公开(公告)号：US5413521A

公开(公告)日：1995-05-09

申请号：US158856

申请日：1993-11-29

申请人： Seiichi Terashima ,  Masao Kita

发明人： Seiichi Terashima ,  Masao Kita

IPC分类号： H01L21/304 ,  B23D59/00 ,  B23D59/02 ,  B28D1/22 ,  B28D5/00 ,  B28D5/02 ,  C30B33/00 ,  B24B49/00

CPC分类号： B28D5/028 ,  B23D59/002 ,  B23D59/02 ,  B28D5/0094

摘要： The open end of the nozzle 42 is positioned close to and facing the surface of the metal base 20 on the side were the portion of the semiconductor ingot is to be cut off. An electromagnetic valve 46 is provided in the passage through which compressed air is supplied to the nozzle 42. The initial position of the blade 19 is detected by the detector 50U and the counter 52 measures the distance the blade 19 travels downward from the detected position and then the comparator 56 detects the point at which the measured value matches the value set on the numeric value setting device 54. The electromagnetic valve 46 is opened to emit compressed air from the nozzle 42 after this detection, until the detection of the lower limit position of the blade 19 by the detector 50D. This compressed air travels along in the direction of the rotation of the metal base 20 to enter the notch of the partially cut portion of the semiconductor ingot 10 made by the inner circumference cutting edge 22 and to consequently blow out the liquid coolant present between the metal base 20 and the semiconductor ingot 10.

摘要翻译： 喷嘴42的开口端靠近并面对金属基体20的表面，半导体晶锭的部分被切掉。 电磁阀46设置在通道中，压缩空气通过该通道供应到喷嘴42.刀片19的初始位置由检测器50U检测，并​​且计数器52测量刀片19从检测位置向下行进的距离， 那么比较器56检测测量值与在数值设定装置54上设定的值相匹配的点。电磁阀46被打开以在该检测之后从喷嘴42发出压缩空气，直到检测到下限位置 通过检测器50D。 该压缩空气沿着金属基座20的旋转方向行进，进入由内周切削刃22制成的半导体锭10的部分切削部分的切口，从而吹出金属 基座20和半导体块10。

公开(公告)号：US5525092A

公开(公告)日：1996-06-11

申请号：US197338

申请日：1994-02-16

申请人： Yoshihiro Hirano ,  Seiichi Terashima ,  Masao Kita

发明人： Yoshihiro Hirano ,  Seiichi Terashima ,  Masao Kita

IPC分类号： B23B23/00 ,  B23B29/00 ,  B24B5/04 ,  B24B5/50 ,  B24B41/06 ,  B24B49/10 ,  B24B49/00

CPC分类号： B24B41/062 ,  B23B29/00 ,  B24B5/04 ,  B24B5/50 ,  Y10T82/10 ,  Y10T82/2564

摘要： When a cylindrical single crystal ingot terminating in generally conical parts at the opposite ends thereof is machined with a cylindrical grinder which is adapted to support the ingot in place by fastening the conical parts of the ingot to a spindle side chuck and a tailstock side chuck severally provided with a conical hole and grind and finish the cylindrical part of the ingot while keeping the ingot driven on the spindle side, the ingot is liable to produce idle rotation possibly to the extent of disrupting the grinding work. A device for preventing the ingot from producing this idle rotation is provided which comprises revolution number detecting means adapted to be fastened to the tailstock side chuck and consequently allowed to detect the revolution number thereof, pressing means for pressing the ingot in the axial direction thereof through the medium of the tailstock side chuck, and control means adapted to compare the revolution number of a spindle with the revolution number found by the revolution number detecting means and effect due control of the pressing means when the difference between the two revolution numbers surpasses a prescribed threshold. The due control effected by the control means is utilized additionally or exclusively for the purpose of stopping the driving on the spindle side in one modified embodiment.

