公开(公告)号：US20170227575A1

公开(公告)日：2017-08-10

申请号：US15093765

申请日：2016-04-08

Applicant: SensorTek technology Corp.

Inventor： Hsin-Hung Huang ,  Wei-Yang Ou ,  Hung-Sen Chen

IPC: G01P21/00 ,  G01C25/00 ,  G01C19/5783 ,  G01P15/08 ,  G01P15/125

CPC classification number: G01P21/00 ,  B81C99/0045 ,  G01C19/5783 ,  G01C25/00 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0831

Abstract: A method of detecting whether a microelectromechanical system (MEMS) device is hermetic includes applying at least three voltage differences between a movable part and a sensor electrode of the MEMS device to measure at least three effective capacitances, calculating a capacitance-to-voltage curve and an offset voltage of the MEMS device according to the at least three effective capacitances; and determining whether the offset voltage is within a predetermined range to determine whether MEMS device is hermetic.

公开(公告)号：US09915679B2

公开(公告)日：2018-03-13

申请号：US15093765

申请日：2016-04-08

Applicant: SensorTek technology Corp.

Inventor： Hsin-Hung Huang ,  Wei-Yang Ou ,  Hung-Sen Chen

IPC: G01P15/12 ,  B81C99/00 ,  G01P21/00 ,  G01C19/5783 ,  G01C25/00 ,  G01P15/08 ,  G01P15/125

CPC classification number: G01P21/00 ,  B81C99/0045 ,  G01C19/5783 ,  G01C25/00 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0831

Abstract: A method of detecting whether a microelectromechanical system (MEMS) device is hermetic includes applying at least three voltage differences between a movable part and a sensor electrode of the MEMS device to measure at least three effective capacitances, calculating a capacitance-to-voltage curve and an offset voltage of the MEMS device according to the at least three effective capacitances; and determining whether the offset voltage is within a predetermined range to determine whether MEMS device is hermetic.