公开(公告)号：US20130163624A1

公开(公告)日：2013-06-27

申请号：US13820284

申请日：2011-09-06

申请人： Noriaki Miyanaga ,  Masayuki Fujita ,  Takashi Kurita ,  Toshiyuki Kawashima

发明人： Noriaki Miyanaga ,  Masayuki Fujita ,  Takashi Kurita ,  Toshiyuki Kawashima

IPC分类号： H01S3/10 ,  H01S5/06

CPC分类号： G02F1/01 ,  G02F2203/56 ,  H01S3/005 ,  H01S3/0064 ,  H01S3/0606 ,  H01S3/06754 ,  H01S3/1106 ,  H01S3/1307 ,  H01S3/2308 ,  H01S3/2391 ,  H01S5/005 ,  H01S5/06821 ,  H01S5/12 ,  H01S5/4012 ,  H01S5/4087 ,  H01S2301/08

摘要： A laser device including a plurality of oscillating means for oscillating a plurality of laser lights being continuous lights and having frequencies different from each other, respectively, multiplexing means for multiplexing, after amplifying or without amplifying, the respective laser lights oscillated from the respective oscillating means at a predetermined position to generate a multiplexed light, and phase control means for controlling the phase of each of the laser lights so that a peak in output of the multiplexed light repeatedly appears at predetermined time intervals at the predetermined position (so that the same pulse temporal waveform repeatedly appears at predetermined time intervals).

摘要翻译： 一种激光装置，包括：多个振荡装置，用于振荡作为连续光的多个激光，并具有彼此不同的频率;多路复用装置，用于在从各个振荡装置振荡的相应激光放大或不放大之后， 在预定位置产生多路复用光;以及相位控制装置，用于控制每个激光的相位，使得复用光的输出峰值在预定位置以预定的时间间隔重复出现（使得相同的脉冲 时间波形以预定的时间间隔重复出现）。

公开(公告)号：US20080157011A1

公开(公告)日：2008-07-03

申请号：US11792923

申请日：2005-08-29

申请人： Keiji Nagai ,  Qincui Gu ,  Takayoshi Norimatsu ,  Shinsuke Fujioka ,  Hiroaki Nishimura ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Yasukazu Izawa

发明人： Keiji Nagai ,  Qincui Gu ,  Takayoshi Norimatsu ,  Shinsuke Fujioka ,  Hiroaki Nishimura ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Yasukazu Izawa

IPC分类号： G21G4/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/7095 ,  H01J2235/087 ,  H05G2/003 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

摘要： The present invention is made to provide an extreme ultraviolet light source target or an X-ray source target having a good operationality. An extreme ultraviolet light source target in accordance with an aspect of the present invention is obtained by including a heavy metal such as tin into a matrix made of a polymeric material such as hydroxylpropylcellulose (HPC). The target can be manufactured by mixing the heavy metal and the polymeric material with a solvent, and evaporating the solvent. Since the target uses the polymeric material as a matrix, the target can be easily deformed to have a desired shape. For this reason, the target can be easily attached to a target holder irrespective of the shape of the holder, resulting in a good operationality of the target. Furthermore, an emission efficiency can be improved by including the heavy metal at a low density.

摘要翻译： 本发明提供一种具有良好操作性的极紫外光源靶或X射线源靶。 根据本发明的一个方面的极紫外光源目标是通过将诸如锡的重金属包括在由诸如羟丙基纤维素（HPC）的聚合材料制成的基质中而获得的。 可以通过将重金属和聚合物材料与溶剂混合并蒸发溶剂来制造目标物。 由于目标使用聚合物材料作为基质，因此靶容易变形以具有所需的形状。 为此，目标可以容易地附着到目标支架上，而不管支架的形状如何，导致目标的良好操作性。 此外，通过以低密度包含重金属可以提高排放效率。

公开(公告)号：US08068523B2

公开(公告)日：2011-11-29

申请号：US12509090

申请日：2009-07-24

申请人： Kenji Takeshita ,  Shinya Ishii ,  Tomoko Saito ,  Junji Kawanaka ,  Noriaki Miyanaga ,  Kazuo Imazaki ,  Taku Saiki ,  Hiroaki Furuse

发明人： Kenji Takeshita ,  Shinya Ishii ,  Tomoko Saito ,  Junji Kawanaka ,  Noriaki Miyanaga ,  Kazuo Imazaki ,  Taku Saiki ,  Hiroaki Furuse

