公开(公告)号：US20060133574A1

公开(公告)日：2006-06-22

申请号：US10550800

申请日：2003-12-26

申请人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

发明人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

IPC分类号： G21K5/00 ,  H05G2/00 ,  G21G4/00 ,  H01J35/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033

摘要： An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy metal or heavy-metal compound and having a density 0.5 to 80% that of the crystal density is used. When the target is irradiated with a laser beam, plasma of the heavy metal contained in the target is generated, and extreme ultraviolet light having a predetermined wavelength which corresponds to the kind of the heavy metal is emitted from the plasma. When the density of the target is made to be smaller than the crystal density as described above, space distribution of the density of the generated plasma can be controlled, and the region in which plasma absorbs energy of the laser beam overlaps the region in which the plasma emits the extreme ultraviolet light. Thus, emission efficiency can be improved, preventing energy loss. For example, in a case where the SnO2 target having a density 24% of the crystal density is used, the emission efficiency at around 13.5 nm wavelength is higher than in the case where a Sn crystal target is used.

摘要翻译： 本发明的目的是提供一种能够发射具有高发射效率的极紫外光的极紫外光源靶。 使用由重金属或重金属化合物制成的具有密度为晶体密度的0.5〜80％的固体靶。 当用激光束照射靶时，产生包含在靶中的重金属的等离子体，并且从等离子体发射具有对应于重金属的种类的预定波长的极紫外光。 当如上所述使靶的密度小于晶体密度时，可以控制产生的等离子体的密度的空间分布，并且等离子体吸收激光束的能量的区域与其中的 等离子体发出极紫外光。 因此，可以提高排放效率，防止能量损失。 例如，在使用具有密度为结晶密度的24％的SnO 2 N靶的情况下，波长13.5nm左右的发光效率高于Sn晶体靶为 用过的。

公开(公告)号：US07521702B2

公开(公告)日：2009-04-21

申请号：US10550800

申请日：2003-12-26

申请人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Hiroyuki Furukawa ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

发明人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Hiroyuki Furukawa ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

IPC分类号： G03F7/20 ,  H05G2/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033

摘要： An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy metal or heavy-metal compound and having a density 0.5 to 80% that of the crystal density is used. When the target is irradiated with a laser beam, plasma of the heavy metal contained in the target is generated, and extreme ultraviolet light having a predetermined wavelength which corresponds to the kind of the heavy metal is emitted from the plasma. When the density of the target is made to be smaller than the crystal density as described above, space distribution of the density of the generated plasma can be controlled, and the region in which plasma absorbs energy of the laser beam overlaps the region in which the plasma emits the extreme ultraviolet light. Thus, emission efficiency can be improved, preventing energy loss. For example, in a case where the SnO2 target having a density 24% of the crystal density is used, the emission efficiency at around 13.5 nm wavelength is higher than in the case where a Sn crystal target is used.

摘要翻译： 本发明的目的是提供一种能够发射具有高发射效率的极紫外光的极紫外光源靶。 使用由重金属或重金属化合物制成的具有密度为晶体密度的0.5〜80％的固体靶。 当用激光束照射靶时，产生包含在靶中的重金属的等离子体，并且从等离子体发射具有对应于重金属的种类的预定波长的极紫外光。 当如上所述使靶的密度小于晶体密度时，可以控制产生的等离子体的密度的空间分布，并且等离子体吸收激光束的能量的区域与 等离子体发出极紫外光。 因此，可以提高排放效率，防止能量损失。 例如，在使用密度为结晶密度的24％的SnO 2靶的情况下，波长13.5nm左右的发光效率高于使用Sn晶体靶的情况。

公开(公告)号：US20080157011A1

公开(公告)日：2008-07-03

申请号：US11792923

申请日：2005-08-29

申请人： Keiji Nagai ,  Qincui Gu ,  Takayoshi Norimatsu ,  Shinsuke Fujioka ,  Hiroaki Nishimura ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Yasukazu Izawa

发明人： Keiji Nagai ,  Qincui Gu ,  Takayoshi Norimatsu ,  Shinsuke Fujioka ,  Hiroaki Nishimura ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Yasukazu Izawa

IPC分类号： G21G4/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/7095 ,  H01J2235/087 ,  H05G2/003 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

摘要： The present invention is made to provide an extreme ultraviolet light source target or an X-ray source target having a good operationality. An extreme ultraviolet light source target in accordance with an aspect of the present invention is obtained by including a heavy metal such as tin into a matrix made of a polymeric material such as hydroxylpropylcellulose (HPC). The target can be manufactured by mixing the heavy metal and the polymeric material with a solvent, and evaporating the solvent. Since the target uses the polymeric material as a matrix, the target can be easily deformed to have a desired shape. For this reason, the target can be easily attached to a target holder irrespective of the shape of the holder, resulting in a good operationality of the target. Furthermore, an emission efficiency can be improved by including the heavy metal at a low density.

