公开(公告)号：US07287847B2

公开(公告)日：2007-10-30

申请号：US10990492

申请日：2004-11-18

申请人： Kenji Fujii ,  Shuji Koyama ,  Masaki Osumi ,  Shingo Nagata ,  Jun Yamamuro ,  Yoshinori Tagawa ,  Hiroyuki Murayama ,  Yoshinobu Urayama

发明人： Kenji Fujii ,  Shuji Koyama ,  Masaki Osumi ,  Shingo Nagata ,  Jun Yamamuro ,  Yoshinori Tagawa ,  Hiroyuki Murayama ,  Yoshinobu Urayama

IPC分类号： B41J2/175

CPC分类号： B41J2/1639 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2002/14403 ,  B41J2002/14475

摘要： A method of manufacturing an ink jet head which discharges ink, comprising: a step of preparing a silicon substrate; a step of forming a membrane having a layer in which a plurality of holes are disposed to constitute a filter mask, and a layer with which a first surface is coated in such a manner that the first surface is not exposed from the plurality of holes on the first surface of the substrate; a step of forming a close contact enhancing layer on the membrane formed on the substrate; a step of forming a channel constituting member on the close contact enhancing layer to constitute a plurality of discharge ports and a plurality of ink channels communicating with the plurality of discharge ports; a step of forming an ink supply port communicating with the plurality of ink channels in the silicon substrate by anisotropic etching from a second surface facing the first surface of the substrate; and a step of forming a filter in a portion of the close contact enhancing layer positioned in an opening of the ink supply port using the layer of the membrane in which a plurality of holes are disposed as the mask.

摘要翻译： 一种制造喷墨头的喷墨头的方法，包括：制备硅衬底的步骤; 形成具有设置有多个孔的层以构成过滤掩模的膜的步骤，以及第一表面以不使第一表面从多个孔露出的方式涂覆有第一表面的层 衬底的第一表面; 在形成在基板上的膜上形成紧密接触增强层的工序; 在紧密接触增强层上形成通道构成构件以构成多个排出口和与多个排出口连通的多个墨水通道的步骤; 通过各向异性蚀刻形成与所述硅衬底中的所述多个墨通道连通的供墨口从与所述基板的所述第一表面相对的第二表面形成的步骤; 以及使用其中设置有多个孔作为掩模的膜层在位于供墨口的开口中的紧密接触增强层的一部分中形成过滤器的步骤。

公开(公告)号：US20060090338A1

公开(公告)日：2006-05-04

申请号：US11255679

申请日：2005-10-20

申请人： Shuji Koyama ,  Shingo Nagata ,  Kenji Fujii ,  Jun Yamamuro ,  Masaki Osumi

发明人： Shuji Koyama ,  Shingo Nagata ,  Kenji Fujii ,  Jun Yamamuro ,  Masaki Osumi

IPC分类号： B21D53/76

CPC分类号： B41J2/1628 ,  B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1645 ,  Y10T29/49401

摘要： A method for precisely manufacturing a liquid supply orifice of an ink-jet recording head, even if a masking material includes pinholes which may affect the forming of the ink supply orifice, is provided. The substrate face provided with a mask used for forming the ink supply orifice has an area covered with the mask for anisotropic etching, the area consisting of a part provided with OSF layers and a part not provided with the OSF layers which are determined by considering the amount of a side etching.

摘要翻译： 即使掩蔽材料包括可能影响供墨孔的形成的针孔，也提供了用于精确地制造喷墨记录头的液体供应孔的方法。 设置有用于形成供墨孔的掩模的基板面具有覆盖有用于各向异性蚀刻的掩模的区域，该区域由具有OSF层的部分和不具有OSF层的部分组成，该部分通过考虑 侧蚀刻量。

公开(公告)号：US07322104B2

公开(公告)日：2008-01-29

申请号：US11157762

申请日：2005-06-21

申请人： Shuji Koyama ,  Shingo Nagata ,  Kenji Fujii ,  Masaki Osumi ,  Jun Yamamuro

发明人： Shuji Koyama ,  Shingo Nagata ,  Kenji Fujii ,  Masaki Osumi ,  Jun Yamamuro

IPC分类号： B21D53/76 ,  G01D15/00

CPC分类号： B41J2/1639 ,  B41J2/1603 ,  B41J2/1626 ,  Y10T29/49083 ,  Y10T29/4913 ,  Y10T29/49135 ,  Y10T29/49153 ,  Y10T29/49401

摘要： An ink jet head includes a substrate having a flow path construction member constructing a plurality of discharge ports for discharging ink and a plurality of ink flow paths corresponding thereto, and a plurality of energy generating elements corresponding to the plurality of discharge ports. The substrate has an ink supply port for supplying ink to the ink flow paths. The ink supply port includes a first liquid chamber disposed on a plane on which the energy generating elements are formed, and having a grooves with island-shaped columns left, and a second liquid chamber disposed on the opposed plane, and having a plurality of through holes partitioned at positions corresponding to the island-shaped columns. In the ink jet head, the island-shaped columns and a partition wall for the through holes are left as a beam construction section, thereby improving a mechanical strength of a semiconductor substrate. Also, the first liquid chamber has a groove with island-shaped columns left, thereby enabling ink to be adequately supplied from the ink supply port to the discharge ports.