IPC分类号： H01S3/13 ,  H01S3/091 ,  H01S3/092 ,  H01S3/08

CPC分类号： H01S3/0604 ,  H01S3/025 ,  H01S3/0405 ,  H01S3/042 ,  H01S3/0612 ,  H01S3/0621 ,  H01S3/07 ,  H01S3/08 ,  H01S3/08072 ,  H01S3/08095 ,  H01S3/0813 ,  H01S3/09408 ,  H01S3/10061 ,  H01S3/1643 ,  H01S3/2316 ,  H01S3/2333

摘要： A laser gain medium includes an optical medium configured to transmit a laser beam and having an incident face, a first face, a second face opposing to the first face; and gain media configured to amplify the laser beam while reflecting the laser beam. At least one of the gain media is joined on a first face of the optical medium as a first face gain medium, and at least one of the remaining gain media is joined on a second face of the optical medium as a second face gain medium. The laser beam is incident into the optical medium, and is amplified by the first face gain medium and the second face gain medium while being alternately reflected by the first face gain medium and the second face gain medium.

摘要翻译： 激光增益介质包括配置为透射激光束并具有入射面，第一面，与第一面相对的第二面的光学介质; 并且增益介质配置成放大激光束同时反射激光束。 所述增益介质中的至少一个作为第一面增益介质连接在所述光介质的第一面上，并且所述剩余增益介质中的至少一个作为所述第二面增益介质连接在所述光介质的第二面上。 激光束入射到光学介质中，并且被第一面增益介质和第二面增益介质放大，同时被第一面增益介质和第二面增益介质交替反射。

公开(公告)号：US08259763B2

公开(公告)日：2012-09-04

申请号：US13241740

申请日：2011-09-23

申请人： Kenji Takeshita ,  Shinya Ishii ,  Tomoko Saito ,  Junji Kawanaka ,  Noriaki Miyanaga ,  Kazuo Imazaki ,  Taku Saiki ,  Hiroaki Furuse

发明人： Kenji Takeshita ,  Shinya Ishii ,  Tomoko Saito ,  Junji Kawanaka ,  Noriaki Miyanaga ,  Kazuo Imazaki ,  Taku Saiki ,  Hiroaki Furuse

IPC分类号： H01S3/13

CPC分类号： H01S3/0604 ,  H01S3/025 ,  H01S3/0405 ,  H01S3/042 ,  H01S3/0612 ,  H01S3/0621 ,  H01S3/07 ,  H01S3/08 ,  H01S3/08072 ,  H01S3/08095 ,  H01S3/0813 ,  H01S3/09408 ,  H01S3/10061 ,  H01S3/1643 ,  H01S3/2316 ,  H01S3/2333

摘要： A laser gain medium includes an optical medium configured to transmit a laser beam and having an incident face, a first face, a second face opposing to the first face; and gain media configured to amplify the laser beam while reflecting the laser beam. At least one of the gain media is joined on a first face of the optical medium as a first face gain medium, and at least one of the remaining gain media is joined on a second face of the optical medium as a second face gain medium. The laser beam is incident into the optical medium, and is amplified by the first face gain medium and the second face gain medium while being alternately reflected by the first face gain medium and the second face gain medium.

摘要翻译： 激光增益介质包括配置为透射激光束并具有入射面，第一面，与第一面相对的第二面的光学介质; 并且增益介质配置成放大激光束同时反射激光束。 所述增益介质中的至少一个作为第一面增益介质连接在所述光介质的第一面上，并且所述剩余增益介质中的至少一个作为所述第二面增益介质连接在所述光介质的第二面上。 激光束入射到光学介质中，并且被第一面增益介质和第二面增益介质放大，同时被第一面增益介质和第二面增益介质交替反射。

公开(公告)号：US20100111121A1

公开(公告)日：2010-05-06

申请号：US12509090

申请日：2009-07-24

申请人： Kenji Takeshita ,  Shinya Ishii ,  Tomoko Saito ,  Junji Kawanaka ,  Noriaki Miyanaga ,  Kazuo Imazaki ,  Taku Saiki ,  Hiroaki Furuse

发明人： Kenji Takeshita ,  Shinya Ishii ,  Tomoko Saito ,  Junji Kawanaka ,  Noriaki Miyanaga ,  Kazuo Imazaki ,  Taku Saiki ,  Hiroaki Furuse

IPC分类号： H01S3/13

CPC分类号： H01S3/0604 ,  H01S3/025 ,  H01S3/0405 ,  H01S3/042 ,  H01S3/0612 ,  H01S3/0621 ,  H01S3/07 ,  H01S3/08 ,  H01S3/08072 ,  H01S3/08095 ,  H01S3/0813 ,  H01S3/09408 ,  H01S3/10061 ,  H01S3/1643 ,  H01S3/2316 ,  H01S3/2333

摘要： A laser gain medium includes an optical medium configured to transmit a laser beam and having an incident face, a first face, a second face opposing to the first face; and gain media configured to amplify the laser beam while reflecting the laser beam. At least one of the gain media is joined on a first face of the optical medium as a first face gain medium, and at least one of the remaining gain media is joined on a second face of the optical medium as a second face gain medium. The laser beam is incident into the optical medium, and is amplified by the first face gain medium and the second face gain medium while being alternately reflected by the first face gain medium and the second face gain medium.

