated wafer bonding, layer fracturing, and mechanical polishing steps. Rather, the methods allow the resonator and its components to be formed from a single crystal.

摘要翻译： 本发明涉及单晶微机械谐振器。 特别地，谐振器包括铌酸锂或钽酸锂悬浮板。 还提供了制造谐振器的改进的微细加工方法，其不依赖于复杂的晶片接合，层压裂和机械抛光步骤。 相反，这些方法允许谐振器及其部件由单晶形成。

公开(公告)号：US09276557B1

公开(公告)日：2016-03-01

申请号：US13932859

申请日：2013-07-01

申请人： Sandia Corporation

发明人： Christopher Nordquist ,  Roy H. Olsson ,  Sean Michael Scott ,  Kenneth Wojciechowski ,  Darren W. Branch

IPC分类号： H03H9/38 ,  H03H15/00 ,  H03H9/54 ,  H03H9/42

CPC分类号： H03H9/6403 ,  H03H9/02228

摘要： An acoustically coupled frequency selective radio frequency (RF) device is provided. The device includes a piezoelectric substrate overlain by a plurality of electrodes. The device further includes a pair of RF input terminals at least one of which is electrically connected to at least one of the electrodes, and a pair of output RF terminals, at least one of which is electrically connected to at least one other of the electrodes. At least one of the electrodes is electromechanically reconfigurable between a state in which it is closer to a face of the piezoelectric substrate and at least one state in which it is farther from the face of the piezoelectric substrate.

摘要翻译： 提供声耦合频率选择射频（RF）装置。 该器件包括由多个电极覆盖的压电基片。 该装置还包括一对RF输入端子，其至少一个电连接到至少一个电极，以及一对输出RF端子，其至少一个电连接到电极中的至少一个电极 。 电极中的至少一个在其更靠近压电基板的表面的状态和离压电基板的表面更远的至少一个状态下是机电可重构的。