摘要翻译： 本发明提供一种具有良好操作性的极紫外光源靶或X射线源靶。 根据本发明的一个方面的极紫外光源目标是通过将诸如锡的重金属包括在由诸如羟丙基纤维素（HPC）的聚合材料制成的基质中而获得的。 可以通过将重金属和聚合物材料与溶剂混合并蒸发溶剂来制造目标物。 由于目标使用聚合物材料作为基质，因此靶容易变形以具有所需的形状。 为此，目标可以容易地附着到目标支架上，而不管支架的形状如何，导致目标的良好操作性。 此外，通过以低密度包含重金属可以提高排放效率。

公开(公告)号：US07885387B2

公开(公告)日：2011-02-08

申请号：US11792923

申请日：2005-08-29

申请人： Keiji Nagai ,  Qincui Gu ,  Takayoshi Norimatsu ,  Shinsuke Fujioka ,  Hiroaki Nishimura ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Yasukazu Izawa

发明人： Keiji Nagai ,  Qincui Gu ,  Takayoshi Norimatsu ,  Shinsuke Fujioka ,  Hiroaki Nishimura ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Yasukazu Izawa

IPC分类号： H05G2/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/7095 ,  H01J2235/087 ,  H05G2/003 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

摘要： The present invention is made to provide an extreme ultraviolet light source target or an X-ray source target having a good operationality. An extreme ultraviolet light source target in accordance with an aspect of the present invention is obtained by including a heavy metal such as tin into a matrix made of a polymeric material such as hydroxylpropylcellulose (HPC). The target can be manufactured by mixing the heavy metal and the polymeric material with a solvent, and evaporating the solvent. Since the target uses the polymeric material as a matrix, the target can be easily deformed to have a desired shape. For this reason, the target can be easily attached to a target holder irrespective of the shape of the holder, resulting in a good operationality of the target. Furthermore, an emission efficiency can be improved by including the heavy metal at a low density.

摘要翻译： 本发明提供一种具有良好操作性的极紫外光源靶或X射线源靶。 根据本发明的一个方面的极紫外光源目标是通过将诸如锡的重金属包括在由诸如羟丙基纤维素（HPC）的聚合材料制成的基质中而获得的。 可以通过将重金属和聚合物材料与溶剂混合并蒸发溶剂来制造目标物。 由于目标使用聚合物材料作为基质，因此靶容易变形以具有所需的形状。 为此，目标可以容易地附着到目标支架上，而不管支架的形状如何，导致目标的良好操作性。 此外，通过以低密度包含重金属可以提高排放效率。

公开(公告)号：US07653100B2

公开(公告)日：2010-01-26

申请号：US11663960

申请日：2005-11-24

申请人： Yasukazu Izawa ,  Masayuki Fujita ,  Shigeki Tokita ,  Tadashi Ikegawa ,  Toshiyuki Kawashima ,  Hirofumi Kan

发明人： Yasukazu Izawa ,  Masayuki Fujita ,  Shigeki Tokita ,  Tadashi Ikegawa ,  Toshiyuki Kawashima ,  Hirofumi Kan

IPC分类号： H01S3/04

CPC分类号： H01S3/0604 ,  H01S3/025 ,  H01S3/027 ,  H01S3/0405 ,  H01S3/042 ,  H01S3/08072 ,  H01S3/0816 ,  H01S3/09415 ,  H01S3/2308 ,  H01S3/235

摘要： The present invention relates to a solid-state laser module, and so on, having a structure for enabling optical output of high quality to be obtained. The solid-state laser module includes a vacuum container with windows, and a heat sink, a solid-state laser medium, and a pair of transparent members are housed in the vacuum container in an integrally assembled state. The solid-state laser medium and the pair of transparent members respectively have disk shapes, and the pair of transparent members sandwich the solid-state laser medium. The thermal conductivity of each of the pair of transparent members is higher than the thermal conductivity of the solid-state laser medium. The heat sink has a shape that simultaneously clamps portions of the pair of transparent members that sandwich the solid-state laser medium in between, and a heat insulating region, with a thermal conductivity that is lower than the thermal conductivity of the solid-state laser medium, is provided between the heat sink and the solid-state laser medium.

