Method and apparatus for classifying a defect on a semiconductor wafer
    1.
    发明授权
    Method and apparatus for classifying a defect on a semiconductor wafer 失效
    用于对半导体晶片上的缺陷进行分类的方法和装置

    公开(公告)号:US5943437A

    公开(公告)日:1999-08-24

    申请号:US725950

    申请日:1996-10-07

    IPC分类号: G06T7/00 H01L21/66 G06K9/00

    摘要: A surface image of a semiconductor wafer having a defect is picked up as a inspection image while a surface image of a semiconductor wafer having no defect is stored in an image memory as a reference image. A density difference image between the inspection image and the reference image. By extracting the defect in wiring and non-wiring regions from the density difference image, extract images are obtained. Two luminance information for wiring and non-wiring regions are obtained from extract images. Based on the luminance information, the type of the defect is determined and a production process where the defect has occurred is detect.

    摘要翻译: 拾取具有缺陷的半导体晶片的表面图像作为检查图像,同时将没有缺陷的半导体晶片的表面图像作为参考图像存储在图像存储器中。 检查图像与参考图像之间的浓度差图像。 通过从密度差图像中提取布线和非布线区域中的缺陷,获得提取图像。 从提取图像获得布线和非布线区域的两个亮度信息。 基于亮度信息,确定缺陷的类型并检测发生缺陷的生产过程。

    Tire shape measuring system
    2.
    发明申请
    Tire shape measuring system 有权
    轮胎形状测量系统

    公开(公告)号:US20090040533A1

    公开(公告)日:2009-02-12

    申请号:US12219901

    申请日:2008-07-30

    IPC分类号: G01B11/24

    摘要: A tire shape measuring system measures a surface shape on the basis of an image of a line of light (a light section line) emitted to a surface of a relatively rotating tire using a light-section method. The shape measuring system includes a light projector for emitting a plurality of lines of light onto a tire surface in directions different from a direction in which the height of the surface is detected so as to form a plurality of separate light section lines and a camera for capturing images of the light section lines in directions in which chief rays of the lines of light are specularly reflected by the tire surface. The shape measuring system individually detects the coordinates of the light section lines from images of pre-defined independent image processing target areas for each captured image and calculates the distribution of the surface height using the detected coordinates.

    摘要翻译: 轮胎形状测量系统基于使用光截面法发射到相对轮胎的轮胎的表面的光线(光线)的图像来测量表面形状。 该形状测量系统包括:光投影仪,用于在与检测表面的高度方向不同的方向上将多条光线发射到轮胎表面上,以形成多个分开的光线;以及相机, 在所述光线的主光线被所述轮胎表面镜面反射的方向上拍摄所述光截面线的图像。 形状测量系统从每个拍摄图像的预定义的独立图像处理目标区域的图像中分别检测光区域线的坐标,并使用检测到的坐标来计算表面高度的分布。

    Tire shape measuring system
    3.
    发明授权
    Tire shape measuring system 有权
    轮胎形状测量系统

    公开(公告)号:US07755772B2

    公开(公告)日:2010-07-13

    申请号:US12219901

    申请日:2008-07-30

    IPC分类号: G01B11/24

    摘要: A tire shape measuring system measures a surface shape on the basis of an image of a line of light (a light section line) emitted to a surface of a relatively rotating tire using a light-section method. The shape measuring system includes a light projector for emitting a plurality of lines of light onto a tire surface in directions different from a direction in which the height of the surface is detected so as to form a plurality of separate light section lines and a camera for capturing images of the light section lines in directions in which chief rays of the lines of light are specularly reflected by the tire surface. The shape measuring system individually detects the coordinates of the light section lines from images of pre-defined independent image processing target areas for each captured image and calculates the distribution of the surface height using the detected coordinates.

