MEMS electrochemical gas sensor
    1.
    发明授权
    MEMS electrochemical gas sensor 有权
    MEMS电化学气体传感器

    公开(公告)号:US09494543B2

    公开(公告)日:2016-11-15

    申请号:US13620546

    申请日:2012-09-14

    CPC分类号: G01N27/18 G01N33/004

    摘要: Disclosed is an electrochemical gas sensor using micro electro mechanical systems (MEMS). The MEMS electrochemical gas sensor includes: a substrate a lower central region of which is etched by a predetermined thickness; a first insulation film formed on the substrate; a heat emitting resistance body formed on the first insulation film; a second insulation film formed on the heat emitting resistance body; a reference electrode formed in an upper central region of the second insulation film; a solid electrolyte formed on the reference electrode; and a detection electrode formed on the solid electrolyte.

    摘要翻译: 公开了一种使用微机电系统(MEMS)的电化学气体传感器。 MEMS电化学气体传感器包括:其下部中心区域被预定厚度蚀刻的衬底; 形成在所述基板上的第一绝缘膜; 形成在第一绝缘膜上的发热电阻体; 形成在所述发热电阻体上的第二绝缘膜; 参考电极,其形成在所述第二绝缘膜的上中央区域中; 形成在参比电极上的固体电解质; 和形成在固体电解质上的检测电极。

    Microelectromechanical systems type semiconductor gas sensor using microheater having many holes and method for manufacturing the same
    2.
    发明授权
    Microelectromechanical systems type semiconductor gas sensor using microheater having many holes and method for manufacturing the same 有权
    微机电系统使用具有许多孔的微加热器的半导体气体传感器及其制造方法

    公开(公告)号:US08683847B2

    公开(公告)日:2014-04-01

    申请号:US13345772

    申请日:2012-01-09

    IPC分类号: H01L21/02 G01N7/04

    CPC分类号: G01N27/128 G01N27/123

    摘要: Disclosed are an MEMS type semiconductor gas sensor using a microheater having many holes and a method for manufacturing the same. The MEMS type semiconductor gas sensor includes: a substrate of which a central region is etched with a predetermined thickness; a second membrane formed at an upper portion of the central region of the substrate and having many holes; a heat emitting resistor formed on the second membrane and having many holes; a first membrane formed on the second membrane including the heat emitting resistor and having many holes; a sensing electrode formed on the first membrane and having many holes; and a sensing material formed on the sensing electrode.

    摘要翻译: 公开了使用具有许多孔的微加热器的MEMS型半导体气体传感器及其制造方法。 MEMS型半导体气体传感器包括:以预定厚度蚀刻中心区域的基板; 第二膜,形成在所述基板的中心区域的上部并具有许多孔; 形成在第二膜上并具有许多孔的发热电阻器; 形成在包括所述发热电阻器并具有许多孔的所述第二膜上的第一膜; 形成在第一膜上并具有许多孔的感测电极; 以及感测材料,形成在感测电极上。

    MEMS ELECTROCHEMICAL GAS SENSOR
    3.
    发明申请
    MEMS ELECTROCHEMICAL GAS SENSOR 有权
    MEMS电化学气体传感器

    公开(公告)号:US20130075255A1

    公开(公告)日:2013-03-28

    申请号:US13620546

    申请日:2012-09-14

    IPC分类号: G01N27/407

    CPC分类号: G01N27/18 G01N33/004

    摘要: Disclosed is an electrochemical gas sensor using micro electro mechanical systems (MEMS). The MEMS electrochemical gas sensor includes: a substrate a lower central region of which is etched by a predetermined thickness; a first insulation film formed on the substrate; a heat emitting resistance body formed on the first insulation film; a second insulation film formed on the heat emitting resistance body; a reference electrode formed in an upper central region of the second insulation film; a solid electrolyte formed on the reference electrode; and a detection electrode formed on the solid electrolyte.

    摘要翻译: 公开了一种使用微机电系统(MEMS)的电化学气体传感器。 MEMS电化学气体传感器包括:其下部中心区域被预定厚度蚀刻的衬底; 形成在所述基板上的第一绝缘膜; 形成在第一绝缘膜上的发热电阻体; 形成在所述发热电阻体上的第二绝缘膜; 参考电极,其形成在所述第二绝缘膜的上中央区域中; 形成在参比电极上的固体电解质; 和形成在固体电解质上的检测电极。

