公开(公告)号：US07271363B2

公开(公告)日：2007-09-18

申请号：US10931223

申请日：2004-09-01

申请人： Sang Hun Lee ,  Jay Joongsoo Kim ,  Togo Kinoshita

发明人： Sang Hun Lee ,  Jay Joongsoo Kim ,  Togo Kinoshita

IPC分类号： B23K10/00 ,  A61B18/18

CPC分类号： H05H1/46 ,  H05H2001/4637 ,  H05H2277/14

摘要： Portable microwave plasma systems including supply lines for providing microwaves and gas flow are disclosed. The supply line includes at least one gas line or conduit and a microwave coaxial cable. A portable microwave plasma system includes a microwave source, a waveguide-to-coax adapter and a waveguide that interconnects the microwave source with the waveguide-to-coax adapter, a portable discharge unit and the supply line. The portable discharge unit includes a gas flow tube coupled to the supply line to receive gas flow and a rod-shaped conductor that is axially disposed in the gas flow tube and has an end configured to receive microwaves from the microwave coaxial cable and a tapered tip positioned adjacent the outlet portion of the gas flow tube. The tapered tip is configured to focus microwave traveling through the rod-shaped conductor and generate plasma from the gas flow.

摘要翻译： 公开了包括用于提供微波和气流的供应线的便携式微波等离子体系统。 供应线包括至少一条气体管线或导管以及微波同轴电缆。 便携式微波等离子体系统包括微波源，波导到同轴电缆适配器和将微波源与波导到同轴电缆适配器，便携式放电单元和电源线相互连接的波导。 便携式排放单元包括连接到供应管线以接收气流的气流管，以及轴向设置在气流管中的棒状导体，并且具有构造成从微波同轴电缆接收微波的端部和锥形尖端 定位在气流管的出口部分附近。 锥形尖端被配置为聚焦通过杆状导体传播的微波并从气流产生等离子体。

公开(公告)号：US08035057B2

公开(公告)日：2011-10-11

申请号：US11631723

申请日：2005-07-07

申请人： Sang Hun Lee ,  Jay Joongsoo Kim

发明人： Sang Hun Lee ,  Jay Joongsoo Kim

IPC分类号： B23K10/00

CPC分类号： H05H1/46 ,  H05H2001/4622 ,  H05H2001/463

摘要： Systems and methods for generating microwave plasma are disclosed. The present invention provides a microwave plasma nozzle (26) that includes a gas flow tube (40), and a rod-shaped conductor (34) that is disposed in the gas flow tube (40) and has a tip (33) near the outlet of the gas flow tube (40). A portion (35) of the rod-shaped conductor (34) extends into a microwave cavity (24) to receive microwaves passing in the cavity (24). These received microwaves are focused at the tip (33) to heat the gas into plasma. The microwave plasma nozzle (26) also includes a vortex guide (36) between the rod-shaped conductor (34) and the gas flow tube (40) imparting a helical shaped flow direction to the gas flowing through the tube (40). The microwave plasma nozzle (26) further includes a shielding mechanism (108) for reducing a microwave power loss through the gas flow tube (40).

摘要翻译： 公开了用于产生微波等离子体的系统和方法。 本发明提供了一种微波等离子体喷嘴（26），其包括气体流通管（40）和杆状导体（34），其设置在气体流管（40）中，并具有靠近 气流管（40）的出口。 棒状导体（34）的一部分（35）延伸到微波空腔（24）中以接收通过空腔（24）的微波。 这些接收的微波聚焦在尖端（33），以将气体加热成等离子体。 微波等离子体喷嘴（26）还包括在杆状导体（34）和气体流管（40）之间的涡流引导件（36），其向流过管（40）的气体赋予螺旋形流动方向。 微波等离子体喷嘴（26）还包括用于减少通过气流管（40）的微波功率损耗的屏蔽机构（108）。