    摘要翻译: 轮胎形状测量系统基于使用光截面法发射到相对轮胎的轮胎的表面的光线(光线)的图像来测量表面形状。 该形状测量系统包括:光投影仪,用于在与检测表面的高度方向不同的方向上将多条光线发射到轮胎表面上,以形成多个分开的光线;以及相机, 在所述光线的主光线被所述轮胎表面镜面反射的方向上拍摄所述光截面线的图像。 形状测量系统从每个拍摄图像的预定义的独立图像处理目标区域的图像中分别检测光区域线的坐标,并使用检测到的坐标来计算表面高度的分布。

    Photothermal conversion measurement apparatus, photothermal conversion measurement method, and sample cell
    4.
    发明授权
    Photothermal conversion measurement apparatus, photothermal conversion measurement method, and sample cell 失效
    光热转换测量装置,光热转换测量方法和样品池

    公开(公告)号:US07522287B2

    公开(公告)日:2009-04-21

    申请号:US11350954

    申请日:2006-02-10

    IPC分类号: G01B11/02 G01N21/00 G01N1/10

    摘要: A liquid sample is irradiated with excitation light and measurement light, and a measurement position at which a traveling path of the measurement light passes through an excitation section of the excitation light in the sample is changed while the sample is being irradiated with the excitation light and the measurement light. Then, the phase change of the measurement light is measured for each measurement by optical interferometry on the basis of the measurement light after the measurement light passes through the sample. The measurement position is changed by, for example, scanning the excitation light, moving the sample, moving a lens that collects the excitation light in the sample so as to change the light-collecting position (focal position) in the sample, etc.

    摘要翻译: 用激发光和测量光照射液体样品,并且在样品被激发光照射的同时改变测量光的行进路径通过样品中的激发光的激发部分的测量位置,以及 测量灯。 然后,基于测量光通过样品后的测量光,通过光学干涉测量对每次测量测量测量光的相位变化。 通过例如扫描激发光,移动样品,移动收集样品中的激发光的透镜来改变测量位置,以便改变样品中的聚光位置(焦点位置)等。

    Apparatus and method for detecting tire shape
    6.
    发明授权
    Apparatus and method for detecting tire shape 有权
    轮胎形状检测装置及方法

    公开(公告)号:US07724377B2

    公开(公告)日:2010-05-25

    申请号:US11898906

    申请日:2007-09-17

    IPC分类号: G01B11/24

    CPC分类号: G01M17/027

    摘要: A tire shape detecting apparatus includes a projector that applies a plurality line light beams in a continuously joined manner, from a direction different from the detection height direction (Z-axis direction) in one light section line, or that applies one line light beam in a condensed manner in the line length direction thereof in order that the one light section line may be formed on the one line Ls on the surface of the tire; and a camera for picking up images of the plurality of line light beams applied to the tire surface in the direction in which the principal ray of each of the plurality of line light beams performs specular reflection with respect to the tire surface, or in the direction in which the principal ray of the condensed one line light beam performs specular reflection with respect to the tire surface.

    摘要翻译: 轮胎形状检测装置包括投影仪,其从与一条光线中的检测高度方向(Z轴方向)不同的方向以连续接合的方式施加多条线光束,或者将一条线光束 在其长度方向上以冷凝方式,以便在轮胎表面上的一条线Ls上形成一条光线; 以及照相机,用于拾取施加到轮胎表面上的多条线光束的图像,所述图像沿着所述多条线光束中的每一条的主光线相对于轮胎表面进行镜面反射的方向,或者朝向 其中冷凝的一行光束的主射线相对于轮胎表面执行镜面反射。

    Apparatus and method for measuring shape
    7.
    发明申请
    Apparatus and method for measuring shape 有权
    用于测量形状的装置和方法

    公开(公告)号:US20070195314A1

    公开(公告)日:2007-08-23

    申请号:US11707151

    申请日:2007-02-16

    IPC分类号: G01J1/04

    CPC分类号: G01B11/24

    摘要: A shape measuring apparatus and a shape measuring method suited for measuring an edge profile of a thin sample such as a semiconductor wafer or the like is provided. A distribution of surface angle and an edge profile of a measurement site is calculated by emitting light at sequentially different angle to the measurement site of a wafer by sequentially switching and lighting a plurality of LEDs each disposed at one of plurality of positions in one plane by an LED driving circuit, obtaining an image data showing a luminance distribution of the reflected light form the measurement site through a camera by a calculator each time light is emitted and, estimating an emitting angle of the light when the luminance of the reflected light becomes peak based on image data and emitting angle of the light corresponding to each LED by the calculator.

