摘要:
Disclosed are an MEMS type semiconductor gas sensor using a microheater having many holes and a method for manufacturing the same. The MEMS type semiconductor gas sensor includes: a substrate of which a central region is etched with a predetermined thickness; a second membrane formed at an upper portion of the central region of the substrate and having many holes; a heat emitting resistor formed on the second membrane and having many holes; a first membrane formed on the second membrane including the heat emitting resistor and having many holes; a sensing electrode formed on the first membrane and having many holes; and a sensing material formed on the sensing electrode.
摘要:
Disclosed is an electrochemical gas sensor using micro electro mechanical systems (MEMS). The MEMS electrochemical gas sensor includes: a substrate a lower central region of which is etched by a predetermined thickness; a first insulation film formed on the substrate; a heat emitting resistance body formed on the first insulation film; a second insulation film formed on the heat emitting resistance body; a reference electrode formed in an upper central region of the second insulation film; a solid electrolyte formed on the reference electrode; and a detection electrode formed on the solid electrolyte.
摘要:
Disclosed is an electrochemical gas sensor using micro electro mechanical systems (MEMS). The MEMS electrochemical gas sensor includes: a substrate a lower central region of which is etched by a predetermined thickness; a first insulation film formed on the substrate; a heat emitting resistance body formed on the first insulation film; a second insulation film formed on the heat emitting resistance body; a reference electrode formed in an upper central region of the second insulation film; a solid electrolyte formed on the reference electrode; and a detection electrode formed on the solid electrolyte.
摘要:
Disclosed are a gas sensor, and a method of manufacturing and using the same. The method includes: forming a detection material on a heater; coating an encapsulant on the detection material; and heating the heater to remove the encapsulant from the detection material when the gas sensor is operated.
摘要:
Disclosed are a gas sensor, and a method of manufacturing and using the same. The method includes: forming a detection material on a heater; coating an encapsulant on the detection material; and heating the heater to remove the encapsulant from the detection material when the gas sensor is operated.
摘要:
Provided is a convergence control module for a three-dimensional (3D) camera that can be operated with low power to reduce power consumption, which has been a problem in the 3D camera. A 3D camera module includes at least one camera module, a moving guide for supporting the camera module and providing a moving path, a control driver for moving the camera module along the moving guide, and a control unit for controlling the control driver.
摘要:
Provided are a method for preparing polymer actuators with high stability and polymer actuators prepared by the method, and more specifically, to a method for preparing polymer actuators with high stability that use low power, are extremely thin, and can be substituted in a motor of a camera module, and polymer actuators prepared by the method. The method includes the steps of: preparing an Ionic Polymer Metal Composite (IPMC) in which metal electrodes are plated on both surfaces of a ionic polymer film; removing water from the ionic polymer film of the IPMC; and expanding the IPMC in a polar solvent that has a higher boiling point and a lower freezing point than water.
摘要:
Metal nanoparticle-polymer composites, a method of manufacturing the same, and a polymer actuator using the same are provided. The method includes synthesizing an organometallic compound as a precursor of metal nanoparticles, preparing a solution mixture containing the organometallic compound and a polymer, and drying and annealing the solution mixture to generate the metal nanoparticle-polymer composite including metal nanoparticles. Thus, highly efficient metal nanoparticle-polymer composite materials may be manufactured with a uniform distribution without synthesizing nanoparticles.
摘要:
A method of preparing a polymer actuator includes providing an ionic conductive polymer membrane; forming first and second metal electrodes respectively over first and second surfaces of the ionic conductive polymer membrane; substituting water used in the formation of the first and second metal electrodes with an ionic liquid stable to an electrolysis; and coating the first and second surfaces of the metal electrodes with a coating material.
摘要:
Provided are a surface-coated polymer actuator and a method of preparing the same. The polymer actuator includes an ionic conductive polymer membrane, metal electrodes formed on both surfaces of the ionic conductive polymer membrane, and coating layers formed on both the surfaces of the metal electrodes.By coating the surfaces of the metal electrodes of the polymer actuator, the leakage of solvent from the electrode surfaces due to an inner pressure, which is caused by the solvent's flow due to an electrical stimulus when the actuator is operated, can be prevented and thus the displacement and drivability of the polymer actuator can be improved.