公开(公告)号：US07521702B2

公开(公告)日：2009-04-21

申请号：US10550800

申请日：2003-12-26

申请人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Hiroyuki Furukawa ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

发明人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Hiroyuki Furukawa ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

IPC分类号： G03F7/20 ,  H05G2/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033

摘要： An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy metal or heavy-metal compound and having a density 0.5 to 80% that of the crystal density is used. When the target is irradiated with a laser beam, plasma of the heavy metal contained in the target is generated, and extreme ultraviolet light having a predetermined wavelength which corresponds to the kind of the heavy metal is emitted from the plasma. When the density of the target is made to be smaller than the crystal density as described above, space distribution of the density of the generated plasma can be controlled, and the region in which plasma absorbs energy of the laser beam overlaps the region in which the plasma emits the extreme ultraviolet light. Thus, emission efficiency can be improved, preventing energy loss. For example, in a case where the SnO2 target having a density 24% of the crystal density is used, the emission efficiency at around 13.5 nm wavelength is higher than in the case where a Sn crystal target is used.

摘要翻译： 本发明的目的是提供一种能够发射具有高发射效率的极紫外光的极紫外光源靶。 使用由重金属或重金属化合物制成的具有密度为晶体密度的0.5〜80％的固体靶。 当用激光束照射靶时，产生包含在靶中的重金属的等离子体，并且从等离子体发射具有对应于重金属的种类的预定波长的极紫外光。 当如上所述使靶的密度小于晶体密度时，可以控制产生的等离子体的密度的空间分布，并且等离子体吸收激光束的能量的区域与 等离子体发出极紫外光。 因此，可以提高排放效率，防止能量损失。 例如，在使用密度为结晶密度的24％的SnO 2靶的情况下，波长13.5nm左右的发光效率高于使用Sn晶体靶的情况。

公开(公告)号：US20060133574A1

公开(公告)日：2006-06-22

申请号：US10550800

申请日：2003-12-26

申请人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

发明人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

IPC分类号： G21K5/00 ,  H05G2/00 ,  G21G4/00 ,  H01J35/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033

摘要： An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy metal or heavy-metal compound and having a density 0.5 to 80% that of the crystal density is used. When the target is irradiated with a laser beam, plasma of the heavy metal contained in the target is generated, and extreme ultraviolet light having a predetermined wavelength which corresponds to the kind of the heavy metal is emitted from the plasma. When the density of the target is made to be smaller than the crystal density as described above, space distribution of the density of the generated plasma can be controlled, and the region in which plasma absorbs energy of the laser beam overlaps the region in which the plasma emits the extreme ultraviolet light. Thus, emission efficiency can be improved, preventing energy loss. For example, in a case where the SnO2 target having a density 24% of the crystal density is used, the emission efficiency at around 13.5 nm wavelength is higher than in the case where a Sn crystal target is used.

摘要翻译： 本发明的目的是提供一种能够发射具有高发射效率的极紫外光的极紫外光源靶。 使用由重金属或重金属化合物制成的具有密度为晶体密度的0.5〜80％的固体靶。 当用激光束照射靶时，产生包含在靶中的重金属的等离子体，并且从等离子体发射具有对应于重金属的种类的预定波长的极紫外光。 当如上所述使靶的密度小于晶体密度时，可以控制产生的等离子体的密度的空间分布，并且等离子体吸收激光束的能量的区域与其中的 等离子体发出极紫外光。 因此，可以提高排放效率，防止能量损失。 例如，在使用具有密度为结晶密度的24％的SnO 2 N靶的情况下，波长13.5nm左右的发光效率高于Sn晶体靶为 用过的。

公开(公告)号：US20080157011A1

公开(公告)日：2008-07-03

申请号：US11792923

申请日：2005-08-29

申请人： Keiji Nagai ,  Qincui Gu ,  Takayoshi Norimatsu ,  Shinsuke Fujioka ,  Hiroaki Nishimura ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Yasukazu Izawa

