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公开(公告)号：US11016034B2
公开(公告)日：2021-05-25
申请号：US15687229
申请日：2017-08-25
申请人： SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION , SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
发明人： Manhua Shen , Qiang Wu
IPC分类号： G01N21/00 , G01N21/88 , G02B13/00 , G02B21/00 , G01N21/95 , G02B21/18 , G02B3/00 , G01N21/956 , G06T7/00
摘要： An apparatus for detecting a defect on a surface of a substrate includes an optical microlens array disposed adjacent to the substrate and including an array of microlenses configured to direct light incident on a second surface of the optical microlens array to exit a first surface of the optical microlens array opposite the second surface for irradiating the surface of the substrate and converge light emitted from the irradiated surface of the substrate, and an imaging member including a plurality of imaging units configured to receive the converged light of the optical microlens array. Each of the imaging units corresponds to a microlens of the optical microlens array and includes a plurality of pixels and a light transmission opening for transmitting a portion of the incident light. The apparatus requires significantly less time to detect surface defects than conventional substrate surface defect detection devices.
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公开(公告)号：US10647073B2
公开(公告)日：2020-05-12
申请号：US15659377
申请日：2017-07-25
申请人： SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION , SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
发明人： Xiaofeng Yuan , Qiang Wu
IPC分类号： B29D11/00 , G02B27/62 , G02B3/00 , G02B7/02 , G02B7/00 , G02B1/04 , G02B6/42 , G02B13/00 , G02B17/08 , G02B27/32
摘要： A method for assembling a microlens array assembly including a set of microlens array elements having at least two array elements having a first array element and a second array element includes adsorbing the first array element using a mobile platform, adsorbing the second array element using a fixture platform, coarsely aligning the second array element with the first array element based on edges of the second array element and edges of the first array element, finely aligning the second array element with the first array element based on an array pattern of the second array element and an array pattern of the first array element, and attaching the second array element to the first array element. The method enables assembling of multiple microlens array elements.
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公开(公告)号：US10204809B2
公开(公告)日：2019-02-12
申请号：US15404672
申请日：2017-01-12
申请人： Semiconductor Manufacturing International (Beijing) Corporation , Semiconductor Manufacturing International (Shanghai) Corporation
发明人： Qiang Wu , Huayong Hu , Deping Kong
IPC分类号： H01L21/00 , H01L21/67 , H01L21/324 , H01L21/66 , H05B1/02
摘要： The present disclosure provides a thermal treatment chamber. The thermal treatment chamber includes a wafer holder to hold a to-be-processed wafer; a heat reservoir located under the wafer holder, but being separated from the wafer holder, for adjusting a temperature of the wafer holder based on the to-be-processed wafer; and a first driving unit connected to the heat reservoir for adjusting a distance between the wafer holder and the heat reservoir to adjust the temperature of the wafer holder.
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公开(公告)号：US20180080883A1
公开(公告)日：2018-03-22
申请号：US15706409
申请日：2017-09-15
申请人： Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
IPC分类号： G01N21/95 , G06T7/00 , G01N21/88 , G01N21/956
CPC分类号： G01N21/9501 , G01N21/8806 , G01N21/956 , G01N2201/0638 , G02B3/0037 , G06T5/006 , G06T7/0002 , G06T7/0004 , G06T7/0008 , G06T2207/10052 , G06T2207/30121 , G06T2207/30148 , H01L22/12
摘要： A substrate surface defect detection device includes an optical waveguide for receiving first light and directing the received first light to a surface of a to be tested substrate, the optical waveguide having a first surface facing toward the substrate and a second surface facing away from the substrate, a microlens array disposed on the second surface of the optical waveguide, the microlens array including a plurality of microlenses arranged in an array for receiving second light from the surface of the to be tested substrate and converging the received second light to converged light, and an imaging component for receiving the converged light from the at least one microlens array for optical imaging. The substrate surface defect detection device requires significantly less time than conventional substrate surface defect detection devices.
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公开(公告)号：US11085884B2
公开(公告)日：2021-08-10
申请号：US16523859
申请日：2019-07-26
申请人： Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
摘要： A substrate surface defect detection device includes an optical waveguide for receiving first light and directing the received first light to a surface of a to be tested substrate, the optical waveguide having a first surface facing toward the substrate and a second surface facing away from the substrate, a microlens array disposed on the second surface of the optical waveguide, the microlens array including a plurality of microlenses arranged in an array for receiving second light from the surface of the to be tested substrate and converging the received second light to converged light, and an imaging component for receiving the converged light from the at least one microlens array for optical imaging. The substrate surface defect detection device requires significantly less time than conventional substrate surface defect detection devices.