    摘要翻译: 提供了适合于测量诸如半导体晶片等的薄样品的边缘轮廓的形状测量装置和形状测量方法。 通过顺序地切换和照亮各自设置在一个平面中的多个位置中的一个位置的多个LED,通过以与晶片的测量位置顺序不同的角度发射光来计算测量部位的表面角度和边缘轮廓的分布, LED驱动电路,每次发光时,通过计算机获得表示通过照相机形成测量部位的反射光的亮度分布的图像数据,并且当反射光的亮度变得高峰时,估计光的发射角度 基于图像数据和通过计算器发射对应于每个LED的光的角度。

    Apparatus and method for measuring shape
    8.
    发明授权
    Apparatus and method for measuring shape 有权
    用于测量形状的装置和方法

    公开(公告)号:US07715022B2

    公开(公告)日:2010-05-11

    申请号:US11707151

    申请日:2007-02-16

    IPC分类号: G01B11/24 G01B11/30

    CPC分类号: G01B11/24

    摘要: A shape measuring apparatus and a shape measuring method suited for measuring an edge profile of a thin sample such as a semiconductor wafer or the like is provided. A distribution of surface angle and an edge profile of a measurement site is calculated by emitting light at sequentially different angle to the measurement site of a wafer by sequentially switching and lighting a plurality of LEDs each disposed at one of plurality of positions in one plane by an LED driving circuit, obtaining an image data showing a luminance distribution of the reflected light form the measurement site through a camera by a calculator each time light is emitted and, estimating an emitting angle of the light when the luminance of the reflected light becomes peak based on image data and emitting angle of the light corresponding to each LED by the calculator.

    摘要翻译: 提供了适合于测量诸如半导体晶片等的薄样品的边缘轮廓的形状测量装置和形状测量方法。 通过顺序地切换和照亮各自设置在一个平面中的多个位置中的一个位置的多个LED,通过以与晶片的测量位置顺序不同的角度发射光来计算测量部位的表面角度和边缘轮廓的分布, LED驱动电路,每次发光时,通过计算机获得表示通过照相机形成测量部位的反射光的亮度分布的图像数据,并且当反射光的亮度变得高峰时,估计光的发射角度 基于图像数据和通过计算器发射对应于每个LED的光的角度。

    Apparatus and method for detecting tire shape
    9.
    发明申请
    Apparatus and method for detecting tire shape 有权
    轮胎形状检测装置及方法

    公开(公告)号:US20080218742A1

    公开(公告)日:2008-09-11

    申请号:US11898906

    申请日:2007-09-17

    IPC分类号: G01N21/00 G01N21/55

    CPC分类号: G01M17/027

    摘要: A tire shape detecting apparatus includes a projector that applies a plurality line light beams in a continuously joined manner, from a direction different from the detection height direction (Z-axis direction) in one light section line, or that applies one line light beam in a condensed manner in the line length direction thereof in order that the one light section line may be formed on the one line Ls on the surface of the tire; and a camera for picking up images of the plurality of line light beams applied to the tire surface in the direction in which the principal ray of each of the plurality of line light beams performs specular reflection with respect to the tire surface, or in the direction in which the principal ray of the condensed one line light beam performs specular reflection with respect to the tire surface.

    摘要翻译: 轮胎形状检测装置包括投影仪,其从与一条光线中的检测高度方向(Z轴方向)不同的方向以连续接合的方式施加多条线光束,或者将一条线光束 在其长度方向上以冷凝方式,以便在轮胎表面上的一条线Ls上形成一条光线; 以及照相机,用于拾取施加到轮胎表面上的多条线光束的图像,所述方向在多条线光束中的每条线的主光线相对于轮胎表面进行镜面反射的方向上, 其中冷凝的一行光束的主射线相对于轮胎表面执行镜面反射。