发明人： Keiji Nagai ,  Qincui Gu ,  Takayoshi Norimatsu ,  Shinsuke Fujioka ,  Hiroaki Nishimura ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Yasukazu Izawa

IPC分类号： G21G4/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/7095 ,  H01J2235/087 ,  H05G2/003 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

摘要： The present invention is made to provide an extreme ultraviolet light source target or an X-ray source target having a good operationality. An extreme ultraviolet light source target in accordance with an aspect of the present invention is obtained by including a heavy metal such as tin into a matrix made of a polymeric material such as hydroxylpropylcellulose (HPC). The target can be manufactured by mixing the heavy metal and the polymeric material with a solvent, and evaporating the solvent. Since the target uses the polymeric material as a matrix, the target can be easily deformed to have a desired shape. For this reason, the target can be easily attached to a target holder irrespective of the shape of the holder, resulting in a good operationality of the target. Furthermore, an emission efficiency can be improved by including the heavy metal at a low density.

摘要翻译： 本发明提供一种具有良好操作性的极紫外光源靶或X射线源靶。 根据本发明的一个方面的极紫外光源目标是通过将诸如锡的重金属包括在由诸如羟丙基纤维素（HPC）的聚合材料制成的基质中而获得的。 可以通过将重金属和聚合物材料与溶剂混合并蒸发溶剂来制造目标物。 由于目标使用聚合物材料作为基质，因此靶容易变形以具有所需的形状。 为此，目标可以容易地附着到目标支架上，而不管支架的形状如何，导致目标的良好操作性。 此外，通过以低密度包含重金属可以提高排放效率。

公开(公告)号：US07885387B2

公开(公告)日：2011-02-08

申请号：US11792923

申请日：2005-08-29

申请人： Keiji Nagai ,  Qincui Gu ,  Takayoshi Norimatsu ,  Shinsuke Fujioka ,  Hiroaki Nishimura ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Yasukazu Izawa

发明人： Keiji Nagai ,  Qincui Gu ,  Takayoshi Norimatsu ,  Shinsuke Fujioka ,  Hiroaki Nishimura ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Yasukazu Izawa

IPC分类号： H05G2/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/7095 ,  H01J2235/087 ,  H05G2/003 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

摘要： The present invention is made to provide an extreme ultraviolet light source target or an X-ray source target having a good operationality. An extreme ultraviolet light source target in accordance with an aspect of the present invention is obtained by including a heavy metal such as tin into a matrix made of a polymeric material such as hydroxylpropylcellulose (HPC). The target can be manufactured by mixing the heavy metal and the polymeric material with a solvent, and evaporating the solvent. Since the target uses the polymeric material as a matrix, the target can be easily deformed to have a desired shape. For this reason, the target can be easily attached to a target holder irrespective of the shape of the holder, resulting in a good operationality of the target. Furthermore, an emission efficiency can be improved by including the heavy metal at a low density.

摘要翻译： 本发明提供一种具有良好操作性的极紫外光源靶或X射线源靶。 根据本发明的一个方面的极紫外光源目标是通过将诸如锡的重金属包括在由诸如羟丙基纤维素（HPC）的聚合材料制成的基质中而获得的。 可以通过将重金属和聚合物材料与溶剂混合并蒸发溶剂来制造目标物。 由于目标使用聚合物材料作为基质，因此靶容易变形以具有所需的形状。 为此，目标可以容易地附着到目标支架上，而不管支架的形状如何，导致目标的良好操作性。 此外，通过以低密度包含重金属可以提高排放效率。

公开(公告)号：US20080126228A1

公开(公告)日：2008-05-29

申请号：US11944913

申请日：2007-11-26

申请人： Keiji Nagai ,  Yutaka Nakamura ,  Koji Dan ,  Masato Takahashi ,  Yuuki Inoue ,  Fujio Takahashi ,  Yoshiaki Murata

发明人： Keiji Nagai ,  Yutaka Nakamura ,  Koji Dan ,  Masato Takahashi ,  Yuuki Inoue ,  Fujio Takahashi ,  Yoshiaki Murata

