Photosensitive compositions useful for forming active patterns, methods of forming such active patterns and organic memory devices incorporating such active patterns
    1.
    发明申请
    Photosensitive compositions useful for forming active patterns, methods of forming such active patterns and organic memory devices incorporating such active patterns 有权
    用于形成活性图案的光敏组合物,形成这种活性图案的方法和结合这种活性图案的有机记忆装置

    公开(公告)号:US20120034735A1

    公开(公告)日:2012-02-09

    申请号:US13200362

    申请日:2011-09-23

    IPC分类号: H01L51/40

    摘要: Example embodiments herein relate to compositions useful in forming organic active patterns that may, in turn, be incorporated in organic memory devices. The compositions comprise N-containing conjugated electroconductive polymer(s), photoacid generator(s) and organic solvent(s) capable of dissolving suitable quantities of both the electroconductive polymer and the photoacid generator. Also disclosed are methods for patterning organic active layers formed using one or more of the compositions to produce organic active patterns, portions of which may be arranged between opposed electrodes to provide organic memory cells. The methods include directly exposing and developing the organic active layer to obtain fine patterns without the use of a separate masking pattern, for example, a photoresist pattern, thereby tending to simplify the fabrication process and reduce the associated costs.

    摘要翻译: 本文的示例性实施方案涉及可用于形成有机活性图案的组合物,其可以结合到有机存储器件中。 组合物包含含N的共轭导电聚合物,光酸产生剂和能够溶解适量的导电聚合物和光致酸产生剂的有机溶剂。 还公开了使用一种或多种组合物形成有机活性层以制造有机活性图案的方法,所述有机活性图案的一部分可以布置在相对的电极之间以提供有机记忆单元。 这些方法包括直接曝光和显影有机活性层以获得精细图案而不使用单独的掩模图案,例如光致抗蚀剂图案,从而趋于简化制造工艺并降低相关成本。

    Method for forming organic layer pattern, organic layer pattern prepared by the same and organic memory devices comprising the pattern
    2.
    发明授权
    Method for forming organic layer pattern, organic layer pattern prepared by the same and organic memory devices comprising the pattern 失效
    用于形成有机层图案的方法,由相同的有机层图案和包含图案的有机存储器件

    公开(公告)号:US07846765B2

    公开(公告)日:2010-12-07

    申请号:US11715956

    申请日:2007-03-09

    IPC分类号: H01L51/40

    摘要: Disclosed are a method for forming an organic layer pattern which is characterized by forming a thin layer by coating a coating solution including a polyimide-based polymer having a heteroaromatic pendant group including a heteroatom in its polyimide major chain, a photoinitiator and a crosslinking agent on a substrate and drying the substrate, and exposing and developing the thin layer, an organic layer pattern prepared by the method, and an organic memory device comprising the pattern. According to example embodiments, a high-resolution micropattern may be formed without undergoing any expensive process, e.g., photoresist, leading to simplification of the preparation process and cost reduction.

    摘要翻译: 公开了形成有机层图案的方法,其特征在于通过在其聚酰亚胺主链中涂布包含具有包含杂原子的杂芳族侧基的聚酰亚胺基聚合物,光引发剂和交联剂的涂布溶液形成薄层, 衬底并干燥衬底,以及曝光和显影薄层,通过该方法制备的有机层图案,以及包括图案的有机存储器件。 根据示例实施例,可以形成高分辨率微图案,而不经历任何昂贵的工艺,例如光致抗蚀剂,导致制备过程的简化和成本降低。

    Photosensitive compositions useful for forming active patterns, methods of forming such active patterns and organic memory devices incorporating such active patterns
    3.
    发明授权
    Photosensitive compositions useful for forming active patterns, methods of forming such active patterns and organic memory devices incorporating such active patterns 有权
    用于形成活性图案的光敏组合物,形成这种活性图案的方法和结合这种活性图案的有机记忆装置

    公开(公告)号:US08580484B2

    公开(公告)日:2013-11-12

    申请号:US13200362

    申请日:2011-09-23

    摘要: Example embodiments herein relate to compositions useful in forming organic active patterns that may, in turn, be incorporated in organic memory devices. The compositions comprise N-containing conjugated electroconductive polymer(s), photoacid generator(s) and organic solvent(s) capable of dissolving suitable quantities of both the electroconductive polymer and the photoacid generator. Also disclosed are methods for patterning organic active layers formed using one or more of the compositions to produce organic active patterns, portions of which may be arranged between opposed electrodes to provide organic memory cells. The methods include directly exposing and developing the organic active layer to obtain fine patterns without the use of a separate masking pattern, for example, a photoresist pattern, thereby tending to simplify the fabrication process and reduce the associated costs.

