Plasma etching method using polymer deposition and method of forming contact hole using the plasma etching method
    2.
    发明授权
    Plasma etching method using polymer deposition and method of forming contact hole using the plasma etching method 有权
    使用聚合物沉积的等离子体蚀刻方法和使用等离子体蚀刻方法形成接触孔的方法

    公开(公告)号:US06617253B1

    公开(公告)日:2003-09-09

    申请号:US09620022

    申请日:2000-07-20

    IPC分类号: H01L21302

    摘要: A plasma etching method using selective polymer deposition, and a method of forming a contact hole using the plasma etching method are provided. The plasma etching method uses a method of reinforcing an etch mask by selectively depositing polymer on only a photoresist pattern, which is an etch mask. That is, a dielectric film is plasma etched for a predetermined period of time using the photoresist pattern as an etch mask, and polymer is selectively deposited on only the photoresist pattern which is thinned by plasma etching, thereby forming a polymer layer. Following this, the dielectric film is plasma etched using the photoresist pattern and the polymer layer as a mask. Thus, dielectric film etching providing high resolution and an excellent profile can be performed using the thinned photoresist pattern as a mask, and a contact hole and a self-aligned contact hole each having a very high aspect ratio, and a self-aligned contact hole having an excellent profile, can be formed.

    摘要翻译: 提供了使用选择性聚合物沉积的等离子体蚀刻方法,以及使用等离子体蚀刻方法形成接触孔的方法。 等离子体蚀刻方法使用通过仅在作为蚀刻掩模的光致抗蚀剂图案上选择性地沉积聚合物来增强蚀刻掩模的方法。 也就是说,使用光致抗蚀剂图案作为蚀刻掩模,将电介质膜等离子体蚀刻预定的时间段,并且仅通过等离子体蚀刻而减薄的光致抗蚀剂图案上选择性地沉积聚合物,从而形成聚合物层。 接下来,使用光致抗蚀剂图案和聚合物层作为掩模来等离子体蚀刻电介质膜。 因此,可以使用减薄的光致抗蚀剂图案作为掩模,以及具有非常高的纵横比的接触孔和自对准接触孔以及自对准的接触孔来实现提供高分辨率和优异的轮廓的电介质膜蚀刻 具有优异的外形,可以形成。

    Organic light emitting diode display and method of manufacturing the same
    3.
    发明授权
    Organic light emitting diode display and method of manufacturing the same 有权
    有机发光二极管显示器及其制造方法

    公开(公告)号:US09203052B2

    公开(公告)日:2015-12-01

    申请号:US12946771

    申请日:2010-11-15

    IPC分类号: H01L51/52

    摘要: An organic light emitting diode (OLED) device is disclosed. In one embodiment, the OLED device includes: i) a substrate and ii) a first thin film formed on the substrate, wherein the first thin film comprises first and second surfaces opposing each other, wherein the first surface contacts the substrate, and wherein a plurality of protrusions and depressions are alternately formed on the second surface of the first thin film. The OLED device may further include a second thin film formed on the protrusions and depressions of the first thin film, a first electrode formed on the second thin film, a light emitting member formed on the first electrode and a second electrode formed on the organic light emitting member.

    摘要翻译: 公开了一种有机发光二极管(OLED)装置。 在一个实施例中,OLED器件包括:i)衬底和ii)形成在衬底上的第一薄膜,其中第一薄膜包括彼此相对的第一和第二表面,其中第一表面接触衬底,并且其中 在第一薄膜的第二表面交替地形成多个突起和凹陷。 OLED器件还可以包括形成在第一薄膜的突起和凹陷上的第二薄膜,形成在第二薄膜上的第一电极,形成在第一电极上的发光部件和形成在有机光上的第二电极 发射构件。

    Method of manufacturing a light-emitting element and method of manufacturing a display substrate using the same
    5.
    发明授权

    公开(公告)号:US08211491B2

    公开(公告)日:2012-07-03

    申请号:US12357327

    申请日:2009-01-21

    IPC分类号: B05D7/22

    摘要: In accordance with one or more embodiments of the present disclosure, a method of manufacturing a light-emitting element includes forming an anode on a substrate, forming a first transport layer including one or more first polar compounds on the anode, forming a first non-polar solvent layer on the first transport layer, forming a first polar solution layer including one or more light-emitting compounds on the first non-polar solution layer, drying a polar solvent of the first polar solution layer and the first non-polar solvent layer so that a light-emitting layer including the one or more light-emitting compounds is formed on the first transport layer and forming a cathode on the light-emitting layer. The cathode is disposed opposite to the anode. As such, damage to the first transport layer may be reduced when forming the light-emitting layer, which may improve the reliability and productivity of a manufacturing process.

