公开(公告)号：US20030205254A1

公开(公告)日：2003-11-06

申请号：US10420659

申请日：2003-04-21

Applicant: Semitool, Inc.

Inventor： Eric J. Bergman ,  Mignon P. Hess

IPC: B08B003/00

CPC classification number: H01L21/02054 ,  B08B3/02 ,  B08B3/08 ,  B08B7/00 ,  B08B2203/005 ,  B08B2230/01 ,  H01L21/02052 ,  H01L21/6704 ,  Y10S134/902

Abstract: An apparatus for supplying a mixture of a treatment liquid and ozone for treatment of a surface of a workpiece, and a corresponding method are set forth. The preferred embodiment of the apparatus comprises a liquid supply line that is used to provide fluid communication between a reservoir containing the treatment liquid and a treatment chamber housing the workpiece. A heater is disposed to heat the workpiece, either directly or indirectly. Preferably, the workpiece is heated by heating the treatment liquid that is supplied to the workpiece. One or more nozzles accept the treatment liquid from the liquid supply line and spray it onto the surface of the workpiece while an ozone generator provides ozone into an environment containing the workpiece.

Abstract translation: 提供了一种用于提供处理液和臭氧的混合物用于处理工件表面的设备以及相应的方法。 该装置的优选实施例包括液体供应管线，其用于在容纳处理液体的容器和容纳工件的处理室之间提供流体连通。 设置加热器以直接或间接地加热工件。 优选地，通过加热供给到工件的处理液来加热工件。 一个或多个喷嘴接受来自液体供应管线的处理液并将其喷射到工件的表面上，同时臭氧发生器将臭氧加入到包含工件的环境中。