公开(公告)号：US07806077B2

公开(公告)日：2010-10-05

申请号：US10902435

申请日：2004-07-30

申请人： Sang Hun Lee ,  Jay Joongsoo Kim

发明人： Sang Hun Lee ,  Jay Joongsoo Kim

IPC分类号： C23F1/00 ,  C23C16/00 ,  H01L21/306

CPC分类号： H01J37/32192 ,  A61L2/14 ,  H05H1/46 ,  H05H2001/4622

摘要： Microwave plasma nozzle array systems and methods for configuring the microwave plasma nozzle arrays are disclosed. The microwaves are transmitted to a microwave cavity in a specific manner and form an interference pattern that includes high-energy regions within the microwave cavity. The high-energy regions are controlled by the phases and the wavelengths of the microwaves. A plurality of nozzle elements is provided in the array. Each of the nozzle elements has a portion partially disposed in the microwave cavity and receives a gas for passing therethrough. The nozzle elements receive microwave energy from one of the high-energy regions. Each of the nozzle elements include a rod-shaped conductor having a tip that focuses the microwaves and a plasma is then generated using the received gas.

摘要翻译： 公开了用于配置微波等离子体喷嘴阵列的微波等离子体喷嘴阵列系统和方法。 微波以特定方式传输到微波空腔，并形成包括微​​波腔内的高能区域的干涉图案。 高能区由微波的相位和波长控制。 阵列中设有多个喷嘴元件。 每个喷嘴元件具有部分地设置在微波腔中的部分并且接收用于穿过其中的气体。 喷嘴元件从高能区域之一接收微波能量。 每个喷嘴元件包括具有聚焦微波的尖端的棒状导体，然后使用接收的气体产生等离子体。

公开(公告)号：US20090056876A1

公开(公告)日：2009-03-05

申请号：US12087082

申请日：2006-01-30

申请人： Jay Joongsoo Kim ,  Sang Hun Lee ,  Kiyota Arai

发明人： Jay Joongsoo Kim ,  Sang Hun Lee ,  Kiyota Arai

IPC分类号： C23C16/511 ,  C23F1/02

CPC分类号： H01J37/32192 ,  H05H1/46 ,  H05H2001/4622

摘要： A work processing system S is provided with a plasma generating unit PU including a microwave generator 20 for generating microwaves of 2.45 GHz, a waveguide 10 for causing the microwaves to travel and a plasma generator 30 mounted on a surface of the waveguide 13 facing a work W; and a work conveyor C for conveying the work W to pass the plasma generator 30. The plasma generator 30 includes a plurality of arrayed plasma generating nozzles 31 for receiving the microwaves, generating a plasma-converted gas based on a receiving electrical energy and discharging the generated gas. The plasma-converted gas is blown to the work W in the plasma generator 30 while the work W is conveyed by the work conveyor C. It is possible both to successively plasma-process a plurality of works and to efficiently plasma-process works having large areas.

摘要翻译： 工作处理系统S设置有等离子体产生单元PU，其包括用于产生2.45GHz的微波的微波发生器20，用于使微波行进的波导10和安装在面向工作的波导13的表面上的等离子体发生器30 W; 以及用于输送工件W以通过等离子体发生器30的工作输送器C.等离子体发生器30包括用于接收微波的多个排列的等离子体产生喷嘴31，基于接收电能产生等离子体转换气体， 产生气体。 等离子体转换气体在等离子体发生器30中的工件W被吹送，同时工件W被工作输送机C输送。可以连续地等离子处理多个工件，并且有效地等离子体处理具有大的工件 地区

公开(公告)号：US07189939B2

公开(公告)日：2007-03-13

申请号：US10931221

申请日：2004-09-01

申请人： Sang Hun Lee ,  Jay Joongsoo Kim

发明人： Sang Hun Lee ,  Jay Joongsoo Kim

IPC分类号： B23K10/00

CPC分类号： H05H1/30

摘要： A portable microwave plasma discharge unit receives microwaves and a gas flow via a supply line. The portable microwave plasma discharge unit generates plasma from the gas flow and the received microwaves. The portable microwave plasma discharge unit includes a gas flow tube made of a conducting and/or dielectric material and a rod-shaped conductor that is axially disposed in the gas flow tube. The rod-shaped conductor has an end configured to contact a microwave supply conductor of the supply line to receive microwaves and a tapered tip positioned adjacent the outlet portion of the gas flow tube. The tapered tip is configured to focus the microwaves received from the microwave supply conductor to generate plasma from the gas flow.

