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    Apparatus for examining target objects such as LCD panels
    7.
    发明授权
    Apparatus for examining target objects such as LCD panels 失效
    用于检查诸如LCD面板的目标物体的装置

    公开(公告)号：US5691764A

    公开(公告)日：1997-11-25

    申请号：US510669

    申请日：1995-08-03

    申请人： Kiyoshi Takekoshi ,  Shinji Iino ,  Itaru Iida

    发明人： Kiyoshi Takekoshi ,  Shinji Iino ,  Itaru Iida

    IPC分类号： G09G3/00 ,  H04N7/18

    CPC分类号： G09G3/006 ,  G02F1/1309

    摘要： A probe apparatus incorporated into a lighting inspection system for LCD panels, includes a store section, a process section, and a transfer section interposed between them. An examination mechanism having a probe card is arranged in an examination area of the process section. Right and left alignment areas are formed so as to interpose the examination area, and right and left work tables on which the LCD panels are to be loaded, are arranged on the right and left alignment areas, respectively. The movement of the right and left work tables is controlled by a controller, and the LCD panels on the right and left work tables are alternately examined in the examination area by the examination mechanism.

    摘要翻译： 结合到LCD面板的照明检查系统中的探针装置包括存储部分，处理部分和介于它们之间的转印部分。 具有探针卡的检查机构布置在处理部分的检查区域中。 形成右侧和左侧对准区域，以便分别将检查区域和LCD面板的右侧和左侧工作台设置在右侧和左侧对准区域上。 左右工作台的移动由控制器控制，右侧和左侧工作台上的LCD面板由检查机构在检查区域交替检查。

    Contactor holding mechanism and automatic change mechanism for contactor
    8.
    发明授权
    Contactor holding mechanism and automatic change mechanism for contactor 有权
    接触器保持机构和接触器自动更换机构

    公开(公告)号：US06590381B1

    公开(公告)日：2003-07-08

    申请号：US09646951

    申请日：2000-09-25

    申请人： Shinji Iino ,  Junichi Hagihara ,  Kiyoshi Takekoshi

    发明人： Shinji Iino ,  Junichi Hagihara ,  Kiyoshi Takekoshi

    IPC分类号： G01R3102

    CPC分类号： G01R31/2887 ,  G01R31/2851 ,  H01L21/6838 ,  H01L21/68714

    摘要： Disclosed are a holding mechanism of a contactor and an automatic renewing mechanism of a contactor provided with the holding mechanism of the contactor. The contactor holding mechanism includes a frame (11) fixed to a performance board (P), a plurality of latch mechanisms (13) for holding the contactor inside the frame, and a suction fixing mechanism (14) for fixing the contactor held by the latch mechanisms inside the frame by a vacuum suction force. The automatic renewing mechanism of the contactor includes a holding mechanism (10) for detachably holding the contactor, and a delivery mechanism (16) for delivering the contactor (12) to and from the holding mechanism. Further, the delivery mechanism includes a suction holding section (17) for holding the contactor (12) by suction, an arm (18) having the suction holding section formed at the distal end portion and arranged swingable and movable in a vertical direction, and an arm driving section (19) for swinging and moving in a vertical direction the arm (18).

    摘要翻译： 公开了一种接触器的保持机构和设置有接触器的保持机构的接触器的自动更新机构。 接触器保持机构包括：固定到执行板（P）的框架（11），用于将接触器保持在框架内的多个闩锁机构（13），以及用于固定由接触器 通过真空抽吸力在框架内部的闩锁机构。 接触器的自动更新机构包括用于可拆卸地保持接触器的保持机构（10）和用于将接触器（12）输送到保持机构和从保持机构输送的输送机构（16）。 此外，输送机构包括：吸引用于保持接触器（12）的吸引保持部（17），具有形成在前端部的吸引保持部并且能够在垂直方向上可移动地设置的臂（18），以及 用于在垂直方向上摆动和移动臂（18）的臂驱动部分（19）。

    Inspection stage and inspection apparatus having a plurality of Z axes
    10.
    发明授权
    Inspection stage and inspection apparatus having a plurality of Z axes 失效
    具有多个Z轴的检查台和检查装置

    公开(公告)号：US06583614B2

    公开(公告)日：2003-06-24

    申请号：US09880117

    申请日：2001-06-14

    申请人： Kiyoshi Takekoshi

    发明人： Kiyoshi Takekoshi

    IPC分类号： G01R104

    CPC分类号： G01R31/2887

    摘要： An inspection stage including a chuck top, a rectangular Z base, an X stage, a Y stage, and a Z axis elevating mechanism. The chuck top is used for mounting a wafer W. The Z base is provided with the chuck top and is vertically movable. The X stage elevatingly supports the Z base and is movable in an X direction. The Y stage movably supports the X stage in the X direction and is movable in a Y direction. The Z axis elevating mechanism is provided at each of the four corners of the Z base in such a manner as to surround the chuck top.

    摘要翻译： 包括卡盘顶部，矩形Z底座，X台架，Y台架和Z轴升降机构的检查台。 卡盘顶部用于安装晶片W.Z底座设置有卡盘顶部并且是可垂直移动的。 X档升降支撑Z底座，可沿X方向移动。 Y台在X方向上可移动地支撑X台，并且可沿Y方向移动。 Z轴升降机构以围绕卡头顶部的方式设置在Z底座的四个角的每一个处。