IPC分类号： G06Q10/00

CPC分类号： G06Q10/00 ,  G06Q10/06 ,  G06Q10/08 ,  G06Q10/087 ,  G06Q10/0875 ,  G06Q20/20 ,  G06Q20/202 ,  G06Q20/203 ,  G06Q30/02 ,  G06Q30/06 ,  G07G1/14

摘要： An order supporting apparatus connected to a monitoring apparatus over a network, the monitoring apparatus determining a supply status of devices in the network and sends supply shortage information regarding at least one of the devices determined to have a supply shortage to the order supporting apparatus. In particular, the order supporting apparatus includes a device information storage part that stores device information describing whether each device is monitored as a monitoring target, and maintenance contract information of each device, and a determination part that determines, based on the device information, whether each device is subject to the maintenance contract when the order supporting apparatus receives the supply shortage information. Further, the determination part deselects, in the device information, a device as the monitoring target when the device is determined to have a supply shortage by the monitoring apparatus.

摘要翻译： 一种通过网络连接到监视装置的订单支持装置，所述监视装置确定网络中的设备的供应状态，并且发送关于被确定为具有供应不足的订单支持设备的至少一个设备的供应不足信息。 特别地，订单支持装置包括：设备信息存储部，其存储描述每个设备是否被监视作为监控对象的设备信息;以及每个设备的维护合同信息;以及确定部，其基于设备信息来确定是否 当订单支持设备接收到供应不足信息时，每个设备都受到维护合同的约束。 此外，当确定装置被确定为具有监视装置的供应不足时，确定部件在装置信息中取消选择作为监视对象的装置。

公开(公告)号：US20110134481A1

公开(公告)日：2011-06-09

申请号：US13028263

申请日：2011-02-16

申请人： Keiji Nagai ,  Yutaka Nakamura ,  Koji Dan ,  Masato Takahashi ,  Yuuki Inoue ,  Shogo Hyakutake ,  Fujio Takahashi ,  Yoshiaki Murata ,  Kenichi Takeda

发明人： Keiji Nagai ,  Yutaka Nakamura ,  Koji Dan ,  Masato Takahashi ,  Yuuki Inoue ,  Shogo Hyakutake ,  Fujio Takahashi ,  Yoshiaki Murata ,  Kenichi Takeda

IPC分类号： G06F3/14

CPC分类号： G03G15/55 ,  G03G15/5079 ,  G03G15/553 ,  G03G2215/00109

摘要： A disclosed information processing apparatus includes an information processing unit configured to operate as a daemon process; an information displaying unit configured to operate as a process different from the daemon process and display a screen relevant to the information processing unit; a first ending unit configured to end the information displaying unit due to a first factor; and a second ending unit configured to end the information displaying unit due to a second factor different from the first factor. The information displaying unit ends the information processing unit in the event of receiving a request to end from the first ending unit and the information displaying unit does not end the information processing unit in the event of receiving a request to end from the second ending unit.

摘要翻译： 公开的信息处理设备包括：信息处理单元，被配置为作为守护进程操作; 信息显示单元，被配置为作为与所述守护进程不同的处理进行操作，并且显示与所述信息处理单元相关的屏幕; 第一结束单元，被配置为由于第一因素而结束信息显示单元; 以及第二结束单元，被配置为由于与第一因素不同的第二因素而结束信息显示单元。 信息显示单元在从第一结束单元接收到结束的请求的情况下结束信息处理单元，并且在从第二结束单元接收到结束的请求的情况下，信息显示单元不结束信息处理单元。

公开(公告)号：US20080140646A1

公开(公告)日：2008-06-12

申请号：US11946482

申请日：2007-11-28

申请人： Yuuki Inoue ,  Keiji Nagai ,  Yutaka Nakamura ,  Koji Dan ,  Masato Takahashi ,  Shogo Hyakutake ,  Fujio Takahashi ,  Yoshiaki Murata