    摘要翻译: 根据本公开的一个或多个实施例,制造发光元件的方法包括在衬底上形成阳极,在阳极上形成包括一个或多个第一极性化合物的第一传输层, 在第一传输层上形成极性溶剂层,在第一非极性溶液层上形成包含一种或多种发光化合物的第一极性溶液层,干燥第一极性溶液层和第一非极性溶剂层的极性溶剂 使得在第一传输层上形成包含一种或多种发光化合物的发光层,并在发光层上形成阴极。 阴极与阳极相对设置。 因此,当形成发光层时,可能减少对第一传输层的损伤,这可以提高制造工艺的可靠性和生产率。

    Organic light emitting diode display
    6.
    发明授权
    Organic light emitting diode display 有权
    有机发光二极管显示

    公开(公告)号:US07851992B2

    公开(公告)日:2010-12-14

    申请号:US12112561

    申请日:2008-04-30

    IPC分类号: H05B33/26

    摘要: An organic light emitting diode (“OLED”) display includes first to third pixels each displaying a different color, wherein each pixel includes a first electrode, a second electrode facing the first electrode, and an emission layer positioned between the first and second electrodes, wherein first electrodes of first and second pixels are a single layer including a conductive oxide, respectively. A first electrode of the third pixel includes a lower first electrode including a conductive oxide, an intermediate first electrode formed on the lower first electrode and including a semitransparent conductor which forms microcavities with the second electrode, and an upper first electrode formed on the intermediate first electrode and including a conductive oxide. A method for manufacturing the OLED is also disclosed.

    摘要翻译: 有机发光二极管(“OLED”)显示器包括每个显示不同颜色的第一至第三像素,其中每个像素包括第一电极,面对第一电极的第二电极和位于第一和第二电极之间的发射层, 其中第一和第二像素的第一电极分别是包括导电氧化物的单层。 第三像素的第一电极包括包括导电氧化物的下第一电极,形成在下第一电极上并包括与第二电极形成微腔的半透明导体的中间第一电极和形成在中间第一电极上的上第一电极 电极并且包括导电氧化物。 还公开了一种用于制造OLED的方法。

    METHOD OF MANUFACTURING A LIGHT-EMITTING ELEMENT AND METHOD OF MANUFACTURING A DISPLAY SUBSTRATE USING THE SAME
    7.
    发明申请
    METHOD OF MANUFACTURING A LIGHT-EMITTING ELEMENT AND METHOD OF MANUFACTURING A DISPLAY SUBSTRATE USING THE SAME 有权
    发光元件的制造方法及使用其制造显示基板的方法

    公开(公告)号:US20090221209A1

    公开(公告)日:2009-09-03

    申请号:US12357327

    申请日:2009-01-21

    IPC分类号: H01J9/00

    摘要: In accordance with one or more embodiments of the present disclosure, a method of manufacturing a light-emitting element includes forming an anode on a substrate, forming a first transport layer including one or more first polar compounds on the anode, forming a first non-polar solvent layer on the first transport layer, forming a first polar solution layer including one or more light-emitting compounds on the first non-polar solution layer, drying a polar solvent of the first polar solution layer and the first non-polar solvent layer so that a light-emitting layer including the one or more light-emitting compounds is formed on the first transport layer and forming a cathode on the light-emitting layer. The cathode is disposed opposite to the anode. As such, damage to the first transport layer may be reduced when forming the light-emitting layer, which may improve the reliability and productivity of a manufacturing process.

