公开(公告)号：US06300481B1

公开(公告)日：2001-10-09

申请号：US09380828

申请日：1999-09-10

申请人： Shozo Yanagida ,  Yasuchika Hasegawa ,  Yuji Wada ,  Tatsuhiko Yamanaka ,  Takashi Okubo

发明人： Shozo Yanagida ,  Yasuchika Hasegawa ,  Yuji Wada ,  Tatsuhiko Yamanaka ,  Takashi Okubo

IPC分类号： C07F500

CPC分类号： C07C309/06 ,  C07C311/48

摘要： The present invention provides an optically functional material comprising a rare-earth complex represented by the formula (I) wherein M is a rare-earth atom, n1 is 2 or 3, n2 is 2, 3 or 4, R is a C1-C20 group containing no H, X is a Group IVA atom, Group VA atom other than nitrogen or Group VIA atom other than oxygen, n3 is 0 or 1, and Y is C-Z′ (wherein Z′ is D, a halogen or C1-C20 group containing no H), N, P, As, Sb or Bi, or by the formula (II) wherein N, R, X, n1, n2 and n3 are as defined above.

摘要翻译： 本发明提供一种光学功能材料，其包括由式（I）表示的稀土配合物，其中M为稀土原子，n1为2或3，n2为2,3或4，R为C1-C20 不含H的基团，X是除了氧以外的氮或VIA族的IVA族原子，VA族原子，n3为0或1，Y为CZ'（其中Z'为D，卤素或C1-C20 不含H），N，P，As，Sb或Bi的化合物，或其中N，R，X，n1，n2和n3如上定义的式（II）。

公开(公告)号：US07521702B2

公开(公告)日：2009-04-21

申请号：US10550800

申请日：2003-12-26

申请人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Hiroyuki Furukawa ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

发明人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Hiroyuki Furukawa ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

IPC分类号： G03F7/20 ,  H05G2/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033

摘要： An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy metal or heavy-metal compound and having a density 0.5 to 80% that of the crystal density is used. When the target is irradiated with a laser beam, plasma of the heavy metal contained in the target is generated, and extreme ultraviolet light having a predetermined wavelength which corresponds to the kind of the heavy metal is emitted from the plasma. When the density of the target is made to be smaller than the crystal density as described above, space distribution of the density of the generated plasma can be controlled, and the region in which plasma absorbs energy of the laser beam overlaps the region in which the plasma emits the extreme ultraviolet light. Thus, emission efficiency can be improved, preventing energy loss. For example, in a case where the SnO2 target having a density 24% of the crystal density is used, the emission efficiency at around 13.5 nm wavelength is higher than in the case where a Sn crystal target is used.

摘要翻译： 本发明的目的是提供一种能够发射具有高发射效率的极紫外光的极紫外光源靶。 使用由重金属或重金属化合物制成的具有密度为晶体密度的0.5〜80％的固体靶。 当用激光束照射靶时，产生包含在靶中的重金属的等离子体，并且从等离子体发射具有对应于重金属的种类的预定波长的极紫外光。 当如上所述使靶的密度小于晶体密度时，可以控制产生的等离子体的密度的空间分布，并且等离子体吸收激光束的能量的区域与 等离子体发出极紫外光。 因此，可以提高排放效率，防止能量损失。 例如，在使用密度为结晶密度的24％的SnO 2靶的情况下，波长13.5nm左右的发光效率高于使用Sn晶体靶的情况。

公开(公告)号：US06676264B1

公开(公告)日：2004-01-13

申请号：US10224385

申请日：2002-08-21

申请人： Kunioki Mima ,  Ryosuke Kodama ,  Tatsuhiko Yamanaka ,  Yoneyoshi Kitagawa ,  Kazuo Tanaka ,  Yasuhiko Sentoku

发明人： Kunioki Mima ,  Ryosuke Kodama ,  Tatsuhiko Yamanaka ,  Yoneyoshi Kitagawa ,  Kazuo Tanaka ,  Yasuhiko Sentoku

IPC分类号： G02B510

CPC分类号： G02B27/0994 ,  G02B6/10 ,  G02B19/0019 ,  G02B19/0023 ,  G02B19/0033

摘要： A hollow tube having a pair of openings which have their respective different diameters and are opposed each other is prepared. Then, a pulsed laser beam is introduced into the hollow tube from the larger opening thereof and then, reflected multiply on the inner wall surface of the hollow tube. The introduced pulsed laser beam is focused during the traveling for the smaller opening of the hollow tube to generate a focused laser beam. The thus obtained focused laser beam is output from the smaller opening of the hollow tube.

摘要翻译： 准备具有一对开口的具有各自不同直径并彼此相对的中空管。 然后，从其较大的开口将脉冲激光束引入中空管，然后在中空管的内壁表面上反射。 引入的脉冲激光束在行进过程中聚焦于中空管的较小开口以产生聚焦的激光束。 由此获得的聚焦激光束从中空管的较小开口输出。

公开(公告)号：US20060133574A1

公开(公告)日：2006-06-22

申请号：US10550800

申请日：2003-12-26

申请人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

发明人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

IPC分类号： G21K5/00 ,  H05G2/00 ,  G21G4/00 ,  H01J35/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033

摘要： An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy metal or heavy-metal compound and having a density 0.5 to 80% that of the crystal density is used. When the target is irradiated with a laser beam, plasma of the heavy metal contained in the target is generated, and extreme ultraviolet light having a predetermined wavelength which corresponds to the kind of the heavy metal is emitted from the plasma. When the density of the target is made to be smaller than the crystal density as described above, space distribution of the density of the generated plasma can be controlled, and the region in which plasma absorbs energy of the laser beam overlaps the region in which the plasma emits the extreme ultraviolet light. Thus, emission efficiency can be improved, preventing energy loss. For example, in a case where the SnO2 target having a density 24% of the crystal density is used, the emission efficiency at around 13.5 nm wavelength is higher than in the case where a Sn crystal target is used.

摘要翻译： 本发明的目的是提供一种能够发射具有高发射效率的极紫外光的极紫外光源靶。 使用由重金属或重金属化合物制成的具有密度为晶体密度的0.5〜80％的固体靶。 当用激光束照射靶时，产生包含在靶中的重金属的等离子体，并且从等离子体发射具有对应于重金属的种类的预定波长的极紫外光。 当如上所述使靶的密度小于晶体密度时，可以控制产生的等离子体的密度的空间分布，并且等离子体吸收激光束的能量的区域与其中的 等离子体发出极紫外光。 因此，可以提高排放效率，防止能量损失。 例如，在使用具有密度为结晶密度的24％的SnO 2 N靶的情况下，波长13.5nm左右的发光效率高于Sn晶体靶为 用过的。