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    Downward type MEMS switch and method for fabricating the same
    1.
    发明申请
    Downward type MEMS switch and method for fabricating the same 有权
    向下型MEMS开关及其制造方法

    公开(公告)号：US20070195464A1

    公开(公告)日：2007-08-23

    申请号：US11581435

    申请日：2006-10-17

    申请人： Sang-wook Kwon ,  Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Dong-kyun Kim ,  Jung-han Choi ,  Young-tack Houng ,  Che-heung Kim

    发明人： Sang-wook Kwon ,  Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Dong-kyun Kim ,  Jung-han Choi ,  Young-tack Houng ,  Che-heung Kim

    IPC分类号： G11B5/48

    CPC分类号： H01H1/0036 ,  H01H2057/006 ,  H01P1/127

    摘要： A downward type micro electro mechanical system (EMS) switch and a method of fabricating the same is provided. The downward type MEMS switch includes first and second cavities formed in a substrate, first and second actuators formed on upper portions of the first and second cavities, first and second fixing lines formed on an upper surface of the substrate and not overlapped with the first and second cavities, and a contact pad which is spaced apart at a predetermined distance from surfaces of the first fixing line and the second fixing line but which can be contacted with the first fixing line and the second fixing line when the first actuator and the second actuator are driven. The contact pad, which is actuated downward by piezoelectricity, is fabricated as it shares a layer with a RF signal line, after the RF signal line is fabricated.

    摘要翻译： 提供了向下型的微机电系统（EMS）开关及其制造方法。 向下型MEMS开关包括形成在基板中的第一和第二空腔，形成在第一和第二空腔的上部的第一和第二致动器，形成在基板的上表面上的第一和第二固定线， 第二空腔和接触垫，其间距第一固定线和第二固定线的表面隔开预定距离，但是当第一致动器和第二致动器能够与第一固定线和第二固定线接触时 被驱动。 在RF信号线被制造之后，通过压电性向下致动的接触垫被制造成与RF信号线共享一层。

    Downward type MEMS switch and method for fabricating the same
    2.
    发明授权
    Downward type MEMS switch and method for fabricating the same 有权
    向下型MEMS开关及其制造方法

    公开(公告)号：US08018308B2

    公开(公告)日：2011-09-13

    申请号：US11581435

    申请日：2006-10-17

    申请人： Sang-wook Kwon ,  Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Dong-kyun Kim ,  Jung-han Choi ,  Young-tack Houng ,  Che-heung Kim

    发明人： Sang-wook Kwon ,  Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Dong-kyun Kim ,  Jung-han Choi ,  Young-tack Houng ,  Che-heung Kim

    IPC分类号： H01H51/22

    CPC分类号： H01H1/0036 ,  H01H2057/006 ,  H01P1/127

    摘要： A downward type micro electro mechanical system (EMS) switch and a method of fabricating the same is provided. The downward type MEMS switch includes first and second cavities formed in a substrate, first and second actuators formed on upper portions of the first and second cavities, first and second fixing lines formed on an upper surface of the substrate and not overlapped with the first and second cavities, and a contact pad which is spaced apart at a predetermined distance from surfaces of the first fixing line and the second fixing line but which can be contacted with the first fixing line and the second fixing line when the first actuator and the second actuator are driven. The contact pad, which is actuated downward by piezoelectricity, is fabricated as it shares a layer with a RF signal line, after the RF signal line is fabricated.

    摘要翻译： 提供了向下型的微机电系统（EMS）开关及其制造方法。 向下型MEMS开关包括形成在基板中的第一和第二空腔，形成在第一和第二空腔的上部的第一和第二致动器，形成在基板的上表面上的第一和第二固定线， 第二空腔和接触垫，其间距第一固定线和第二固定线的表面隔开预定距离，但是当第一致动器和第二致动器能够与第一固定线和第二固定线接触时 被驱动。 在RF信号线被制造之后，通过压电性向下致动的接触垫被制造成与RF信号线共享一层。

    Piezoelectric RF MEMS device and method of fabricating the same
    5.
    发明授权
    Piezoelectric RF MEMS device and method of fabricating the same 失效
    压电RF MEMS器件及其制造方法

    公开(公告)号：US07545081B2

    公开(公告)日：2009-06-09

    申请号：US11594813

    申请日：2006-11-09

    申请人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Houng ,  Che-heung Kim

    发明人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Houng ,  Che-heung Kim

    IPC分类号： H01L41/08

    CPC分类号： H01H57/00 ,  H01L41/094 ,  H01L41/314 ,  H01L41/33

    摘要： A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward. A method of fabricating a piezoelectric RF MEMS device includes providing an upper substrate including an RF output signal line, providing a lower substrate including a piezoelectric actuator having an RF input signal line corresponding to the RF output signal line, and assembling the upper substrate and the lower substrate.

