公开(公告)号：US06686259B2

公开(公告)日：2004-02-03

申请号：US09994507

申请日：2001-11-27

申请人： Sang-sik Park ,  Mikio Takagi ,  Jae-heon Choi ,  Sang-il Jung ,  Jun-taek Lee

发明人： Sang-sik Park ,  Mikio Takagi ,  Jae-heon Choi ,  Sang-il Jung ,  Jun-taek Lee

IPC分类号： H01L21322

CPC分类号： H01L21/3221 ,  H01L27/14601 ,  H01L27/14665

摘要： In a method for manufacturing a solid state image pick up device capable of improving gettering efficiency a semiconductor substrate having a front side on which a solid state image pick-up device may be formed, and a rear side opposite to the front side is provided. Subsequently, a polysilicon layer including impurities for gettering having a predetermined concentration is formed on the rear side of the semiconductor substrate. Next, a predetermined thickness of the polysilicon layer including the impurities for gettering is oxidized, and the impurities for gettering are condensed into the reduced polysilicon layer.

摘要翻译： 在制造能够提高吸气效率的固体摄像装置的方法中，提供了可以形成固体摄像装置的正面的半导体衬底和与正面相反的后侧。 随后，在半导体衬底的后侧形成包含具有预定浓度的吸杂杂质的多晶硅层。 接下来，包含用于吸杂的杂质的多晶硅层的预定厚度被氧化，并且用于吸杂的杂质被冷凝成还原的多晶硅层。

公开(公告)号：US08587700B2

公开(公告)日：2013-11-19

申请号：US12589157

申请日：2009-10-19

申请人： Jun-taek Lee ,  Byung-hyun Yim ,  Kwang-hee Lee ,  Ji-hoon Jung

发明人： Jun-taek Lee ,  Byung-hyun Yim ,  Kwang-hee Lee ,  Ji-hoon Jung

IPC分类号： H04N9/64 ,  H04N5/335

CPC分类号： H04N17/002

摘要： A method of detecting defects in an image sensor that may occur from a floating diffusion area of the image sensor, a tester using the method, and a control signal generator using the method include a photo diode generating charges corresponding to an image signal; a transmission transistor having a first terminal connected to a the photodiode and a second terminal connected to a floating diffusion area, thereby transmitting the charges generated in the photo diode to the floating diffusion area in response to a charge transmission control signal; and a reset transistor having a first terminal applied by a reset voltage and a second transistor connected to the floating diffusion area, thereby transmitting the reset voltage to the floating diffusion area in response to a reset control signal. The reset transistor is turned on during at least one sampling zone selected between reset level sampling and signal level sampling that are performed with respect to the image sensor.

摘要翻译： 一种检测图像传感器中的可能从图像传感器的浮动扩散区域发生的缺陷的方法，使用该方法的测试仪和使用该方法的控制信号发生器的方法包括：光电二极管产生与图像信号相对应的电荷; 传输晶体管，其具有连接到光电二极管的第一端子和连接到浮动扩散区域的第二端子，从而响应于电荷传输控制信号将在光电二极管中产生的电荷传输到浮动扩散区域; 以及复位晶体管，其具有通过复位电压施加的第一端子和连接到浮动扩散区域的第二晶体管，从而响应于复位控制信号将复位电压传输到浮动扩散区域。 复位晶体管在相对于图像传感器执行的复位电平采样和信号电平采样之间所选择的至少一个采样区域中导通。

公开(公告)号：US20080105908A1

公开(公告)日：2008-05-08

申请号：US11982925

申请日：2007-11-06

申请人： Jun-taek Lee

发明人： Jun-taek Lee

IPC分类号： H01L31/0232 ,  H01L31/18

CPC分类号： H01L27/14623 ,  H01L27/14609 ,  H01L27/14632 ,  H01L27/14687

摘要： An image sensor and a method of forming the same includes a semiconductor substrate including a light receiving area and an optical black area defined by a boundary between them; photodiodes in at least one of the light receiving area and the optical black area of the semiconductor substrate; an interlayer dielectric provided on the semiconductor substrate; an upper light shielding pattern on the interlayer dielectric to cover the optical black area; and a light shielding pattern provided in the interlayer dielectric proximal to the boundary between the optical black area and the light receiving area.

