摘要:
A method of removing metal-containing polymeric material and ion implanted or plasma damaged photoresist from a surface using a plasma jet system, by generating radicals having high energy and high density from atmospheric plasma by introducing a reactant gas to the plasma, and placing the surface at a distance from the plasma, whereby ionic reaction on the surface is minimized while the removing action of the radicals on the surface is maintained.
摘要:
A plasma etching method using selective polymer deposition, and a method of forming a contact hole using the plasma etching method are provided. The plasma etching method uses a method of reinforcing an etch mask by selectively depositing polymer on only a photoresist pattern, which is an etch mask. That is, a dielectric film is plasma etched for a predetermined period of time using the photoresist pattern as an etch mask, and polymer is selectively deposited on only the photoresist pattern which is thinned by plasma etching, thereby forming a polymer layer. Following this, the dielectric film is plasma etched using the photoresist pattern and the polymer layer as a mask. Thus, dielectric film etching providing high resolution and an excellent profile can be performed using the thinned photoresist pattern as a mask, and a contact hole and a self-aligned contact hole each having a very high aspect ratio, and a self-aligned contact hole having an excellent profile, can be formed.
摘要:
An organic light emitting diode (OLED) device is disclosed. In one embodiment, the OLED device includes: i) a substrate and ii) a first thin film formed on the substrate, wherein the first thin film comprises first and second surfaces opposing each other, wherein the first surface contacts the substrate, and wherein a plurality of protrusions and depressions are alternately formed on the second surface of the first thin film. The OLED device may further include a second thin film formed on the protrusions and depressions of the first thin film, a first electrode formed on the second thin film, a light emitting member formed on the first electrode and a second electrode formed on the organic light emitting member.
摘要:
In accordance with one or more embodiments of the present disclosure, a method of manufacturing a light-emitting element includes forming an anode on a substrate, forming a first transport layer including one or more first polar compounds on the anode, forming a first non-polar solvent layer on the first transport layer, forming a first polar solution layer including one or more light-emitting compounds on the first non-polar solution layer, drying a polar solvent of the first polar solution layer and the first non-polar solvent layer so that a light-emitting layer including the one or more light-emitting compounds is formed on the first transport layer and forming a cathode on the light-emitting layer. The cathode is disposed opposite to the anode. As such, damage to the first transport layer may be reduced when forming the light-emitting layer, which may improve the reliability and productivity of a manufacturing process.
摘要:
An organic light emitting diode (“OLED”) display includes first to third pixels each displaying a different color, wherein each pixel includes a first electrode, a second electrode facing the first electrode, and an emission layer positioned between the first and second electrodes, wherein first electrodes of first and second pixels are a single layer including a conductive oxide, respectively. A first electrode of the third pixel includes a lower first electrode including a conductive oxide, an intermediate first electrode formed on the lower first electrode and including a semitransparent conductor which forms microcavities with the second electrode, and an upper first electrode formed on the intermediate first electrode and including a conductive oxide. A method for manufacturing the OLED is also disclosed.
摘要:
In accordance with one or more embodiments of the present disclosure, a method of manufacturing a light-emitting element includes forming an anode on a substrate, forming a first transport layer including one or more first polar compounds on the anode, forming a first non-polar solvent layer on the first transport layer, forming a first polar solution layer including one or more light-emitting compounds on the first non-polar solution layer, drying a polar solvent of the first polar solution layer and the first non-polar solvent layer so that a light-emitting layer including the one or more light-emitting compounds is formed on the first transport layer and forming a cathode on the light-emitting layer. The cathode is disposed opposite to the anode. As such, damage to the first transport layer may be reduced when forming the light-emitting layer, which may improve the reliability and productivity of a manufacturing process.
摘要:
An organic light emitting diode (OLED) display includes a first substrate, a plurality of organic light emitting elements on the first substrate, and a second substrate facing the first substrate and spaced apart from the first substrate. The plurality of organic light emitting elements is interposed between the first substrate and the second substrate. The OLED display includes a plurality of color filters in at least one of an area between the second substrate and the organic light emitting elements, and an area between the first substrate and the organic light emitting elements. The OLED also includes a disparity barrier pattern on at least one of a surface of the second substrate that opposes one surface of the second substrate facing the first substrate, and a surface of the first substrate that opposes one surface of the first substrate facing the second substrate.
摘要:
An organic light-emitting diode includes a first electrode; a second electrode facing the first electrode; an emission layer (EML) between the first electrode and the second electrode; a first charge generation layer between the EML and the first electrode and including a first compound and a first charge generation material; a first layer between the EML and the first charge generation layer and including a second compound; a second charge generation layer between the EML and the first layer and including a third compound and a second charge generation material; a second layer between the EML and the second charge generation layer and including a fourth compound; and a buffer layer between the EML and the second layer. The first and third compounds each independently includes a compound represented by Formula 1, and the second and fourth compounds each independently includes a compound represented by Formula 2.
摘要:
An organic light emitting device having increased outcoupling efficiency, a lighting apparatus including the organic light emitting device, and an organic light emitting display apparatus including the organic light emitting device. The organic light emitting device includes a substrate, a first electrode layer that is uniformly patterned on the substrate, a low refractive conductive layer disposed on the first electrode layer, and having a conductive material with a lower refractive index than a refractive index of an organic layer that is disposed on the low refractive conductive layer, and a second electrode layer formed on the organic layer.