摘要翻译： 激光增益介质包括配置为透射激光束并具有入射面，第一面，与第一面相对的第二面的光学介质; 并且增益介质配置成放大激光束同时反射激光束。 所述增益介质中的至少一个作为第一面增益介质连接在所述光介质的第一面上，并且所述剩余增益介质中的至少一个作为所述第二面增益介质连接在所述光介质的第二面上。 激光束入射到光学介质中，并且被第一面增益介质和第二面增益介质放大，同时被第一面增益介质和第二面增益介质交替反射。

公开(公告)号：US07521702B2

公开(公告)日：2009-04-21

申请号：US10550800

申请日：2003-12-26

申请人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Hiroyuki Furukawa ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

发明人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Hiroyuki Furukawa ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

IPC分类号： G03F7/20 ,  H05G2/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033

摘要： An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy metal or heavy-metal compound and having a density 0.5 to 80% that of the crystal density is used. When the target is irradiated with a laser beam, plasma of the heavy metal contained in the target is generated, and extreme ultraviolet light having a predetermined wavelength which corresponds to the kind of the heavy metal is emitted from the plasma. When the density of the target is made to be smaller than the crystal density as described above, space distribution of the density of the generated plasma can be controlled, and the region in which plasma absorbs energy of the laser beam overlaps the region in which the plasma emits the extreme ultraviolet light. Thus, emission efficiency can be improved, preventing energy loss. For example, in a case where the SnO2 target having a density 24% of the crystal density is used, the emission efficiency at around 13.5 nm wavelength is higher than in the case where a Sn crystal target is used.

摘要翻译： 本发明的目的是提供一种能够发射具有高发射效率的极紫外光的极紫外光源靶。 使用由重金属或重金属化合物制成的具有密度为晶体密度的0.5〜80％的固体靶。 当用激光束照射靶时，产生包含在靶中的重金属的等离子体，并且从等离子体发射具有对应于重金属的种类的预定波长的极紫外光。 当如上所述使靶的密度小于晶体密度时，可以控制产生的等离子体的密度的空间分布，并且等离子体吸收激光束的能量的区域与 等离子体发出极紫外光。 因此，可以提高排放效率，防止能量损失。 例如，在使用密度为结晶密度的24％的SnO 2靶的情况下，波长13.5nm左右的发光效率高于使用Sn晶体靶的情况。

公开(公告)号：US20120008654A1

公开(公告)日：2012-01-12

申请号：US13241740

申请日：2011-09-23

申请人： Kenji TAKESHITA ,  Shinya ISHII ,  Tomoko SAITO ,  Junji KAWANAKA ,  Noriaki MIYANAGA ,  Kazuo IMAZAKI ,  Taku SAIKI ,  Hiroaki FURUSE

发明人： Kenji TAKESHITA ,  Shinya ISHII ,  Tomoko SAITO ,  Junji KAWANAKA ,  Noriaki MIYANAGA ,  Kazuo IMAZAKI ,  Taku SAIKI ,  Hiroaki FURUSE

IPC分类号： H01S3/04 ,  H01S3/091

CPC分类号： H01S3/0604 ,  H01S3/025 ,  H01S3/0405 ,  H01S3/042 ,  H01S3/0612 ,  H01S3/0621 ,  H01S3/07 ,  H01S3/08 ,  H01S3/08072 ,  H01S3/08095 ,  H01S3/0813 ,  H01S3/09408 ,  H01S3/10061 ,  H01S3/1643 ,  H01S3/2316 ,  H01S3/2333

摘要： A laser gain medium includes an optical medium configured to transmit a laser beam and having an incident face, a first face, a second face opposing to the first face; and gain media configured to amplify the laser beam while reflecting the laser beam. At least one of the gain media is joined on a first face of the optical medium as a first face gain medium, and at least one of the remaining gain media is joined on a second face of the optical medium as a second face gain medium. The laser beam is incident into the optical medium, and is amplified by the first face gain medium and the second face gain medium while being alternately reflected by the first face gain medium and the second face gain medium.