    摘要翻译: 根据本公开的一个或多个实施例,制造发光元件的方法包括在衬底上形成阳极,在阳极上形成包括一个或多个第一极性化合物的第一传输层, 在第一传输层上形成极性溶剂层,在第一非极性溶液层上形成包含一种或多种发光化合物的第一极性溶液层,干燥第一极性溶液层和第一非极性溶剂层的极性溶剂 使得在第一传输层上形成包含一种或多种发光化合物的发光层,并在发光层上形成阴极。 阴极与阳极相对设置。 因此,当形成发光层时,可能减少对第一传输层的损伤,这可以提高制造工艺的可靠性和生产率。

    Organic light emitting diode display including color filters and disparity barrier pattern
    8.
    发明授权
    Organic light emitting diode display including color filters and disparity barrier pattern 有权
    有机发光二极管显示器包括滤色器和视差屏障图案

    公开(公告)号:US08502444B2

    公开(公告)日:2013-08-06

    申请号:US13137910

    申请日:2011-09-21

    IPC分类号: H05B33/12

    摘要: An organic light emitting diode (OLED) display includes a first substrate, a plurality of organic light emitting elements on the first substrate, and a second substrate facing the first substrate and spaced apart from the first substrate. The plurality of organic light emitting elements is interposed between the first substrate and the second substrate. The OLED display includes a plurality of color filters in at least one of an area between the second substrate and the organic light emitting elements, and an area between the first substrate and the organic light emitting elements. The OLED also includes a disparity barrier pattern on at least one of a surface of the second substrate that opposes one surface of the second substrate facing the first substrate, and a surface of the first substrate that opposes one surface of the first substrate facing the second substrate.

    摘要翻译: 有机发光二极管(OLED)显示器包括第一衬底,在第一衬底上的多个有机发光元件,以及面对第一衬底并与第一衬底间隔开的第二衬底。 多个有机发光元件插入在第一基板和第二基板之间。 OLED显示器在第二基板和有机发光元件之间的区域中的至少一个以及第一基板和有机发光元件之间的区域中包括多个滤色器。 OLED还包括与第二基板的面对第一基板的一个表面相对的第二基板的表面中的至少一个上的视差屏障图案,以及与第一基板的面向第二基板的一个表面相对的第一基板的表面 基质。

    ORGANIC LIGHT-EMITTING DIODE INCLUDING MULTI-LAYERED HOLE TRANSPORTING LAYER, AND FLAT DISPLAY DEVICE INCLUDING THE ORGANIC LIGHT-EMITTING DIODE
    9.
    发明申请
    ORGANIC LIGHT-EMITTING DIODE INCLUDING MULTI-LAYERED HOLE TRANSPORTING LAYER, AND FLAT DISPLAY DEVICE INCLUDING THE ORGANIC LIGHT-EMITTING DIODE 有权
    有机发光二极体,包括多层孔输送层,平面显示装置,包括有机发光二极管

    公开(公告)号:US20130153865A1

    公开(公告)日:2013-06-20

    申请号:US13467960

    申请日:2012-05-09

    IPC分类号: H01L51/54

    摘要: An organic light-emitting diode includes a first electrode; a second electrode facing the first electrode; an emission layer (EML) between the first electrode and the second electrode; a first charge generation layer between the EML and the first electrode and including a first compound and a first charge generation material; a first layer between the EML and the first charge generation layer and including a second compound; a second charge generation layer between the EML and the first layer and including a third compound and a second charge generation material; a second layer between the EML and the second charge generation layer and including a fourth compound; and a buffer layer between the EML and the second layer. The first and third compounds each independently includes a compound represented by Formula 1, and the second and fourth compounds each independently includes a compound represented by Formula 2.

    摘要翻译: 有机发光二极管包括第一电极; 面对所述第一电极的第二电极; 在所述第一电极和所述第二电极之间的发射层(EML); 所述EML和所述第一电极之间的第一电荷产生层,包括第一化合物和第一电荷产生材料; EML和第一电荷产生层之间的第一层,并且包括第二化合物; EML和第一层之间的第二电荷产生层,并且包括第三化合物和第二电荷产生材料; EML和第二电荷产生层之间的第二层,并包括第四化合物; 以及EML和第二层之间的缓冲层。 第一和第三化合物各自独立地包括由式1表示的化合物,第二和第四化合物各自独立地包括由式2表示的化合物。