    摘要翻译: 本文的示例性实施方案涉及可用于形成有机活性图案的组合物,其可以结合到有机存储器件中。 组合物包含含N的共轭导电聚合物,光酸产生剂和能够溶解适量的导电聚合物和光致酸产生剂的有机溶剂。 还公开了使用一种或多种组合物形成有机活性层以制造有机活性图案的方法,所述有机活性图案的一部分可以布置在相对的电极之间以提供有机记忆单元。 这些方法包括直接曝光和显影有机活性层以获得精细图案而不使用单独的掩模图案,例如光致抗蚀剂图案,从而趋于简化制造工艺并降低相关成本。

    Photosensitive compositions useful for forming active patterns, methods of forming such active patterns and organic memory devices incorporating such active patterns
    4.
    发明授权
    Photosensitive compositions useful for forming active patterns, methods of forming such active patterns and organic memory devices incorporating such active patterns 有权
    用于形成活性图案的光敏组合物,形成这种活性图案的方法和结合这种活性图案的有机记忆装置

    公开(公告)号:US08053158B2

    公开(公告)日:2011-11-08

    申请号:US11655171

    申请日:2007-01-19

    IPC分类号: G03F7/004

    摘要: Disclosed herein are compositions useful in forming organic active patterns that may, in turn, be incorporated in organic memory devices. The compositions comprise N-containing conjugated electroconductive polymer(s), photoacid generator(s) and organic solvent(s) capable of dissolving suitable quantifies of both the electroconductive polymer and the photoacid generator. Also disclosed are methods for patterning organic active layers formed using one or more of the compositions to produce organic active patterns, portions of which may be arranged between opposed electrodes to provide organic memory cells. The methods include directly exposing and developing the organic active layer to obtain fine patterns without the use of a separate masking pattern, for example, a photoresist pattern, thereby tending to simplify the fabrication process and reduce the associated costs.

    摘要翻译: 本文公开了可用于形成有机活性图案的组合物,其可以结合到有机存储器件中。 组合物包含含N的共轭导电聚合物,光酸产生剂和能够溶解导电聚合物和光致酸产生剂两者的适当定量的有机溶剂。 还公开了使用一种或多种组合物形成有机活性层以制造有机活性图案的方法,所述有机活性图案的一部分可以布置在相对的电极之间以提供有机记忆单元。 这些方法包括直接曝光和显影有机活性层以获得精细图案而不使用单独的掩模图案,例如光致抗蚀剂图案,从而趋于简化制造工艺并降低相关成本。

    Method for forming organic layer pattern, organic layer pattern prepared by the same and organic memory devices comprising the pattern
    5.
    发明授权
    Method for forming organic layer pattern, organic layer pattern prepared by the same and organic memory devices comprising the pattern 失效
    用于形成有机层图案的方法,由相同的有机层图案和包含图案的有机存储器件

    公开(公告)号:US08288503B2

    公开(公告)日:2012-10-16

    申请号:US12926024

    申请日:2010-10-21

    IPC分类号: C08G69/08

    摘要: Disclosed are a method for forming an organic layer pattern which is characterized by forming a thin layer by coating a coating solution including a polyimide-based polymer having a heteroaromatic pendant group including a heteroatom in its polyimide major chain, a photoinitiator and a crosslinking agent on a substrate and drying the substrate, and exposing and developing the thin layer, an organic layer pattern prepared by the method, and an organic memory device comprising the pattern. According to example embodiments, a high-resolution micropattern may be formed without undergoing any expensive process, e.g., photoresist, leading to simplification of the preparation process and cost reduction.

    摘要翻译: 公开了一种形成有机层图案的方法,其特征在于通过在其聚酰亚胺主链中涂布包含具有包含杂原子的杂芳族侧基的聚酰亚胺基聚合物,光引发剂和交联剂的涂布溶液形成薄层, 衬底并干燥衬底,以及曝光和显影薄层,通过该方法制备的有机层图案,以及包括图案的有机存储器件。 根据示例实施例,可以形成高分辨率微图案,而不经历任何昂贵的工艺,例如光致抗蚀剂,导致制备过程的简化和成本降低。

    Method for forming organic layer pattern, organic layer pattern prepared by the same and organic memory devices comprising the pattern
    6.
    发明申请
    Method for forming organic layer pattern, organic layer pattern prepared by the same and organic memory devices comprising the pattern 失效
    用于形成有机层图案的方法,由相同的有机层图案和包含图案的有机存储器件