    METHOD FOR PREPARING POLYMER ACTUATORS WITH HIGH STABILITY AND POLYMER ACTUATORS PREPARED BY THE METHOD
    6.
    发明申请
    METHOD FOR PREPARING POLYMER ACTUATORS WITH HIGH STABILITY AND POLYMER ACTUATORS PREPARED BY THE METHOD 审中-公开
    制备具有高稳定性的聚合物致动器的方法和由该方法制备的聚合物致动器

    公开(公告)号:US20080107906A1

    公开(公告)日:2008-05-08

    申请号:US11856484

    申请日:2007-09-17

    IPC分类号: B32B27/06 B05D5/12 B32B15/08

    摘要: Provided are a method for preparing polymer actuators with high stability and polymer actuators prepared by the method, and more specifically, to a method for preparing polymer actuators with high stability that use low power, are extremely thin, and can be substituted in a motor of a camera module, and polymer actuators prepared by the method. The method includes the steps of: preparing an Ionic Polymer Metal Composite (IPMC) in which metal electrodes are plated on both surfaces of a ionic polymer film; removing water from the ionic polymer film of the IPMC; and expanding the IPMC in a polar solvent that has a higher boiling point and a lower freezing point than water.

    摘要翻译: 提供一种制备具有高稳定性的聚合物致动器和通过该方法制备的聚合物致动器的方法,更具体地说,涉及一种制备具有高功率,非常薄的高稳定性的聚合物致动器的方法,并且可以在 相机模块和通过该方法制备的聚合物致动器。 该方法包括以下步骤:制备在离子聚合物膜的两个表面上镀金属电极的离子聚合物金属复合物(IPMC); 从IPMC的离子聚合物膜中除去水分; 并在具有比水更高的沸点和更低的凝固点的极性溶剂中扩展IPMC。

    SURFACE-COATED POLYMER ACTUATOR AND METHOD OF PREPARING THE SAME
    9.
    发明申请
    SURFACE-COATED POLYMER ACTUATOR AND METHOD OF PREPARING THE SAME 失效
    表面涂覆的聚合物致动器及其制备方法

    公开(公告)号:US20090027833A1

    公开(公告)日:2009-01-29

    申请号:US12179545

    申请日:2008-07-24

    IPC分类号: H01G9/00 B05D5/12

    摘要: Provided are a surface-coated polymer actuator and a method of preparing the same. The polymer actuator includes an ionic conductive polymer membrane, metal electrodes formed on both surfaces of the ionic conductive polymer membrane, and coating layers formed on both the surfaces of the metal electrodes.By coating the surfaces of the metal electrodes of the polymer actuator, the leakage of solvent from the electrode surfaces due to an inner pressure, which is caused by the solvent's flow due to an electrical stimulus when the actuator is operated, can be prevented and thus the displacement and drivability of the polymer actuator can be improved.

    摘要翻译: 提供了一种表面涂覆聚合物致动器及其制备方法。 聚合物致动器包括离子导电聚合物膜,形成在离子导电聚合物膜的两个表面上的金属电极和形成在金属电极的两个表面上的涂层。 通过涂覆聚合物致动器的金属电极的表面,可以防止由于当致动器操作时由于电刺激引起的溶剂流动而引起的内部压力从溶液的电极表面泄漏溶剂,因此 可以提高聚合物致动器的位移和驾驶性能。

    METHOD AND APPARATUS FOR SCANNING BIO CHIPS USING LIGHT AMPLICATION BY METAL NANO-PARTICLES
    10.
    发明申请
    METHOD AND APPARATUS FOR SCANNING BIO CHIPS USING LIGHT AMPLICATION BY METAL NANO-PARTICLES 审中-公开
    使用金属纳米颗粒的光放大扫描生物柴油的方法和装置

    公开(公告)号:US20090270275A1

    公开(公告)日:2009-10-29

    申请号:US12355590

    申请日:2009-01-16

    IPC分类号: C40B30/10 C40B60/12

    摘要: The present invention utilizes a principle in which, in a state in which metal nano-particles are attached to target probes and used as markers, and the metal nano-particles have a proper density according to a bio reaction between the target probes and fixed probes, when the metal nano-particles are irradiated with a laser beam having a proper intensity from the optical pick-up head, a higher optical energy is delivered to the phase change layer by an optical amplification effect caused by the metal nano-particles, thereby better inducing an amorphous-to-crystalline phase change.

    摘要翻译: 本发明利用金属纳米粒子附着于靶探针并用作标记物的状态,金属纳米粒子根据靶探针与固定探针之间的生物反应具有适当的密度的原理 当用来自光学拾取头的具有适当强度的激光束照射金属纳米颗粒时,通过由金属纳米颗粒引起的光放大效应将更高的光能量传递到相变层,由此 更好地诱导无定形至晶相的相变。