发明人： Yuuki Inoue ,  Keiji Nagai ,  Yutaka Nakamura ,  Koji Dan ,  Masato Takahashi ,  Shogo Hyakutake ,  Fujio Takahashi ,  Yoshiaki Murata

IPC分类号： G06F17/30 ,  G06F15/173

CPC分类号： H04L43/0817 ,  G06Q30/0601 ,  G06Q30/0603 ,  G06Q30/0641 ,  H04L41/0213 ,  H04L41/12 ,  H04L67/125

摘要： In a disclosed order support system, devices connected to a communication network are searched for and device information is acquired from each of the found devices. Specified information used for extracting devices to be monitor target candidates is obtained, which is specified according to a predetermined attribute in the device information. Based on the obtained information, devices to be monitor target candidates are extracted from among the found devices. A list of the extracted devices is displayed, and devices to be monitor targets are selected. Status information of a consumable element in each monitor target device is acquired and sent to an order-support apparatus. The order-support apparatus creates an e-mail including a URL of a website used for ordering the consumable element detected as being deficient according to the received status information, and sends the e-mail to an e-mail address associated with the device with the deficient consumable element.

摘要翻译： 在公开的订单支持系统中，搜索连接到通信网络的设备，并从每个找到的设备获取设备信息。 获取用于提取作为监视目标候选的设备的指定信息，其根据设备信息中的预定属性来指定。 基于所获得的信息，从发现的设备中提取要监视目标候选的设备。 显示提取的设备的列表，并选择要监视目标的设备。 获取每个监视目标设备中的可消耗元件的状态信息并将其发送到订单支持设备。 订单支持装置根据接收的状态信息创建包括用于订购被检测为不足的可消耗元素的网站的URL的电子邮件，并将该电子邮件发送到与该设备相关联的电子邮件地址 消耗品不足。

公开(公告)号：US20070255628A1

公开(公告)日：2007-11-01

申请号：US11785544

申请日：2007-04-18

申请人： Masato Takahashi ,  Keiji Nagai ,  Yutaka Nakamura ,  Koji Dan ,  Kenichi Takeda ,  Shogo Hyakutake ,  Fujio Takahashi

发明人： Masato Takahashi ,  Keiji Nagai ,  Yutaka Nakamura ,  Koji Dan ,  Kenichi Takeda ,  Shogo Hyakutake ,  Fujio Takahashi

IPC分类号： G06Q30/00

CPC分类号： G06Q30/06 ,  G06Q30/0601

摘要： An ordering support system is disclosed. The ordering support system includes a device monitoring apparatus that retrieves a device information item about a device connected to a network and a status information item about a consumable of the device, determines whether the consumable is depleted based on the status information item, and sends, if the consumable is determined to be depleted, the device information item and the status information item to an ordering support apparatus. The ordering support system further includes the ordering support apparatus that receives the device information item and the status information item from the device monitoring apparatus, creates an electronic mail message including a URL indicating a Web page for ordering the consumable determined to be depleted, and sends the electronic mail message to a pre-registered mail address associated with the device.

摘要翻译： 公开了订购支持系统。 订购支持系统包括检索关于与网络连接的设备的设备信息项和关于设备的消耗品的状态信息项的设备监控设备，基于状态信息项确定消耗品是否耗尽， 如果消耗品被确定为耗尽，则将设备信息项和状态信息项提供给订购支持设备。 订购支持系统还包括从设备监控设备接收设备信息项和状态信息项的订购支持设备，创建一个电子邮件消息，该电子邮件消息包括指示用于排序被确定要耗尽的耗材的网页的URL，并发送 电子邮件消息发送到与设备相关联的预先登记的邮件地址。