摘要翻译： 喷墨头包括具有构造用于排出墨的多个排出口和与其对应的多个墨水流路的流路构造构件的基板和与多个排出口对应的多个能量产生元件。 基板具有用于向油墨流路供给油墨的供墨口。 供墨口包括设置在其上形成有能量产生元件的平面上的第一液体室，并且具有留下岛状柱的槽和设置在相对平面上的第二液体室，并且具有多个通孔 在与岛状列相对应的位置处划分的孔。 在喷墨头中，岛形柱和用于通孔的分隔壁被留作为梁结构部分，从而提高半导体基板的机械强度。 此外，第一液体室具有留下岛状柱的凹槽，从而使得墨水能够从供墨口适当地供应到排出口。

公开(公告)号：US20070295687A1

公开(公告)日：2007-12-27

申请号：US11840383

申请日：2007-08-17

申请人： Kenji Fujii ,  Shuji Koyama ,  Masaki Osumi ,  Shingo Nagata ,  Jun Yamamuro ,  Yoshinori Tagawa ,  Hiroyuki Murayama ,  Yoshinobu Urayama

发明人： Kenji Fujii ,  Shuji Koyama ,  Masaki Osumi ,  Shingo Nagata ,  Jun Yamamuro ,  Yoshinori Tagawa ,  Hiroyuki Murayama ,  Yoshinobu Urayama

IPC分类号： G11B5/127

CPC分类号： B41J2/1639 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2002/14403 ,  B41J2002/14475

摘要： A method of manufacturing an ink jet head which discharges ink, comprising: a step of preparing a silicon substrate; a step of forming a membrane having a layer in which a plurality of holes are disposed to constitute a filter mask, and a layer with which a first surface is coated in such a manner that the first surface is not exposed from the plurality of holes on the first surface of the substrate; a step of forming a close contact enhancing layer on the membrane formed on the substrate; a step of forming a channel constituting member on the close contact enhancing layer to constitute a plurality of discharge ports and a plurality of ink channels communicating with the plurality of discharge ports; a step of forming an ink supply port communicating with the plurality of ink channels in the silicon substrate by anisotropic etching from a second surface facing the first surface of the substrate; and a step of forming a filter in a portion of the close contact enhancing layer positioned in an opening of the ink supply port using the layer of the membrane in which a plurality of holes are disposed as the mask.

公开(公告)号：US20050285905A1

公开(公告)日：2005-12-29

申请号：US11157762

申请日：2005-06-21

申请人： Shuji Koyama ,  Shingo Nagata ,  Kenji Fujii ,  Masaki Osumi ,  Jun Yamamuro

发明人： Shuji Koyama ,  Shingo Nagata ,  Kenji Fujii ,  Masaki Osumi ,  Jun Yamamuro

IPC分类号： B41J2/05 ,  B41J2/16

CPC分类号： B41J2/1639 ,  B41J2/1603 ,  B41J2/1626 ,  Y10T29/49083 ,  Y10T29/4913 ,  Y10T29/49135 ,  Y10T29/49153 ,  Y10T29/49401

摘要： An ink jet head includes a substrate having a flow path construction member constructing a plurality of discharge ports for discharging ink and a plurality of ink flow paths corresponding thereto, and a plurality of energy generating elements corresponding to the plurality of discharge ports. The substrate has an ink supply port for supplying ink to the ink flow paths. The ink supply port includes a first liquid chamber disposed on a plane on which the energy generating elements are formed, and having a grooves with island-shaped columns left, and a second liquid chamber disposed on the opposed plane, and having a plurality of through holes partitioned at positions corresponding to the island-shaped columns. In the ink jet head, the island-shaped columns and a partition wall for the through holes are left as a beam construction section, thereby improving a mechanical strength of a semiconductor substrate. Also, the first liquid chamber has a groove with island-shaped columns left, thereby enabling ink to be adequately supplied from the ink supply port to the discharge ports.

