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74 条记录 (耗时 0.038 秒)

    Method and apparatus for transferring an article to be processed and processing apparatus
    1.
    发明授权
    Method and apparatus for transferring an article to be processed and processing apparatus 有权
    用于转移待处理物品的处理装置和方法

    公开(公告)号：US07246984B2

    公开(公告)日：2007-07-24

    申请号：US10801007

    申请日：2004-03-16

    申请人： Shogo Sarumaru ,  Hideshi Yamane ,  Katsumi Watanabe ,  Hiroyuki Ueno ,  Hideki Adachi ,  Eiji Fukatsu

    发明人： Shogo Sarumaru ,  Hideshi Yamane ,  Katsumi Watanabe ,  Hiroyuki Ueno ,  Hideki Adachi ,  Eiji Fukatsu

    IPC分类号： H01L21/677

    CPC分类号： H01L21/67751 ,  H01L21/67126 ,  H01L21/68728 ,  H01L21/68735 ,  Y10S414/139

    摘要： A transferring apparatus transfers an article to be processed, which is carried by a carrier device, to a holder provided in a processing chamber defined by a processing vessel and adapted to hold the article at a specified processing position. The transferring apparatus includes a temporarily holding member, and transfers the article from the intermediate position to the processing position after receiving the article carried by the carrier device at an intermediate position distanced from the holder and temporarily holding it. The temporarily holding member is retracted to a position in the outside of the processing vessel after the article is transferred.

    摘要翻译： 传送装置将由承载装置携带的待处理物品传送到设置在由处理容器限定的处理室中的保持器，并适于将物品保持在指定的处理位置。 传送装置包括临时保持构件，并且在远离保持器的中间位置接收由托架装置承载的物品并暂时保持物品后，将物品从中间位置传送到处理位置。 在传送物品之后，临时保持构件缩回到处理容器的外部的位置。

    Substrate processing apparatus, substrate processing method, substrate position correcting apparatus, and substrate position correcting method
    2.
    发明申请
    Substrate processing apparatus, substrate processing method, substrate position correcting apparatus, and substrate position correcting method 失效
    基板处理装置，基板处理方法，基板位置校正装置和基板位置校正方法

    公开(公告)号：US20060102289A1

    公开(公告)日：2006-05-18

    申请号：US11270338

    申请日：2005-10-28

    申请人： Eiji Fukatsu ,  Hiroyuki Yashiki ,  Hideki Adachi ,  Katsuhiko Miya

    发明人： Eiji Fukatsu ,  Hiroyuki Yashiki ,  Hideki Adachi ,  Katsuhiko Miya

    IPC分类号： C23F1/00 ,  H01L21/306

    CPC分类号： H01L21/67259 ,  H01L21/67051 ,  H01L21/68 ,  Y10S414/136

    摘要： A substrate W rotates about the center of rotations A0 of a spin base 3, while supported by plural support pins 5 in such a manner that the substrate W can freely slide and while held owing to the force of friction which develops between the bottom surface of the substrate W and the support pins 5. After a detection sensor 74 detects, while the substrate W rotates, an edge surface position (eccentric position) of the edge surface of the substrate which is the farthest from the center of rotations A0, a press block 71 pushes this edge surface position to a preset position P1 which is away along the horizontal direction from the center of rotations A0 by a distance which is determined in accordance with the radius of the substrate W. This aligns the eccentric position to the preset position P1 and positions the center W0 of the substrate within a predetermined range from the center of rotations A0.

    摘要翻译： 基板W围绕旋转基座3的旋转中心A 0旋转，同时由多个支撑销5支撑，使得基板W能够自由滑动并且由于摩擦力在底面 的基板W和支撑销5。 在检测传感器74检测到基板W旋转之后，离开旋转中心A 0的基板的边缘表面的边缘表面位置（偏心位置）时，压块71将该边缘表面位置推到 预设位置P 1，其从旋转中心A 0沿水平方向离开根据基板W的半径确定的距离。将偏心位置对准预设位置P 1并将中心位置 W 0从旋转中心A 0的预定范围内。

    Substrate position correcting method and apparatus using either substrate radius or center of rotation correction adjustment sum
    3.
    发明授权
    Substrate position correcting method and apparatus using either substrate radius or center of rotation correction adjustment sum 失效
    基板位置校正方法和使用基板半径或旋转中心校正调整和的装置