摘要翻译： 当圆柱形单晶锭在其相对端处终止于大致圆锥形部分时，被加工成圆柱形研磨机，该圆柱形磨床适于通过将锭的锥形部分分别固定到主轴侧夹头和尾座侧夹头来将棒固定在适当位置 设有锥形孔，研磨并完成铸锭的圆柱形部分，同时保持铸锭在主轴侧的驱动，铸锭易于产生怠速转动，可能会破坏研磨作业的程度。 提供了一种用于防止锭产生这种怠速转动的装置，其包括转数检测装置，其适于紧固到尾座侧卡盘，并因此允许检测其转数;压铸装置，其沿轴向方向按压铸锭 尾架侧卡盘的介质，以及适于将主轴转数与由转数检测装置求出的转数进行比较的控制装置，当两转数之间的差超过规定值时，对按压装置进行适当控制 阈。 为了在一个修改的实施例中停止在主轴侧的驱动的目的，由控制装置进行的适当的控制被额外地或排他地利用。

公开(公告)号：US5472099A

公开(公告)日：1995-12-05

申请号：US186848

申请日：1994-01-27

申请人： Seiichi Terashima

发明人： Seiichi Terashima

IPC分类号： B65D85/00 ,  B65D85/86 ,  H01L21/673 ,  B65B21/02

CPC分类号： H01L21/6732

摘要： A wafer cassette is provided which has a multiplicity of shelves provided in one side thereof with a notch and placed at intervals to give rise to open spaces therebetween for insertion of a wafer, provides the open spaces in the recesses thereof with buffer members severally adapted to meet in collision with part of the outer periphery of a wafer, and allows the notches in the multiplicity of shelves jointly to form an empty space for extractably admitting the leading end part of a wafer conveyor. The wafer cassette of this invention permits wafers carried on the wafer conveyor to be sent out past the leading end part of the conveyor and inserted automatically into the empty spaces formed in the cassette for insertion of wafers and stowed in the cassette after collision against the buffer members when the leading end part of the wafer conveyor (the end part on the wafer discharging side) is inserted into the empty space mentioned above and then set operating. Thus, the accommodation of individual wafers and the conveyance of a cassette as an integral unit are simultaneously materialized and the wafer processing system can be automated up to the very end thereof.

摘要翻译： 提供一种晶片盒，其具有多个搁板，其一侧设置有切口并间隔设置以在其间形成用于插入晶片的开放空间，在其凹部中为其中的开放空间提供缓冲构件，缓冲构件分别适于 遇到与晶片的外周的一部分碰撞，并且允许多个搁架中的凹口共同形成用于可提取地允许晶片传送器的前端部分的空白空间。 本发明的晶片盒允许在晶片传送带上承载的晶片经过传送带的前端部分传送出去，并自动插入形成在盒中的空间，用于插入晶片，并在与缓冲器碰撞之后收纳在盒中 当晶片输送机的前端部分（晶片放电侧的端部）插入上述空的空间中然后设置操作时的构件。 因此，单个晶片的容纳和作为整体单元的盒的输送被同时实现，并且晶片处理系统可以自动化到其最后。

公开(公告)号：US5187729A

公开(公告)日：1993-02-16

申请号：US838046

申请日：1992-02-19

申请人： Hiroyaki Ibe ,  Seiichi Terashima ,  Tsumoru Masui

发明人： Hiroyaki Ibe ,  Seiichi Terashima ,  Tsumoru Masui

IPC分类号： G01N23/20 ,  G01N23/207

CPC分类号： G01N23/20008 ,  G01N23/207 ,  G01N2223/056 ,  G01N2223/1016 ,  G01N2223/3306 ,  G01N2223/604

摘要： A method and an apparatus for detecting a crystallographic axis of a single crystal ingot based on the X-ray diffractometry, wherein and whereby a crystal habit line of the single crystal ingot is optically detected first, and thereafter making use of the geographical relation of the crystallographic axis to the crystal habit line, the crystallographic axis is detected with improved economy of time and labor and with improved precision, so that the orientation flat (OF) is made in the right place and direction.