    摘要翻译： 提供了一种压电RF微机电系统（MEMS）器件及其制造方法，其中基于压电效应，RF MEMS器件以低电压向上驱动。 压电RF MEMS器件包括：设置有RF输出信号线的上基板，位于RF输出信号线下方的压电致动器;以及设置有空腔的下基板，使得压电致动器的一端固定到下基板 并且其另一端与上基板和下基板可移动地间隔开，其中压电致动器在其上设置有RF输入信号线，并且提供接触焊盘以将RF输出信号线与RF输入信号线连接， 压电致动器被向上驱动。 制造压电RF MEMS器件的方法包括提供包括RF输出信号线的上基板，提供包括具有对应于RF输出信号线的RF输入信号线的压电致动器的下基板，以及组装上基板和 下基板。

    Piezoelectric RF MEMS device and method of fabricating the same
    6.
    发明申请
    Piezoelectric RF MEMS device and method of fabricating the same 失效
    压电RF MEMS器件及其制造方法

    公开(公告)号：US20070120445A1

    公开(公告)日：2007-05-31

    申请号：US11594813

    申请日：2006-11-09

    申请人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Houng ,  Che-heung Kim

    发明人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Houng ,  Che-heung Kim

    IPC分类号： H01L41/053

    CPC分类号： H01H57/00 ,  H01L41/094 ,  H01L41/314 ,  H01L41/33

    摘要： A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward. A method of fabricating a piezoelectric RF MEMS device includes providing an upper substrate including an RF output signal line, providing a lower substrate including a piezoelectric actuator having an RF input signal line corresponding to the RF output signal line, and assembling the upper substrate and the lower substrate.

    摘要翻译： 提供了一种压电RF微机电系统（MEMS）器件及其制造方法，其中基于压电效应，RF MEMS器件以低电压向上驱动。 压电RF MEMS器件包括：设置有RF输出信号线的上基板，位于RF输出信号线下方的压电致动器;以及设置有空腔的下基板，使得压电致动器的一端固定到下基板 并且其另一端与上基板和下基板可移动地间隔开，其中压电致动器在其上设置有RF输入信号线，并且提供接触焊盘以将RF输出信号线与RF输入信号线连接， 压电致动器被向上驱动。 制造压电RF MEMS器件的方法包括提供包括RF输出信号线的上基板，提供包括具有对应于RF输出信号线的RF输入信号线的压电致动器的下基板，以及组装上基板和 下基板。

    Pneumatic MEMS switch and method of fabricating the same
    7.
    发明授权
    Pneumatic MEMS switch and method of fabricating the same 有权
    气动MEMS开关及其制造方法

    公开(公告)号：US07759591B2

    公开(公告)日：2010-07-20

    申请号：US11513036

    申请日：2006-08-31

    申请人： Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Dong-kyun Kim ,  Young-tack Hong ,  Jong-seok Kim ,  Chang-seung Lee

    发明人： Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Dong-kyun Kim ,  Young-tack Hong ,  Jong-seok Kim ,  Chang-seung Lee

    IPC分类号： H01H57/00

    CPC分类号： H01H59/0009 ,  H01H35/346 ,  H01H2221/02

    摘要： A pneumatic micro electro mechanical system switch includes a substrate, a pneumatic actuating unit disposed on the substrate; the pneumatic actuating unit having a plurality of variable air cavities communicating such that when one of the plurality of variable air cavities is compressed, the rest are expanded; a signal line having a plurality of switching lines, each of which passes through a corresponding one of the plurality of variable air cavities and has switching ends disposed in a spaced-apart relation with each other in the corresponding one of the plurality of variable air cavities; a movable switching unit to connect the first and the second switching ends of each of the plurality of switching lines if one of the plurality of variable air cavities is compressed; and a driving unit to drive the pneumatic actuating unit so as to selectively compress the plurality of variable air cavities.