    公开(公告)号：US07547181B2

    公开(公告)日：2009-06-16

    申请号：US11270338

    申请日：2005-10-28

    申请人： Eiji Fukatsu ,  Hiroyuki Yashiki ,  Hideki Adachi ,  Katsuhiko Miya

    发明人： Eiji Fukatsu ,  Hiroyuki Yashiki ,  Hideki Adachi ,  Katsuhiko Miya

    IPC分类号： H01L21/68 ,  H01L21/677 ,  G05B19/18

    CPC分类号： H01L21/67259 ,  H01L21/67051 ,  H01L21/68 ,  Y10S414/136

    摘要： A substrate W rotates about the center of rotations A0 of a spin base 3, while supported by plural support pins 5 in such a manner that the substrate W can freely slide and while held owing to the force of friction which develops between the bottom surface of the substrate W and the support pins 5. After a detection sensor 74 detects, while the substrate W rotates, an edge surface position (eccentric position) of the edge surface of the substrate which is the farthest from the center of rotations A0, a press block 71 pushes this edge surface position to a preset position P1 which is away along the horizontal direction from the center of rotations A0 by a distance which is determined in accordance with the radius of the substrate W. This aligns the eccentric position to the preset position P1 and positions the center W0 of the substrate within a predetermined range from the center of rotations A0.

    摘要翻译： 衬底W围绕旋转基座3的旋转中心A0旋转，同时由多个支撑销5支撑，使得衬底W可以自由地滑动并且由于摩擦力而保持，该摩擦力在 基板W和支撑销5.检测传感器74检测到基板W旋转时，离开旋转中心A0的基板的边缘表面的边缘表面位置（偏心位置），压力 块71将该边缘表面位置推压到从旋转中心A0沿着水平方向离开根据基板W的半径确定的距离的预设位置P1。将偏心位置对准预设位置 P1，并将基板的中心W0定位在从旋转中心A0的预定范围内。

    Multi-color image forming apparatus
    9.
    发明授权
    Multi-color image forming apparatus 失效
    多色成像装置

    公开(公告)号：US5192977A

    公开(公告)日：1993-03-09

    申请号：US775769

    申请日：1991-10-15

    申请人： Tokuharu Kaneko ,  Miho Nakayama ,  Masanori Miyata ,  Takeshi Honjo ,  Hideki Adachi ,  Toshiya Kanazawa

    发明人： Tokuharu Kaneko ,  Miho Nakayama ,  Masanori Miyata ,  Takeshi Honjo ,  Hideki Adachi ,  Toshiya Kanazawa

    IPC分类号： G03G15/00 ,  G03G15/01

    CPC分类号： G03G15/6582 ,  G03G15/01 ,  G03G15/50 ,  G03G2215/00329 ,  G03G2215/00426 ,  G03G2215/00556 ,  G03G2215/00827 ,  G03G2215/00869 ,  G03G2215/00877

    摘要： An image forming apparatus includes: an original circulation unit for feeding originals placed on an original mounting unit one by one to an exposure site and after the exposure, returning the original to the original mounting unit; a copying unit for copying an original image to a recording sheet through exposure of the original at the exposure site; a first transport unit for feeding the recording sheet to a copy site; a first control unit for performing the original circulation by the original circulation unit for a set number of times to obtain the set number of copies; a second transport unit for feeding a specific sheet for each circulation of the originals; and a second control unit for controlling the first and second transport units to pre-feed the recording sheet and the specific sheet to be next supplied during a copy operation; wherein the second control unit does not perform the pre-feed of the recording sheet and the specific sheet during the first circulation of the originals by the original circulation unit, performs the pre-feed of the recording sheet and controls the first and second transport units to pre-feed the specific sheet, during a copy operation for the second and succeeding circulations of the originals.

    摘要翻译： 图像形成装置包括：原始循环单元，用于将放置在原始安装单元上的原稿一个接一个地馈送到曝光位置，并且在曝光之后，将原稿返回原始安装单元; 复印单元，用于通过在曝光位置曝光原稿将原始图像复制到记录纸张; 用于将记录纸张供给到复印部位的第一传送单元; 第一控制单元，用于执行原始循环单元的原始循环一定次数以获得设定的份数; 用于为原件的每个循环供给特定片材的第二传送单元; 以及第二控制单元，用于控制所述第一和第二传送单元在复印操作期间预先馈送所述记录纸和所述特定纸张以供应; 其中，所述第二控制单元在由所述原始循环单元在所述原稿的首次循环期间不执行所述记录纸和所述特定纸张的预供给，执行所述记录纸张的预进给并且控制所述第一和第二输送单元 在原件的第二次和后续循环的复印操作期间预先给出特定的纸张。