摘要翻译： 便携式微波等离子体放电单元经由供电线接收微波和气流。 便携式微波等离子体放电单元从气流和接收的微波产生等离子体。 便携式微波等离子体放电单元包括由导电和/或电介质材料制成的气体流管和轴向设置在气体流管中的棒状导体。 棒状导体具有构造成接触供应线的微波供应导体以接收微波的端部和邻近气体流管出口部分定位的锥形尖端。 锥形尖端被配置为聚焦从微波供应导体接收的微波，以从气流产生等离子体。

公开(公告)号：US07164095B2

公开(公告)日：2007-01-16

申请号：US10885237

申请日：2004-07-07

申请人： Sang Hun Lee ,  Jay Joongsoo Kim

发明人： Sang Hun Lee ,  Jay Joongsoo Kim

IPC分类号： B23K10/00

CPC分类号： H05H1/46 ,  H05H2001/4622 ,  H05H2001/463

摘要： Systems and methods for generating relatively cool microwave plasma. The present invention provides a microwave plasma nozzle that includes a gas flow tube through which a gas flows, and a rod-shaped conductor that is disposed in the gas flow tube and has a tapered tip near the outlet of the gas flow tube. A portion of the rod-shaped conductor extends into a microwave cavity to receive microwaves passing in the cavity. These received microwaves are focused at the tapered tip to heat the gas into plasma. The microwave plasma nozzle also includes a vortex guide between the rod-shaped conductor and the gas flow tube imparting a helical shaped flow direction around the rod-shaped conductor to the gas flowing through the tube. The microwave plasma nozzle further includes a mechanism for electronically exciting the gas and a shielding mechanism for reducing a microwave power loss through the gas flow tube.

摘要翻译： 用于产生较冷微波等离子体的系统和方法。 本发明提供了一种微波等离子体喷嘴，其包括气体流过的气体流管和设置在气体流管中并且在气体流管的出口附近具有锥形尖端的棒状导体。 棒状导体的一部分延伸到微波腔中以接收经过空腔的微波。 这些接收到的微波聚焦在锥形尖端以将气体加热成等离子体。 微波等离子体喷嘴还包括在棒状导体和气体流动管之间的涡流引导件，其使得围绕棒状导体的螺旋形流动方向对流过管的气体。 微波等离子体喷嘴还包括用于电子激发气体的机构和用于减少通过气体流动管的微波功率损耗的屏蔽机构。

公开(公告)号：US09418794B2

公开(公告)日：2016-08-16

申请号：US13700613

申请日：2011-06-01

申请人： Chang Wook Kim ,  Dong Chan Park ,  Ju Young Song ,  Sang Hun Lee ,  Sung Bae Cho ,  Hyun Ho Yang ,  Jun Bo Yoon ,  Dong Hun Choi ,  Chang Hun Han

发明人： Chang Wook Kim ,  Dong Chan Park ,  Ju Young Song ,  Sang Hun Lee ,  Sung Bae Cho ,  Hyun Ho Yang ,  Jun Bo Yoon ,  Dong Hun Choi ,  Chang Hun Han

IPC分类号： H01G5/01 ,  H01G7/00 ,  H01G7/06 ,  H01G5/16

CPC分类号： H01G7/00 ,  H01G5/16

摘要： Disclosed is a MEMS variable capacitor, the capacitor including a first electrode, a second electrode that is floated on an upper surface of the first electrode, and a third electrode capable of variably-adjusting a capacitance value by adjusting a gap between the first electrode and the second electrode.

摘要翻译： 公开了一种MEMS可变电容器，电容器包括第一电极，漂浮在第一电极的上表面上的第二电极和能够通过调节第一电极和第二电极之间的间隙来可变地调整电容值的第三电极 第二电极。

公开(公告)号：US09237639B2

公开(公告)日：2016-01-12

申请号：US14125038

申请日：2012-06-21

申请人： Sang Hun Lee

发明人： Sang Hun Lee

IPC分类号： H01J27/16 ,  H01J27/18 ,  H05H7/02 ,  H01J37/32 ,  H01P5/12 ,  H05H1/46

CPC分类号： H05H7/02 ,  H01J37/32247 ,  H01P5/12 ,  H05H1/46 ,  H05H2001/4622

摘要： A microwave resonant cavity is provided. The microwave resonant cavity includes: a sidewall having a generally cylindrical hollow shape; a gas flow tube disposed inside the sidewall and having a longitudinal axis substantially parallel to a longitudinal axis of the sidewall; a plurality of microwave waveguides, each microwave waveguide having a longitudinal axis substantially perpendicular to the longitudinal axis of the sidewall and having a distal end secured to the sidewall and aligned with a corresponding one of a plurality of holes formed on the sidewall; a top plate secured to one end of the sidewall; and a sliding short circuit having: a disk slidably mounted between the sidewall and the gas flow tube; and at least one bar disposed inside the sidewall and arranged parallel to the longitudinal axis of the sidewall.