摘要翻译： 激光增益介质包括配置为透射激光束并具有入射面，第一面，与第一面相对的第二面的光学介质; 并且增益介质配置成放大激光束同时反射激光束。 所述增益介质中的至少一个作为第一面增益介质连接在所述光介质的第一面上，并且所述剩余增益介质中的至少一个作为所述第二面增益介质连接在所述光介质的第二面上。 激光束入射到光学介质中，并且被第一面增益介质和第二面增益介质放大，同时被第一面增益介质和第二面增益介质交替反射。

公开(公告)号：US07885387B2

公开(公告)日：2011-02-08

申请号：US11792923

申请日：2005-08-29

申请人： Keiji Nagai ,  Qincui Gu ,  Takayoshi Norimatsu ,  Shinsuke Fujioka ,  Hiroaki Nishimura ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Yasukazu Izawa

发明人： Keiji Nagai ,  Qincui Gu ,  Takayoshi Norimatsu ,  Shinsuke Fujioka ,  Hiroaki Nishimura ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Yasukazu Izawa

IPC分类号： H05G2/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/7095 ,  H01J2235/087 ,  H05G2/003 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

摘要： The present invention is made to provide an extreme ultraviolet light source target or an X-ray source target having a good operationality. An extreme ultraviolet light source target in accordance with an aspect of the present invention is obtained by including a heavy metal such as tin into a matrix made of a polymeric material such as hydroxylpropylcellulose (HPC). The target can be manufactured by mixing the heavy metal and the polymeric material with a solvent, and evaporating the solvent. Since the target uses the polymeric material as a matrix, the target can be easily deformed to have a desired shape. For this reason, the target can be easily attached to a target holder irrespective of the shape of the holder, resulting in a good operationality of the target. Furthermore, an emission efficiency can be improved by including the heavy metal at a low density.

摘要翻译： 本发明提供一种具有良好操作性的极紫外光源靶或X射线源靶。 根据本发明的一个方面的极紫外光源目标是通过将诸如锡的重金属包括在由诸如羟丙基纤维素（HPC）的聚合材料制成的基质中而获得的。 可以通过将重金属和聚合物材料与溶剂混合并蒸发溶剂来制造目标物。 由于目标使用聚合物材料作为基质，因此靶容易变形以具有所需的形状。 为此，目标可以容易地附着到目标支架上，而不管支架的形状如何，导致目标的良好操作性。 此外，通过以低密度包含重金属可以提高排放效率。

公开(公告)号：US20060133574A1

公开(公告)日：2006-06-22

申请号：US10550800

申请日：2003-12-26

申请人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

发明人： Keiji Nagai ,  Hiroaki Nishimura ,  Takayoshi Norimatsu ,  Katsunobu Nishihara ,  Noriaki Miyanaga ,  Masahiro Nakatsuka ,  Yasukazu Izawa ,  Tatsuhiko Yamanaka ,  Mitsuo Nakai ,  Keisuke Shigemori ,  Masakatsu Murakami ,  Yoshinori Shimada ,  Shigeaki Uchida ,  Atsushi Sunahara ,  Vasilli Zhakhovski ,  Ryouji Matsui ,  Takahiro Hibino ,  Tomoharu Okuno

IPC分类号： G21K5/00 ,  H05G2/00 ,  G21G4/00 ,  H01J35/00

CPC分类号： H05G2/001 ,  B82Y10/00 ,  G03F7/70033

摘要： An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy metal or heavy-metal compound and having a density 0.5 to 80% that of the crystal density is used. When the target is irradiated with a laser beam, plasma of the heavy metal contained in the target is generated, and extreme ultraviolet light having a predetermined wavelength which corresponds to the kind of the heavy metal is emitted from the plasma. When the density of the target is made to be smaller than the crystal density as described above, space distribution of the density of the generated plasma can be controlled, and the region in which plasma absorbs energy of the laser beam overlaps the region in which the plasma emits the extreme ultraviolet light. Thus, emission efficiency can be improved, preventing energy loss. For example, in a case where the SnO2 target having a density 24% of the crystal density is used, the emission efficiency at around 13.5 nm wavelength is higher than in the case where a Sn crystal target is used.

摘要翻译： 本发明的目的是提供一种能够发射具有高发射效率的极紫外光的极紫外光源靶。 使用由重金属或重金属化合物制成的具有密度为晶体密度的0.5〜80％的固体靶。 当用激光束照射靶时，产生包含在靶中的重金属的等离子体，并且从等离子体发射具有对应于重金属的种类的预定波长的极紫外光。 当如上所述使靶的密度小于晶体密度时，可以控制产生的等离子体的密度的空间分布，并且等离子体吸收激光束的能量的区域与其中的 等离子体发出极紫外光。 因此，可以提高排放效率，防止能量损失。 例如，在使用具有密度为结晶密度的24％的SnO 2 N靶的情况下，波长13.5nm左右的发光效率高于Sn晶体靶为 用过的。