公开(公告)号：US20060133574A1

公开(公告)日：2006-06-22

申请号：US10550800

申请日：2003-12-26

申请人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

发明人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

IPC分类号： G21K5/00 ,  H05G2/00 ,  G21G4/00 ,  H01J35/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033

摘要： An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy metal or heavy-metal compound and having a density 0.5 to 80% that of the crystal density is used. When the target is irradiated with a laser beam, plasma of the heavy metal contained in the target is generated, and extreme ultraviolet light having a predetermined wavelength which corresponds to the kind of the heavy metal is emitted from the plasma. When the density of the target is made to be smaller than the crystal density as described above, space distribution of the density of the generated plasma can be controlled, and the region in which plasma absorbs energy of the laser beam overlaps the region in which the plasma emits the extreme ultraviolet light. Thus, emission efficiency can be improved, preventing energy loss. For example, in a case where the SnO2 target having a density 24% of the crystal density is used, the emission efficiency at around 13.5 nm wavelength is higher than in the case where a Sn crystal target is used.

摘要翻译： 本发明的目的是提供一种能够发射具有高发射效率的极紫外光的极紫外光源靶。 使用由重金属或重金属化合物制成的具有密度为晶体密度的0.5〜80％的固体靶。 当用激光束照射靶时，产生包含在靶中的重金属的等离子体，并且从等离子体发射具有对应于重金属的种类的预定波长的极紫外光。 当如上所述使靶的密度小于晶体密度时，可以控制产生的等离子体的密度的空间分布，并且等离子体吸收激光束的能量的区域与其中的 等离子体发出极紫外光。 因此，可以提高排放效率，防止能量损失。 例如，在使用具有密度为结晶密度的24％的SnO 2 N靶的情况下，波长13.5nm左右的发光效率高于Sn晶体靶为 用过的。

公开(公告)号：US07521702B2

公开(公告)日：2009-04-21

申请号：US10550800

申请日：2003-12-26

申请人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Hiroyuki Furukawa ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

发明人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Hiroyuki Furukawa ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

IPC分类号： G03F7/20 ,  H05G2/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033

摘要： An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy metal or heavy-metal compound and having a density 0.5 to 80% that of the crystal density is used. When the target is irradiated with a laser beam, plasma of the heavy metal contained in the target is generated, and extreme ultraviolet light having a predetermined wavelength which corresponds to the kind of the heavy metal is emitted from the plasma. When the density of the target is made to be smaller than the crystal density as described above, space distribution of the density of the generated plasma can be controlled, and the region in which plasma absorbs energy of the laser beam overlaps the region in which the plasma emits the extreme ultraviolet light. Thus, emission efficiency can be improved, preventing energy loss. For example, in a case where the SnO2 target having a density 24% of the crystal density is used, the emission efficiency at around 13.5 nm wavelength is higher than in the case where a Sn crystal target is used.

摘要翻译： 本发明的目的是提供一种能够发射具有高发射效率的极紫外光的极紫外光源靶。 使用由重金属或重金属化合物制成的具有密度为晶体密度的0.5〜80％的固体靶。 当用激光束照射靶时，产生包含在靶中的重金属的等离子体，并且从等离子体发射具有对应于重金属的种类的预定波长的极紫外光。 当如上所述使靶的密度小于晶体密度时，可以控制产生的等离子体的密度的空间分布，并且等离子体吸收激光束的能量的区域与 等离子体发出极紫外光。 因此，可以提高排放效率，防止能量损失。 例如，在使用密度为结晶密度的24％的SnO 2靶的情况下，波长13.5nm左右的发光效率高于使用Sn晶体靶的情况。

公开(公告)号：US07715455B2

公开(公告)日：2010-05-11

申请号：US11908896

申请日：2006-03-10

申请人： Takashi Yabe ,  Shigeaki Uchida

发明人： Takashi Yabe ,  Shigeaki Uchida

IPC分类号： H01S3/04

CPC分类号： H01S3/042 ,  H01S3/025 ,  H01S3/0407 ,  H01S3/0606 ,  H01S3/061 ,  H01S3/0612 ,  H01S3/0617 ,  H01S3/0915 ,  H01S3/2391

摘要： Object: To provide a solar light pumped laser and a cooling method of a solar light pumped laser.Means for Solving the Problems: A solar light pumped laser performing laser oscillation by pumping a laser medium with solar light, the solar light pumped laser including, a laser medium 12, a container device 14 that supports the laser medium 12 therein, the container device 14 being provided with a focusing optical element 22 for irradiating solar light focused along the laser medium 12, while retaining cooling liquid in a space between the laser medium 12 and the container device 14, and additionally, a pair of optical reflection elements (16, 18) arranged adjacent to the opposing ends of the laser medium. An end of the container device 14 has Brewster's angle. Further, the cooling liquid according to the present invention contains water functioning as an optical medium to form a water lens simultaneously with cleaning the focusing optical element 22.