摘要翻译： 本发明涉及具有能够获得高质量的光输出的结构的固态激光器模块等。 固体激光器模块包括具有窗口的真空容器，并且散热器，固态激光介质和一对透明构件以整体组装的状态容纳在真空容器中。 固体激光介质和一对透明构件分别具有圆盘形状，并且一对透明构件夹着固态激光介质。 一对透明构件中的每一个的热导率高于固态激光介质的热导率。 散热器具有同时夹持固定状态的激光介质的一对透明构件的一部分与隔热区域的热传导率低于固体激光器的热导率的形状 介质，设置在散热器和固态激光介质之间。

公开(公告)号：US5587793A

公开(公告)日：1996-12-24

申请号：US470157

申请日：1995-06-06

申请人： Sadao Nakai ,  Yasukazu Izawa ,  Masanobu Yamanaka ,  Masato Ohmi ,  Masanori Akatsuka ,  Chiyoe Yamanaka ,  Yoshiyuki Yonezawa

发明人： Sadao Nakai ,  Yasukazu Izawa ,  Masanobu Yamanaka ,  Masato Ohmi ,  Masanori Akatsuka ,  Chiyoe Yamanaka ,  Yoshiyuki Yonezawa

IPC分类号： G01J4/04 ,  G01N21/23 ,  H01S3/00 ,  H01S3/05 ,  H01S3/08

CPC分类号： G01N21/23 ,  H01S3/08072

摘要： A sample is placed between a circular polarizer and an analyzer in an optical path between a monochromatic light source and a two-dimensional optical receiver. Parallel beams emitted from the monochromatic light source are converted into circularly polarized light by the circular polarizer. After transmitting the sample, the light is guided to the analyzer. While rotating the analyzer about the axis of the beams, image data are detected by optical receiver at a step of a regular rotation angle, and the detected image data are sampled to be sent to an image processing device in the next stage. On the basis of the image data, an operation is conducted on each pixel to obtain a relative phase difference due to birefringence of the sample, the two-dimensional birefringence distribution including the sign of the relative phase difference, and also the principal axis direction.

摘要翻译： 将样品放置在单色光源和二维光接收器之间的光路中的圆偏振器和分析器之间。 从单色光源发射的平行光束通过圆偏振器转换为圆偏振光。 发送样品后，将光引导至分析仪。 在围绕光束的轴线旋转分析器的同时，以规则的旋转角度的步骤，通过光学接收器检测图像数据，并且对所检测的图像数据进行采样以在下一阶段中发送到图像处理装置。 基于图像数据，对每个像素执行操作以获得由于样品的双折射，包括相对相位差的符号的二维双折射分布以及主轴方向的相对相位差。

公开(公告)号：US5872804A

公开(公告)日：1999-02-16

申请号：US895923

申请日：1997-07-17

申请人： Hirofumi Kan ,  Yasukazu Izawa ,  Masanobu Yamanaka ,  Hiromitsu Kiriyama ,  Takuji Yoshida ,  Sadao Nakai ,  Chiyoe Yamanaka

发明人： Hirofumi Kan ,  Yasukazu Izawa ,  Masanobu Yamanaka ,  Hiromitsu Kiriyama ,  Takuji Yoshida ,  Sadao Nakai ,  Chiyoe Yamanaka

IPC分类号： H01S3/06 ,  H01S3/08 ,  H01S3/10 ,  H01S3/23 ,  H01S3/081

CPC分类号： H01S3/235 ,  H01S3/0606 ,  H01S3/07 ,  H01S3/08072 ,  H01S3/08095

摘要： A passive eight-pass solid-state laser amplifier is constructed using a quarter-wave plate (11), a total reflection mirror (12), a polarization beam splitter (5), and a total reflection mirror (6) while input/output faces of a hexagonal zigzag slab solid-state laser medium (15) optically pumped are kept nearly perpendicular to pulsed laser light. Thermal birefringence takes place in the laser medium (15) optically pumped with good symmetry by flash lamps or LDs (9) and is compensated for by a quartz 90.degree. rotator (10). Linearly s-polarized laser light reflected by a polarization beam splitter (3) is output as pulsed laser output light (13) to the outside. Owing to this, saturation laser amplification can be achieved using output laser light from a pulsed laser oscillator of relatively low output, as source light.