    摘要翻译： 气动微机电系统开关包括基板，设置在基板上的气动执行单元; 所述气动致动单元具有多个可变空气腔，所述多个可变空气腔连通，使得当所述多个可变空气腔中的一个被压缩时，其余部分被膨胀; 信号线具有多个切换线，每个切换线通过多个可变空气腔中的相应一个，并且具有相互间隔开的多个可变空气腔中相应的一个中的彼此间隔开的切换端 ; 如果多个可变空气腔中的一个被压缩，则可移动切换单元连接多个切换线中的每一个的第一和第二切换端; 以及驱动单元以驱动气动致动单元，以选择性地压缩多个可变空气腔。

    Pneumatic MEMS switch and method of fabricating the same
    8.
    发明申请
    Pneumatic MEMS switch and method of fabricating the same 有权
    气动MEMS开关及其制造方法

    公开(公告)号：US20070140614A1

    公开(公告)日：2007-06-21

    申请号：US11513036

    申请日：2006-08-31

    申请人： Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Dong-Kyun Kim ,  Young-tack Hong ,  Jong-seok Kim

    发明人： Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Dong-Kyun Kim ,  Young-tack Hong ,  Jong-seok Kim

    IPC分类号： G02B6/26

    CPC分类号： H01H59/0009 ,  H01H35/346 ,  H01H2221/02

    摘要： A pneumatic micro electro mechanical system switch includes a substrate, a pneumatic actuating unit disposed on the substrate; the pneumatic actuating unit having a plurality of variable air cavities communicating such that when one of the plurality of variable air cavities is compressed, the rest are expanded; a signal line having a plurality of switching lines, each of which passes through a corresponding one of the plurality of variable air cavities and has switching ends disposed in a spaced-apart relation with each other in the corresponding one of the plurality of variable air cavities; a movable switching unit to connect the first and the second switching ends of each of the plurality of switching lines if one of the plurality of variable air cavities is compressed; and a driving unit to drive the pneumatic actuating unit so as to selectively compress the plurality of variable air cavities.

    摘要翻译： 气动微机电系统开关包括基板，设置在基板上的气动执行单元; 所述气动致动单元具有多个可变空气腔，所述多个可变空气腔连通，使得当所述多个可变空气腔中的一个被压缩时，其余部分被膨胀; 信号线具有多个切换线，每个切换线通过多个可变空气腔中的相应一个，并且具有相互间隔开的多个可变空气腔中相应的一个中的彼此间隔开的切换端 ; 如果多个可变空气腔中的一个被压缩，则可移动切换单元连接多个切换线中的每一个的第一和第二切换端; 以及驱动单元以驱动气动致动单元，以选择性地压缩多个可变空气腔。

    MEMS switch
    9.
    发明授权
    MEMS switch 失效
    MEMS开关

    公开(公告)号：US07919903B2

    公开(公告)日：2011-04-05

    申请号：US11540655

    申请日：2006-10-02

    申请人： Young-tack Hong ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

    发明人： Young-tack Hong ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

    IPC分类号： H01L41/00

    CPC分类号： B41J2/04581 ,  B41J2/04541

    摘要： A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.

    摘要翻译： 微机电系统（MEMS）开关包括基板，形成在基板上的固定信号线，与固定信号线的上表面和下表面之一间隔开的可移动信号线，以及至少一个压电致动器 连接到可移动信号线的第一端，以使可移动信号线与固定信号线接触或分离。 压电致动器包括第一电极，形成在第一电极上的压电层，形成在压电层上的第二电极，以及形成在第二电极上并与可移动信号线连接的连接层。

    MEMS switch
    10.
    发明申请
    MEMS switch 失效
    MEMS开关

    公开(公告)号：US20070159510A1

    公开(公告)日：2007-07-12

    申请号：US11540655

    申请日：2006-10-02

    申请人： Young-tack Hong ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

    发明人： Young-tack Hong ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

    IPC分类号： B41J2/04

    CPC分类号： B41J2/04581 ,  B41J2/04541

    摘要： A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.

    摘要翻译： 微机电系统（MEMS）开关包括基板，形成在基板上的固定信号线，与固定信号线的上表面和下表面之一间隔开的可移动信号线，以及至少一个压电致动器 连接到可移动信号线的第一端，以使可移动信号线与固定信号线接触或分离。 压电致动器包括第一电极，形成在第一电极上的压电层，形成在压电层上的第二电极，以及形成在第二电极上并与可移动信号线连接的连接层。