摘要翻译： 喷墨头包括具有构造用于排出墨的多个排出口和与其对应的多个墨水流路的流路构造构件的基板和与多个排出口对应的多个能量产生元件。 基板具有用于向油墨流路供给油墨的供墨口。 供墨口包括设置在其上形成有能量产生元件的平面上的第一液体室，并且具有留下岛状柱的槽和设置在相对平面上的第二液体室，并且具有多个通孔 在与岛状列相对应的位置处划分的孔。 在喷墨头中，岛形柱和用于通孔的分隔壁被留作为梁结构部分，从而提高半导体基板的机械强度。 此外，第一液体室具有留下岛状柱的凹槽，从而使得墨水能够从供墨口适当地供应到排出口。

公开(公告)号：US07862158B2

公开(公告)日：2011-01-04

申请号：US11840404

申请日：2007-08-17

申请人： Kenji Fujii ,  Shuji Koyama ,  Masaki Osumi ,  Shingo Nagata ,  Jun Yamamuro ,  Yoshinori Tagawa ,  Hiroyuki Murayama ,  Yoshinobu Urayama

发明人： Kenji Fujii ,  Shuji Koyama ,  Masaki Osumi ,  Shingo Nagata ,  Jun Yamamuro ,  Yoshinori Tagawa ,  Hiroyuki Murayama ,  Yoshinobu Urayama

IPC分类号： B41J2/05 ,  B41J2/175

CPC分类号： B41J2/1639 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2002/14403 ,  B41J2002/14475

摘要： A method of manufacturing an ink jet head which discharges ink, comprising: a step of preparing a silicon substrate; a step of forming a membrane having a layer in which a plurality of holes are disposed to constitute a filter mask, and a layer with which a first surface is coated in such a manner that the first surface is not exposed from the plurality of holes on the first surface of the substrate; a step of forming a close contact enhancing layer on the membrane formed on the substrate; a step of forming a channel constituting member on the close contact enhancing layer to constitute a plurality of discharge ports and a plurality of ink channels communicating with the plurality of discharge ports; a step of forming an ink supply port communicating with the plurality of ink channels in the silicon substrate by anisotropic etching from a second surface facing the first surface of the substrate; and a step of forming a filter in a portion of the close contact enhancing layer positioned in an opening of the ink supply port using the layer of the membrane in which a plurality of holes are disposed as the mask.

摘要翻译： 一种制造喷墨头的喷墨头的方法，包括：制备硅衬底的步骤; 形成具有设置有多个孔的层以构成过滤掩模的膜的步骤，以及第一表面以不使第一表面从多个孔露出的方式涂覆有第一表面的层 衬底的第一表面; 在形成在基板上的膜上形成紧密接触增强层的工序; 在紧密接触增强层上形成通道构成构件以构成多个排出口和与多个排出口连通的多个墨水通道的步骤; 通过各向异性蚀刻形成与所述硅衬底中的所述多个墨通道连通的供墨口从与所述基板的所述第一表面相对的第二表面形成的步骤; 以及使用其中设置有多个孔作为掩模的膜层在位于供墨口的开口中的紧密接触增强层的一部分中形成过滤器的步骤。

公开(公告)号：US07753502B2

公开(公告)日：2010-07-13

申请号：US11840383

申请日：2007-08-17

申请人： Kenji Fujii ,  Shuji Koyama ,  Masaki Osumi ,  Shingo Nagata ,  Jun Yamamuro ,  Yoshinori Tagawa ,  Hiroyuki Murayama ,  Yoshinobu Urayama

发明人： Kenji Fujii ,  Shuji Koyama ,  Masaki Osumi ,  Shingo Nagata ,  Jun Yamamuro ,  Yoshinori Tagawa ,  Hiroyuki Murayama ,  Yoshinobu Urayama

IPC分类号： B41J2/17 ,  B41J2/175

CPC分类号： B41J2/1639 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2002/14403 ,  B41J2002/14475

摘要： A method of manufacturing an ink jet head which discharges ink, comprising: a step of preparing a silicon substrate; a step of forming a membrane having a layer in which a plurality of holes are disposed to constitute a filter mask, and a layer with which a first surface is coated in such a manner that the first surface is not exposed from the plurality of holes on the first surface of the substrate; a step of forming a close contact enhancing layer on the membrane formed on the substrate; a step of forming a channel constituting member on the close contact enhancing layer to constitute a plurality of discharge ports and a plurality of ink channels communicating with the plurality of discharge ports; a step of forming an ink supply port communicating with the plurality of ink channels in the silicon substrate by anisotropic etching from a second surface facing the first surface of the substrate; and a step of forming a filter in a portion of the close contact enhancing layer positioned in an opening of the ink supply port using the layer of the membrane in which a plurality of holes are disposed as the mask.