公开(公告)号：US20050146755A1

公开(公告)日：2005-07-07

申请号：US11007709

申请日：2004-12-09

申请人： Katsumi Shimokawa ,  Keiji Nagai ,  Yuichi Niwa

发明人： Katsumi Shimokawa ,  Keiji Nagai ,  Yuichi Niwa

IPC分类号： G03G15/00 ,  H04N1/00 ,  H04N1/32 ,  H04N1/387

CPC分类号： H04N1/32502 ,  G03G15/502 ,  G03G15/5087 ,  G03G15/5091 ,  G03G2215/00109 ,  H04N1/00416 ,  H04N1/00482 ,  H04N1/32512 ,  H04N1/32529 ,  H04N1/32539 ,  H04N2201/0091 ,  H04N2201/0094 ,  H04N2201/0098 ,  H04N2201/3204 ,  H04N2201/3205 ,  H04N2201/3207 ,  H04N2201/3222 ,  H04N2201/3226 ,  H04N2201/3273 ,  H04N2201/3274

摘要： In an information-processing apparatus which functions as a client terminal for an image-forming apparatus which functions as a scanner, a display unit displays a setting option screen for setting scanning conditions when requesting an image-forming apparatus to perform a scan processing. A selection unit performs automatic selection of an image-forming apparatus which is capable of performing the scan processing under the scanning conditions specified in the setting option screen. A control unit causes the image-forming apparatus chosen by the automatic selection of the selection unit, to perform the scan processing under the scanning conditions specified in the setting option screen.

摘要翻译： 在用作用作扫描仪的图像形成装置的客户终端的信息处理装置中，当请求图像形成装置执行扫描处理时，显示单元显示用于设置扫描条件的设置选项屏幕。 选择单元执行能够在设置选项屏幕中指定的扫描条件下执行扫描处理的图像形成装置的自动选择。 控制单元使通过选择单元的自动选择选择的图像形成设备在设置选项画面中指定的扫描条件下进行扫描处理。

公开(公告)号：US08954350B2

公开(公告)日：2015-02-10

申请号：US11944913

申请日：2007-11-26

申请人： Keiji Nagai ,  Yutaka Nakamura ,  Koji Dan ,  Masato Takahashi ,  Yuuki Inoue ,  Fujio Takahashi ,  Yoshiaki Murata

发明人： Keiji Nagai ,  Yutaka Nakamura ,  Koji Dan ,  Masato Takahashi ,  Yuuki Inoue ,  Fujio Takahashi ,  Yoshiaki Murata

IPC分类号： G06Q10/00 ,  G06Q20/00 ,  G06Q20/20 ,  G06Q10/08 ,  G06Q10/06 ,  G06Q30/06 ,  G06Q30/02 ,  G07G1/14

CPC分类号： G06Q10/00 ,  G06Q10/06 ,  G06Q10/08 ,  G06Q10/087 ,  G06Q10/0875 ,  G06Q20/20 ,  G06Q20/202 ,  G06Q20/203 ,  G06Q30/02 ,  G06Q30/06 ,  G07G1/14

摘要： An order supporting apparatus connected to a monitoring apparatus over a network, the monitoring apparatus determining a supply status of devices in the network and sends supply shortage information regarding at least one of the devices determined to have a supply shortage to the order supporting apparatus. In particular, the order supporting apparatus includes a device information storage part that stores device information describing whether each device is monitored as a monitoring target, and maintenance contract information of each device, and a determination part that determines, based on the device information, whether each device is subject to the maintenance contract when the order supporting apparatus receives the supply shortage information. Further, the determination part deselects, in the device information, a device as the monitoring target when the device is determined to have a supply shortage by the monitoring apparatus.

摘要翻译： 一种通过网络连接到监视装置的订单支持装置，所述监视装置确定网络中的设备的供应状态，并且发送关于被确定为具有供应不足的订单支持设备的至少一个设备的供应不足信息。 特别地，订单支持装置包括：设备信息存储部，其存储描述每个设备是否被监视作为监控对象的设备信息;以及每个设备的维护合同信息;以及确定部，其基于设备信息来确定是否 当订单支持设备接收到供应不足信息时，每个设备都受到维护合同的约束。 此外，当确定装置被确定为具有监视装置的供应不足时，确定部件在装置信息中取消选择作为监视对象的装置。