摘要翻译： 使用四分之一波片（11），全反射镜（12），偏振分束器（5）和全反射镜（6）构成无源八通道固体激光放大器，同时输入/输出 光泵浦的六角形之字形固态激光介质（15）的面保持与脉冲激光几乎垂直。 热激光双折射发生在用闪光灯或LD（9）以良好对称性光泵浦的激光介质（15）中，并由石英90°旋转器（10）补偿。 由偏振分束器（3）反射的线性s偏振激光被作为脉冲激光输出光（13）输出到外部。 由此，可以使用来自相对低输出的脉冲激光振荡器的输出激光作为源光来实现饱和激光放大。

公开(公告)号：US20080089372A1

公开(公告)日：2008-04-17

申请号：US11663960

申请日：2005-11-24

申请人： Yasukazu Izawa ,  Masayuki Fujita ,  Shigeki Tokita ,  Tadashi Ikegawa ,  Toshiyuki Kawashima ,  Hirofumi Kan

发明人： Yasukazu Izawa ,  Masayuki Fujita ,  Shigeki Tokita ,  Tadashi Ikegawa ,  Toshiyuki Kawashima ,  Hirofumi Kan

IPC分类号： H01S3/042 ,  H01S3/093

CPC分类号： H01S3/0604 ,  H01S3/025 ,  H01S3/027 ,  H01S3/0405 ,  H01S3/042 ,  H01S3/08072 ,  H01S3/0816 ,  H01S3/09415 ,  H01S3/2308 ,  H01S3/235

摘要： A solid laser module etc. having a structure that enables to obtain a high-quality light output. The solid laser module has a vacuum container with a window, and a heat sink, a solid laser medium, and a pair of transparent members are received in an integrally assembled state in the container. The solid laser medium and the pair of transparent members are each formed in a disc shape, and the solid laser medium is sandwiched between the pair of transparent members. The thermal conductivity of each of the pair of transparent members is higher than the thermal conductivity of the solid laser medium. The heat sink is shaped to simultaneously hold portions of the pair of transparent members that hold the solid laser medium in between. A heat insulation region having a lower thermal conductivity than the solid laser medium is provided between the heat sink and the solid laser medium.

摘要翻译： 具有能够获得高质量光输出的结构的固体激光器模块等。 固体激光模块具有带有窗口的真空容器，并且散热器，固体激光介质和一对透明构件以整体组装状态容纳在容器中。 固体激光介质和一对透明构件各自形成为盘状，并且固体激光介质夹在该对透明构件之间。 一对透明构件中的每一个的热导率高于固体激光介质的热导率。 散热器被成形为同时保持将固体激光介质保持在其间的一对透明构件的部分。 在散热器和固体激光介质之间设置具有比固体激光介质低的热导率的隔热区域。

公开(公告)号：US20050232318A1

公开(公告)日：2005-10-20

申请号：US11037465

申请日：2005-01-19

申请人： Junji Kawanaka ,  Masayuki Fujita ,  Yasukazu Izawa

发明人： Junji Kawanaka ,  Masayuki Fujita ,  Yasukazu Izawa

IPC分类号： H01S3/10 ,  H01S3/04 ,  H01S3/042 ,  H01S3/094 ,  H01S3/0941 ,  H01S3/16

CPC分类号： H01S3/09415 ,  H01S3/042 ,  H01S3/094053 ,  H01S3/1618 ,  H01S3/1643

摘要： A method and an apparatus capable of efficient laser amplification by cooling a semiconductor laser pumped, ytterbium doped YAG crystal to a temperature between 8 K and 230 K.

摘要翻译： 一种能够通过将半导体激光泵浦镱掺杂的YAG晶体冷却至8K和230K之间的温度来实现高效激光放大的方法和装置。