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公开(公告)号：US10679881B2
公开(公告)日：2020-06-09
申请号：US15797966
申请日：2017-10-30
申请人： SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION , SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
发明人： Qiang Wu , Xuan Liu , Shifeng He , Jianyao Liu
IPC分类号： H01L21/67 , H01L23/544 , G03F7/20
摘要： An apparatus for detecting a mark having first and second stripe groups on a substrate includes a detection module moveable over a surface of the substrate. The detection module includes a detection unit and a positioning unit configured to align the detection unit with the mark. The detection unit is configured to obtain data of the mark and operative to perform repeated acquisition operations on the first and second stripe groups of the mark. Each of the acquisition operations acquires data associated with the first stripe group or the second stripe group. The apparatus also includes a processing module configured to determine a positional deviation between the first stripe group and the second stripe group in response to the obtained data of the mark and data associated with a motion of the detection module.
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公开(公告)号：US20180079159A1
公开(公告)日：2018-03-22
申请号：US15659377
申请日：2017-07-25
申请人： SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION , SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
发明人： XIAOFENG YUAN , Qiang Wu
CPC分类号： B29D11/00365 , G02B1/041 , G02B3/0006 , G02B3/0012 , G02B3/0056 , G02B3/0062 , G02B3/0068 , G02B3/0075 , G02B5/1885 , G02B6/4203 , G02B13/0085 , G02B17/08 , G02B27/32
摘要： A method for assembling a microlens array assembly including a set of microlens array elements having at least two array elements having a first array element and a second array element includes adsorbing the first array element using a mobile platform, adsorbing the second array element using a fixture platform, coarsely aligning the second array element with the first array element based on edges of the second array element and edges of the first array element, finely aligning the second array element with the first array element based on an array pattern of the second array element and an array pattern of the first array element, and attaching the second array element to the first array element. The method enables assembling of multiple microlens array elements.
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公开(公告)号：US10416091B2
公开(公告)日：2019-09-17
申请号：US15706409
申请日：2017-09-15
申请人： SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION , SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
摘要： A substrate surface defect detection device includes an optical waveguide for receiving first light and directing the received first light to a surface of a to be tested substrate, the optical waveguide having a first surface facing toward the substrate and a second surface facing away from the substrate, a microlens array disposed on the second surface of the optical waveguide, the microlens array including a plurality of microlenses arranged in an array for receiving second light from the surface of the to be tested substrate and converging the received second light to converged light, and an imaging component for receiving the converged light from the at least one microlens array for optical imaging. The substrate surface defect detection device requires significantly less time than conventional substrate surface defect detection devices.
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公开(公告)号：US10007331B2
公开(公告)日：2018-06-26
申请号：US14569860
申请日：2014-12-15
申请人： Semiconductor Manufacturing International (Beijing) Corporation , Semiconductor Manufacturing International (Shanghai) Corporation
发明人： Qiang Wu
CPC分类号： G06F3/011 , G02B27/0093 , G02B27/017 , G02B2027/014 , G02B2027/0178 , G02B2027/0187 , G06F3/017
摘要： A wearable intelligent system is provided. The system includes a frame; and a micro projector disposed on the frame configured to project an image interface onto a beam splitter. The system also includes the beam splitter disposed on the frame configured to receive the image interface and form a virtual image in a user's eye; and a position sensor disposed on the front of the frame configured to sense a position of at least a body part and a change mode of the position with time and convert the change mode of the position into operation commands and the position into a position data. Further, the system includes a central data hub disposed on the frame configured to at least receive the position data and the operation commands and adjust the image interface to match the part of the user's body and perform corresponding operations according to the position data.
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公开(公告)号：US10658210B2
公开(公告)日：2020-05-19
申请号：US15797891
申请日：2017-10-30
申请人： SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION , SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
发明人： Shifeng He , Qiang Wu
IPC分类号： H01L21/67 , H01L21/68 , G03F7/20 , H01L23/544
摘要： An apparatus for detecting a mark on a substrate is provided. The mark has a first stripe group and a second stripe group disposed in parallel to each other. The apparatus includes a detection module operative to move over a surface of the substrate. The detection module includes a detection unit for obtaining data from the mark and operative to perform repeated acquisition operations on the first stripe group and the second stripe group of the mark. Each of the acquisition operations acquires data associated with the first stripe group or the second stripe group of the mark. The detection module also includes a positioning unit for aligning the detection unit with the mark.
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