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    Piezoelectric RF MEMS device and method of fabricating the same
    1.
    发明授权
    Piezoelectric RF MEMS device and method of fabricating the same 失效
    压电RF MEMS器件及其制造方法

    公开(公告)号：US07545081B2

    公开(公告)日：2009-06-09

    申请号：US11594813

    申请日：2006-11-09

    申请人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Houng ,  Che-heung Kim

    发明人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Houng ,  Che-heung Kim

    IPC分类号： H01L41/08

    CPC分类号： H01H57/00 ,  H01L41/094 ,  H01L41/314 ,  H01L41/33

    摘要： A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward. A method of fabricating a piezoelectric RF MEMS device includes providing an upper substrate including an RF output signal line, providing a lower substrate including a piezoelectric actuator having an RF input signal line corresponding to the RF output signal line, and assembling the upper substrate and the lower substrate.

    摘要翻译： 提供了一种压电RF微机电系统（MEMS）器件及其制造方法，其中基于压电效应，RF MEMS器件以低电压向上驱动。 压电RF MEMS器件包括：设置有RF输出信号线的上基板，位于RF输出信号线下方的压电致动器;以及设置有空腔的下基板，使得压电致动器的一端固定到下基板 并且其另一端与上基板和下基板可移动地间隔开，其中压电致动器在其上设置有RF输入信号线，并且提供接触焊盘以将RF输出信号线与RF输入信号线连接， 压电致动器被向上驱动。 制造压电RF MEMS器件的方法包括提供包括RF输出信号线的上基板，提供包括具有对应于RF输出信号线的RF输入信号线的压电致动器的下基板，以及组装上基板和 下基板。

    Piezoelectric RF MEMS device and method of fabricating the same
    2.
    发明申请
    Piezoelectric RF MEMS device and method of fabricating the same 失效
    压电RF MEMS器件及其制造方法

    公开(公告)号：US20070120445A1

    公开(公告)日：2007-05-31

    申请号：US11594813

    申请日：2006-11-09

    申请人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Houng ,  Che-heung Kim

    发明人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Houng ,  Che-heung Kim

    IPC分类号： H01L41/053

    CPC分类号： H01H57/00 ,  H01L41/094 ,  H01L41/314 ,  H01L41/33

    摘要： A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward. A method of fabricating a piezoelectric RF MEMS device includes providing an upper substrate including an RF output signal line, providing a lower substrate including a piezoelectric actuator having an RF input signal line corresponding to the RF output signal line, and assembling the upper substrate and the lower substrate.

    摘要翻译： 提供了一种压电RF微机电系统（MEMS）器件及其制造方法，其中基于压电效应，RF MEMS器件以低电压向上驱动。 压电RF MEMS器件包括：设置有RF输出信号线的上基板，位于RF输出信号线下方的压电致动器;以及设置有空腔的下基板，使得压电致动器的一端固定到下基板 并且其另一端与上基板和下基板可移动地间隔开，其中压电致动器在其上设置有RF输入信号线，并且提供接触焊盘以将RF输出信号线与RF输入信号线连接， 压电致动器被向上驱动。 制造压电RF MEMS器件的方法包括提供包括RF输出信号线的上基板，提供包括具有对应于RF输出信号线的RF输入信号线的压电致动器的下基板，以及组装上基板和 下基板。

    Pneumatic MEMS switch and method of fabricating the same
    5.
    发明授权
    Pneumatic MEMS switch and method of fabricating the same 有权
    气动MEMS开关及其制造方法

    公开(公告)号：US07759591B2

    公开(公告)日：2010-07-20

    申请号：US11513036

    申请日：2006-08-31

    申请人： Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Dong-kyun Kim ,  Young-tack Hong ,  Jong-seok Kim ,  Chang-seung Lee

    发明人： Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Dong-kyun Kim ,  Young-tack Hong ,  Jong-seok Kim ,  Chang-seung Lee

    IPC分类号： H01H57/00

    CPC分类号： H01H59/0009 ,  H01H35/346 ,  H01H2221/02

    摘要： A pneumatic micro electro mechanical system switch includes a substrate, a pneumatic actuating unit disposed on the substrate; the pneumatic actuating unit having a plurality of variable air cavities communicating such that when one of the plurality of variable air cavities is compressed, the rest are expanded; a signal line having a plurality of switching lines, each of which passes through a corresponding one of the plurality of variable air cavities and has switching ends disposed in a spaced-apart relation with each other in the corresponding one of the plurality of variable air cavities; a movable switching unit to connect the first and the second switching ends of each of the plurality of switching lines if one of the plurality of variable air cavities is compressed; and a driving unit to drive the pneumatic actuating unit so as to selectively compress the plurality of variable air cavities.

    摘要翻译： 气动微机电系统开关包括基板，设置在基板上的气动执行单元; 所述气动致动单元具有多个可变空气腔，所述多个可变空气腔连通，使得当所述多个可变空气腔中的一个被压缩时，其余部分被膨胀; 信号线具有多个切换线，每个切换线通过多个可变空气腔中的相应一个，并且具有相互间隔开的多个可变空气腔中相应的一个中的彼此间隔开的切换端 ; 如果多个可变空气腔中的一个被压缩，则可移动切换单元连接多个切换线中的每一个的第一和第二切换端; 以及驱动单元以驱动气动致动单元，以选择性地压缩多个可变空气腔。

    Piezoelectric MEMS switch and method of fabricating the same
    6.
    发明授权
    Piezoelectric MEMS switch and method of fabricating the same 有权
    压电MEMS开关及其制造方法

