利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

34 条记录 (耗时 0.026 秒)

    Method of detecting an end point of plasma treatment
    1.
    发明授权
    Method of detecting an end point of plasma treatment 失效
    检测等离子体处理终点的方法

    公开(公告)号：US4936967A

    公开(公告)日：1990-06-26

    申请号：US368

    申请日：1987-01-05

    申请人： Shoji Ikuhara ,  Keiji Tada ,  Yoshinao Kawasaki ,  Katsuyoshi Kudo ,  Minoru Soraoka

    发明人： Shoji Ikuhara ,  Keiji Tada ,  Yoshinao Kawasaki ,  Katsuyoshi Kudo ,  Minoru Soraoka

    IPC分类号： H01J37/32

    CPC分类号： H01J37/32935

    摘要： The present invention relates to a method of and apparatus for detecting an end point of plasma treatment of a specimen. There is included selecting plasma spectrum having a characteristic wavelength from the plasma spectrum generating at the time of reaction in the plasma treatment of a specimen, setting a disregarding time for the plasma treatment end point detection, assuming, at the stage when the disregarding time for treatment end point detection has elapsed, a quantity of the selected plasma spectrum up to the time of said stage based on a quantity of same plasma spectrum at the time of said stage and a variation with the time in the last said quantity of plasma spectrum, and detecting the reaction time end point from the assumed quantity of plasma spectrum and an actual quantity of the same plasma spectrum after the time of said stage thereby making it possible to prevent erroneous detection of the end point of reaction in the plasma treatment and detect accurately the same even when the reaction time of the plasma treatment is short.

    摘要翻译： 本发明涉及一种用于检测样品的等离子体处理终点的方法和装置。 包括从在等离子体处理终点检测中设定无视等待时间的等离子体处理终点检测时，从等离子体处理中检测到的反应时产生的等离子体光谱中选出具有特征波长的等离子体光谱，假设在不考虑时间的情况下， 处理终点检测已经过去，基于所述阶段时相同等离子体光谱的量和所述最后所述等离子体光谱中的时间的变化，所选择的等离子体谱的数量直到所述阶段的时间， 并且从所述阶段的时间之后的等离子体谱的假定量和相同等离子体光谱的实际量检测反应时间终点，从而可以防止在等离子体处理中的反应结束点的错误检测并准确检测 即使当等离子体处理的反应时间短时也是如此。