摘要翻译： 目的：提供太阳光泵浦激光器和太阳光泵浦激光器的冷却方法。 解决问题的手段：通过用太阳光泵浦激光介质进行激光振荡的太阳光泵浦激光器，太阳能光泵浦激光器包括激光介质12，支撑其中的激光介质12的容器装置14，容器装置 14具有用于照射沿着激光介质12聚焦的太阳光的聚焦光学元件22，同时将冷却液保持在激光介质12和容器装置14之间的空间中，另外，一对光反射元件 18），其布置成与激光介质的相对端相邻。 容器装置14的一端具有布鲁斯特的角度。 此外，根据本发明的冷却液含有作为光学介质的水，与清洁聚焦光学元件22同时形成水透镜。

公开(公告)号：US20080225912A1

公开(公告)日：2008-09-18

申请号：US11908896

申请日：2006-03-10

申请人： Takashi Yabe ,  Shigeaki Uchida

发明人： Takashi Yabe ,  Shigeaki Uchida

IPC分类号： H01S3/04 ,  H01S3/093

CPC分类号： H01S3/042 ,  H01S3/025 ,  H01S3/0407 ,  H01S3/0606 ,  H01S3/061 ,  H01S3/0612 ,  H01S3/0617 ,  H01S3/0915 ,  H01S3/2391

摘要： A solar light pumped laser performing laser oscillation by pumping a laser medium with solar light, the solar light pumped laser including, a laser medium 12, a container device 14 that supports the laser medium 12 therein, the container device 14 being provided with a focusing optical element 22 for irradiating solar light focused along the laser medium 12, while retaining cooling liquid in a space between the laser medium 12 and the container device 14, and additionally, a pair of optical reflection elements (16, 18) arranged adjacent to the opposing ends of the laser medium. An end of the container device 14 has Brewster's angle. Further, the cooling liquid according to the present invention contains water functioning as an optical medium to form a water lens simultaneously with cleaning the focusing optical element 22.

摘要翻译： 太阳光泵浦激光器通过用太阳光泵浦激光介质进行激光振荡，太阳光泵浦激光器包括激光介质12，其中支撑激光介质12的容器装置14，容器装置14设置有聚焦 用于照射沿着激光介质12聚焦的太阳光的光学元件22，同时将冷却液保持在激光介质12和容器装置14之间的空间中，另外，一对光反射元件（16,18） 激光介质的相对端。 容器装置14的一端具有布鲁斯特的角度。 此外，根据本发明的冷却液含有作为光学介质的水，与清洁聚焦光学元件22同时形成水透镜。

公开(公告)号：US20110110389A1

公开(公告)日：2011-05-12

申请号：US12988495

申请日：2009-04-16

申请人： Kunio Yoshida ,  Takashi Yabe ,  Shigeaki Uchida ,  Tomomasa Ohkubo ,  Kiyoshi Kato

发明人： Kunio Yoshida ,  Takashi Yabe ,  Shigeaki Uchida ,  Tomomasa Ohkubo ,  Kiyoshi Kato

IPC分类号： H01S3/04 ,  H01S3/0915 ,  H01S3/16

CPC分类号： H01S3/0915 ,  H01S3/0407 ,  H01S3/0606 ,  H01S3/08072 ,  H01S3/094057

摘要： A laser oscillator for improving efficiency of conversion from solar rays to laser beams is provided. The laser oscillator includes: a laser medium 31 excited by solar rays S to output laser beams; an output mirror 35 having a concave surface 35a opposed to an output end of the laser medium 31; and a light guide 20 having a reflector 22 extending from the output end of the laser medium 31 towards the outside of the laser medium 31 and reflecting the solar rays Sf to guide them to the laser medium 31.

摘要翻译： 提供了一种用于提高从太阳光线向激光束转换效率的激光振荡器。 激光振荡器包括：由太阳光线S激发的激光介质31，以输出激光束; 具有与激光介质31的输出端相对的凹面35a的输出镜35; 以及具有从激光介质31的输出端朝向激光介质31的外部延伸的反射体22并反射太阳射线Sf以将它们引导到激光介质31的导光体20。