    公开(公告)号:US20110040068A1

    公开(公告)日:2011-02-17

    申请号:US12926024

    申请日:2010-10-21

    IPC分类号: C08G73/10

    摘要: Disclosed are a method for forming an organic layer pattern which is characterized by forming a thin layer by coating a coating solution including a polyimide-based polymer having a heteroaromatic pendant group including a heteroatom in its polyimide major chain, a photoinitiator and a crosslinking agent on a substrate and drying the substrate, and exposing and developing the thin layer, an organic layer pattern prepared by the method, and an organic memory device comprising the pattern. According to example embodiments, a high-resolution micropattern may be formed without undergoing any expensive process, e.g., photoresist, leading to simplification of the preparation process and cost reduction.

    摘要翻译: 公开了一种形成有机层图案的方法,其特征在于通过在其聚酰亚胺主链中涂布包含具有包含杂原子的杂芳族侧基的聚酰亚胺基聚合物,光引发剂和交联剂的涂布溶液形成薄层, 衬底并干燥衬底,以及曝光和显影薄层,通过该方法制备的有机层图案,以及包括图案的有机存储器件。 根据示例实施例,可以形成高分辨率微图案,而不经历任何昂贵的工艺,例如光致抗蚀剂,导致制备过程的简化和成本降低。

    Method for forming organic layer pattern, organic layer pattern prepared by the same and organic memory devices comprising the pattern
    7.
    发明申请
    Method for forming organic layer pattern, organic layer pattern prepared by the same and organic memory devices comprising the pattern 失效
    用于形成有机层图案的方法,由相同的有机层图案和包含图案的有机存储器件

    公开(公告)号:US20080094872A1

    公开(公告)日:2008-04-24

    申请号:US11715956

    申请日:2007-03-09

    IPC分类号: G11C11/00 B05D7/00 C08F2/46

    摘要: Disclosed are a method for forming an organic layer pattern which is characterized by forming a thin layer by coating a coating solution including a polyimide-based polymer having a heteroaromatic pendant group including a heteroatom in its polyimide major chain, a photoinitiator and a crosslinking agent on a substrate and drying the substrate, and exposing and developing the thin layer, an organic layer pattern prepared by the method, and an organic memory device comprising the pattern. According to example embodiments, a high-resolution micropattern may be formed without undergoing any expensive process, e.g., photoresist, leading to simplification of the preparation process and cost reduction.

    摘要翻译: 公开了一种形成有机层图案的方法,其特征在于通过在其聚酰亚胺主链中涂布包含具有包含杂原子的杂芳族侧基的聚酰亚胺基聚合物,光引发剂和交联剂的涂布溶液形成薄层, 衬底并干燥衬底,以及曝光和显影薄层,通过该方法制备的有机层图案,以及包括图案的有机存储器件。 根据示例实施例,可以形成高分辨率微图案,而不经历任何昂贵的工艺,例如光致抗蚀剂,导致制备过程的简化和成本降低。

    Photosensitive polyimide composition, polyimide film and semiconductor device using the same
    9.
    发明授权
    Photosensitive polyimide composition, polyimide film and semiconductor device using the same 失效
    光敏聚酰亚胺组合物,聚酰亚胺膜和使用其的半导体器件

    公开(公告)号:US07745096B2

    公开(公告)日:2010-06-29

    申请号:US11861948

    申请日:2007-09-26

    IPC分类号: G03F7/004 G03F7/30

    摘要: A photosensitive polyimide composition, a polyimide film, and a semiconductor device using the same are disclosed. The photosensitive polyimide composition can be cured by heating. A polyhydroxyimide is used as a base resin and can be mixed with a photoacid generator and a cross-linking agent having two or more vinylether groups. A film of the photosensitive polyimide composition can be developed by treatment with an alkaline aqueous solution. Embodiments of the invention enable improvement in production yield and reliability in a highly-integrated memory semiconductor packaging processes.

    摘要翻译: 公开了光敏聚酰亚胺组合物,聚酰亚胺膜和使用其的半导体器件。 感光性聚酰亚胺组合物可以通过加热固化。 使用聚羟基酰亚胺作为基础树脂,并且可以与光酸产生剂和具有两个或更多个乙烯基醚基团的交联剂混合。 感光性聚酰亚胺组合物的膜可以通过用碱性水溶液处理而显影。 本发明的实施例能够在高度集成的存储器半导体封装工艺中提高生产成品率和可靠性。