摘要翻译： 图像传感器及其形成方法包括：半导体衬底，包括受光区域和由它们之间的边界限定的光学黑色区域; 在半导体衬底的光接收区域和光学黑色区域中的至少一个中的光电二极管; 设置在半导体衬底上的层间电介质; 覆盖光学黑色区域的层间电介质上的上部遮光图案; 以及设置在靠近光学黑色区域和光接收区域之间的边界的层间电介质中的遮光图案。

公开(公告)号：US20050285166A1

公开(公告)日：2005-12-29

申请号：US11090065

申请日：2005-03-28

申请人： Jun-taek Lee ,  Byung-hyun Yim ,  Seok-ha Lee ,  Sun-yong Park

发明人： Jun-taek Lee ,  Byung-hyun Yim ,  Seok-ha Lee ,  Sun-yong Park

IPC分类号： H01L27/146 ,  H01L31/062 ,  H01L31/18

CPC分类号： H01L31/18 ,  H01L27/14601

摘要： Monitoring patterns for an imaging device and a method of monitoring processing using the monitoring patterns are disclosed. Processing errors in the imaging device are detected and estimated by measuring resistances between main impurity regions and associated sub impurity regions in the monitoring patterns. Monitoring patterns corresponding to mis-aligned regions in the imaging device have varying resistances between the main impurity region and the associated sub impurity regions.

摘要翻译： 公开了一种用于成像设备的监视模式和使用监视模式来监视处理的方法。 通过在监测模式中测量主要杂质区域和相关联的子杂质区域之间的电阻来检测和估计成像装置中的处理误差。 对应于成像装置中的不对准区域的监测图案在主要杂质区域和相关联的子杂质区域之间具有变化的电阻。

公开(公告)号：US20100097477A1

公开(公告)日：2010-04-22

申请号：US12589157

申请日：2009-10-19

申请人： Jun-taek Lee ,  Byung-hyun Yim ,  Kwang-hee Lee ,  Ji-hoon Jung

发明人： Jun-taek Lee ,  Byung-hyun Yim ,  Kwang-hee Lee ,  Ji-hoon Jung

IPC分类号： H04N17/00 ,  H04N9/64

CPC分类号： H04N17/002

摘要： A method of detecting defects in an image sensor that may occur from a floating diffusion area of the image sensor, a tester using the method, and a control signal generator using the method include a photo diode generating charges corresponding to an image signal; a transmission transistor having a first terminal connected to a the photodiode and a second terminal connected to a floating diffusion area, thereby transmitting the charges generated in the photo diode to the floating diffusion area in response to a charge transmission control signal; and a reset transistor having a first terminal applied by a reset voltage and a second transistor connected to the floating diffusion area, thereby transmitting the reset voltage to the floating diffusion area in response to a reset control signal. The reset transistor is turned on during at least one sampling zone selected between reset level sampling and signal level sampling that are performed with respect to the image sensor.

摘要翻译： 一种检测图像传感器中的可能从图像传感器的浮动扩散区域发生的缺陷的方法，使用该方法的测试仪和使用该方法的控制信号发生器的方法包括：产生与图像信号相对应的电荷的光电二极管; 传输晶体管，其具有连接到光电二极管的第一端子和连接到浮动扩散区域的第二端子，从而响应于电荷传输控制信号将在光电二极管中产生的电荷传输到浮动扩散区域; 以及复位晶体管，其具有通过复位电压施加的第一端子和连接到浮动扩散区域的第二晶体管，从而响应于复位控制信号将复位电压传输到浮动扩散区域。 复位晶体管在相对于图像传感器执行的复位电平采样和信号电平采样之间所选择的至少一个采样区域中导通。