摘要翻译： 提供微波谐振腔。 微波谐振腔包括：具有大致圆柱形中空形状的侧壁; 设置在所述侧壁内侧并具有基本上平行于所述侧壁的纵向轴线的纵轴的气流管; 多个微波波导，每个微波波导具有基本上垂直于所述侧壁的纵向轴线的纵向轴线，并且具有固定到所述侧壁的远端并与形成在所述侧壁上的多个孔中的对应的一个孔对准; 顶板固定在侧壁的一端; 滑动短路具有：可滑动地安装在侧壁和气体流动管之间的盘; 以及设置在侧壁内并且平行于侧壁的纵向轴线布置的至少一个杆。

公开(公告)号：US09124241B2

公开(公告)日：2015-09-01

申请号：US14238065

申请日：2012-08-03

申请人： Sang Hun Lee

发明人： Sang Hun Lee

IPC分类号： H03H7/38 ,  H03H7/40 ,  H04B1/04 ,  H04B1/18

CPC分类号： H03H7/38 ,  H03H7/40 ,  H04B1/0458 ,  H04B1/18

摘要： Disclosed is an impedance matching apparatus performing impedance matching between a front-end module and an antenna. The impedance matching apparatus includes an RF front end providing a multi-band RF signal, a reflected power measuring module measuring a reflection coefficient for the RF input signal, a matching unit adjusting impedance so that the reflection coefficient is minimized, a first switch module provided in the RF front end to selectively switch the RF signal onto a bypass path, and a controller allowing the RF signal to be switched onto the bypass path if a specific frequency range is detected from the reflection coefficient.

摘要翻译： 公开了一种在前端模块和天线之间进行阻抗匹配的阻抗匹配装置。 阻抗匹配装置包括提供多频带RF信号的RF前端，测量RF输入信号的反射系数的反射功率测量模块，匹配单元调整阻抗以使反射系数最小化，提供第一开关模块 在RF前端中，如果从反射系数检测到特定频率范围，则将RF信号选择性地切换到旁路路径上，以及允许RF信号切换到旁路路径的控制器。

公开(公告)号：US20140125215A1

公开(公告)日：2014-05-08

申请号：US14125038

申请日：2012-06-21

申请人： Sang Hun Lee

发明人： Sang Hun Lee

IPC分类号： H05H7/02

CPC分类号： H05H7/02 ,  H01J37/32247 ,  H01P5/12 ,  H05H1/46 ,  H05H2001/4622

摘要： A microwave resonant cavity is provided. The microwave resonant cavity includes: a sidewall having a generally cylindrical hollow shape; a gas flow tube disposed inside the sidewall and having a longitudinal axis substantially parallel to a longitudinal axis of the sidewall; a plurality of microwave waveguides, each microwave waveguide having a longitudinal axis substantially perpendicular to the longitudinal axis of the sidewall and having a distal end secured to the sidewall and aligned with a corresponding one of a plurality of holes formed on the sidewall; a top plate secured to one end of the sidewall; and a sliding short circuit having: a disk slidably mounted between the sidewall and the gas flow tube; and at least one bar disposed inside the sidewall and arranged parallel to the longitudinal axis of the sidewall.

摘要翻译： 提供微波谐振腔。 微波谐振腔包括：具有大致圆柱形中空形状的侧壁; 设置在所述侧壁内侧并具有基本上平行于所述侧壁的纵向轴线的纵轴的气流管; 多个微波波导，每个微波波导具有基本上垂直于所述侧壁的纵向轴线的纵向轴线，并且具有固定到所述侧壁的远端并与形成在所述侧壁上的多个孔中的对应的一个孔对准; 顶板固定在侧壁的一端; 滑动短路具有：可滑动地安装在侧壁和气体流动管之间的盘; 以及设置在侧壁内并且平行于侧壁的纵向轴线布置的至少一个杆。