    公开(公告)号：US07545246B2

    公开(公告)日：2009-06-09

    申请号：US11515717

    申请日：2006-09-06

    申请人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Hong ,  Che-heung Kim

    发明人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Hong ,  Che-heung Kim

    IPC分类号： H01H51/22

    CPC分类号： H01H57/00 ,  H01H2057/006 ,  Y10T403/7026

    摘要： A piezoelectric Micro Electro Mechanical System (MEMS) switch includes a substrate, first and second fixed signal lines symmetrically formed in a spaced-apart relation to each other on the substrate to have a predetermined gap therebetween, a piezoelectric actuator disposed in alignment with the first and the second fixed signal lines in the predetermined gap, and having a first end supported on the substrate to allow the piezoelectric actuator to be movable up and down, and a movable signal line having a first end connected to one of the first and the second fixed signal lines, and a second end configured to be in contact with, or separate from the other of the first and second fixed signal lines, the movable signal line at least one side thereof being connected to an upper surface of the piezoelectric actuator.

    摘要翻译： 一种压电微电子机械系统（MEMS）开关包括基板，第一和第二固定信号线，其在基板上以彼此间隔开的关系对称地形成，以在其间具有预定的间隙;压电致动器，其布置成与第一 并且所述第二固定信号线处于所述预定间隙中，并且具有支撑在所述基板上的第一端，以允许所述压电致动器能够上下移动;以及可移动信号线，其具有连接到所述第一和第二 固定信号线，以及构造成与第一和第二固定信号线中的另一个接触或分离的第二端，可移动信号线的至少一侧连接到压电致动器的上表面。

    Piezoelectric MEMS switch and method of fabricating the same
    7.
    发明申请
    Piezoelectric MEMS switch and method of fabricating the same 有权
    压电MEMS开关及其制造方法

    公开(公告)号：US20070231065A1

    公开(公告)日：2007-10-04

    申请号：US11515717

    申请日：2006-09-06

    申请人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Hong ,  Che-heung Kim

    发明人： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Hong ,  Che-heung Kim

    IPC分类号： B25G3/28

    CPC分类号： H01H57/00 ,  H01H2057/006 ,  Y10T403/7026

    摘要： A piezoelectric Micro Electro Mechanical System (MEMS) switch includes a substrate, first and second fixed signal lines symmetrically formed in a spaced-apart relation to each other on the substrate to have a predetermined gap therebetween, a piezoelectric actuator disposed in alignment with the first and the second fixed signal lines in the predetermined gap, and having a first end supported on the substrate to allow the piezoelectric actuator to be movable up and down, and a movable signal line having a first end connected to one of the first and the second fixed signal lines, and a second end configured to be in contact with, or separate from the other of the first and second fixed signal lines, the movable signal line at least one side thereof being connected to an upper surface of the piezoelectric actuator.

    摘要翻译： 一种压电微电子机械系统（MEMS）开关包括基板，第一和第二固定信号线，其在基板上以彼此间隔开的关系对称地形成，以在其间具有预定的间隙;压电致动器，其布置成与第一 并且所述第二固定信号线处于所述预定间隙中，并且具有支撑在所述基板上的第一端，以允许所述压电致动器能够上下移动;以及可移动信号线，其具有连接到所述第一和第二 固定信号线，以及构造成与第一和第二固定信号线中的另一个接触或分离的第二端，可移动信号线的至少一侧连接到压电致动器的上表面。

    Piezoelectric inkjet printhead and method of manufacturing the same
    9.
    发明授权
    Piezoelectric inkjet printhead and method of manufacturing the same 有权
    压电喷墨打印头及其制造方法

    公开(公告)号：US08813363B2

    公开(公告)日：2014-08-26

    申请号：US12722843

    申请日：2010-03-12

    申请人： Jae-chang Lee ,  Jae-woo Chung ,  Kyo-yool Lee ,  Chang-seung Lee ,  Sung-gyu Kang

    发明人： Jae-chang Lee ,  Jae-woo Chung ,  Kyo-yool Lee ,  Chang-seung Lee ,  Sung-gyu Kang

    IPC分类号： B21D53/76 ,  B23P17/00 ,  H01L41/22 ,  H04R17/00 ,  H01L41/00

    CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  Y10T29/42 ,  Y10T29/49401

    摘要： A method of manufacturing a piezoelectric inkjet printhead includes processing a lower silicon-on-insulator substrate having a sequentially stacked structure with a first silicon layer, an intervening oxide layer, and a second silicon layer, processing the lower silicon-on-insulator substrate by etching the second silicon layer to form a manifold, a plurality of pressure chambers arranged along at least one side of the manifold and connected with the manifold, and a plurality of dampers connected with the pressure chambers, and by etching the first silicon layer and the intervening oxide layer to form a plurality of vertical nozzles through the first silicon layer and the intervening oxide layer to corresponding ones of the plurality of dampers, stacking and bonding an upper substrate on the lower substrate, reducing the upper substrate to a predetermined thickness, and forming a piezoelectric actuator on the upper substrate.

    摘要翻译： 一种制造压电喷墨打印头的方法包括：通过第一硅层，中间氧化物层和第二硅层处理具有顺序层叠结构的下硅绝缘体上基板，通过以下方式处理下硅绝缘体上基板： 蚀刻所述第二硅层以形成歧管，沿所述歧管的至少一侧布置并与所述歧管连接的多个压力室以及与所述压力室连接的多个阻尼器，并且通过蚀刻所述第一硅层和所述第二硅层 形成多个垂直喷嘴，通过第一硅层和中间氧化物层到多个阻尼器中的相应的阻尼器，堆叠并结合下基板上的上基板，将上基板还原成预定厚度;以及 在上基板上形成压电致动器。