摘要翻译： 一种制造喷墨头的喷墨头的方法，包括：制备硅衬底的步骤; 形成具有设置有多个孔的层以构成过滤掩模的膜的步骤，以及第一表面以不使第一表面从多个孔露出的方式涂覆有第一表面的层 衬底的第一表面; 在形成在基板上的膜上形成紧密接触增强层的工序; 在紧密接触增强层上形成通道构成构件以构成多个排出口和与多个排出口连通的多个墨水通道的步骤; 通过各向异性蚀刻形成与所述硅衬底中的所述多个墨通道连通的供墨口从与所述基板的所述第一表面相对的第二表面形成的步骤; 以及使用其中设置有多个孔作为掩模的膜层在位于供墨口的开口中的紧密接触增强层的一部分中形成过滤器的步骤。

公开(公告)号：US07470375B2

公开(公告)日：2008-12-30

申请号：US11255679

申请日：2005-10-20

申请人： Shuji Koyama ,  Shingo Nagata ,  Kenji Fujii ,  Jun Yamamuro ,  Masaki Osumi

发明人： Shuji Koyama ,  Shingo Nagata ,  Kenji Fujii ,  Jun Yamamuro ,  Masaki Osumi

IPC分类号： B41J2/16

CPC分类号： B41J2/1628 ,  B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1645 ,  Y10T29/49401

摘要： A method for precisely manufacturing a liquid supply orifice of an ink-jet recording head, even if a masking material includes pinholes which may affect the forming of the ink supply orifice, is provided. The substrate face provided with a mask used for forming the ink supply orifice has an area covered with the mask for anisotropic etching, the area consisting of a part provided with OSF layers and a part not provided with the OSF layers which are determined by considering the amount of a side etching.

摘要翻译： 即使掩蔽材料包括可能影响供墨孔的形成的针孔，也提供了用于精确地制造喷墨记录头的液体供应孔的方法。 设置有用于形成供墨孔的掩模的基板面具有覆盖有用于各向异性蚀刻的掩模的区域，该区域由具有OSF层的部分和不具有OSF层的部分组成，该部分通过考虑 侧蚀刻量。

公开(公告)号：US20050117005A1

公开(公告)日：2005-06-02

申请号：US10990492

申请日：2004-11-18

申请人： Kenji Fujii ,  Shuji Koyama ,  Masaki Osumi ,  Shingo Nagata ,  Jun Yamamuro ,  Yoshinori Tagawa ,  Hiroyuki Murayama ,  Yoshinobu Urayama

发明人： Kenji Fujii ,  Shuji Koyama ,  Masaki Osumi ,  Shingo Nagata ,  Jun Yamamuro ,  Yoshinori Tagawa ,  Hiroyuki Murayama ,  Yoshinobu Urayama

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/16 ,  B41J2/19

CPC分类号： B41J2/1639 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2002/14403 ,  B41J2002/14475

摘要： A method of manufacturing an ink jet head which discharges ink, comprising: a step of preparing a silicon substrate; a step of forming a membrane having a layer in which a plurality of holes are disposed to constitute a filter mask, and a layer with which a first surface is coated in such a manner that the first surface is not exposed from the plurality of holes on the first surface of the substrate; a step of forming a close contact enhancing layer on the membrane formed on the substrate; a step of forming a channel constituting member on the close contact enhancing layer to constitute a plurality of discharge ports and a plurality of ink channels communicating with the plurality of discharge ports; a step of forming an ink supply port communicating with the plurality of ink channels in the silicon substrate by anisotropic etching from a second surface facing the first surface of the substrate; and a step of forming a filter in a portion of the close contact enhancing layer positioned in an opening of the ink supply port using the layer of the membrane in which a plurality of holes are disposed as the mask.

摘要翻译： 一种制造喷墨头的喷墨头的方法，包括：制备硅衬底的步骤; 形成具有设置有多个孔的层以构成过滤掩模的膜的步骤，以及第一表面以不使第一表面从多个孔露出的方式涂覆有第一表面的层 衬底的第一表面; 在形成在基板上的膜上形成紧密接触增强层的工序; 在紧密接触增强层上形成通道构成构件以构成多个排出口和与多个排出口连通的多个墨水通道的步骤; 通过各向异性蚀刻形成与所述硅衬底中的所述多个墨通道连通的供墨口从与所述基板的所述第一表面相对的第二表面形成的步骤; 以及使用其中设置有多个孔作为掩模的膜层在位于供墨口的开口中的紧密接触增强层的一部分中形成过滤器的步骤。

公开(公告)号：US20060098055A1

公开(公告)日：2006-05-11

申请号：US11261511

申请日：2005-10-31

申请人： Kenji Fujii ,  Shuji Koyama ,  Masaki Osumi ,  Jun Yamamuro ,  Hiroyuki Murayama

发明人： Kenji Fujii ,  Shuji Koyama ,  Masaki Osumi ,  Jun Yamamuro ,  Hiroyuki Murayama

IPC分类号： B41J2/05

CPC分类号： B41J2/1639 ,  B41J2/14129 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1642

摘要： The present invention permits to manufacture, with low cost and good through-put, a liquid discharge recording head in which a nozzle plate is formed from inorganic material. In the liquid discharge recording head according to the present invention, a nozzle plate formed from inorganic material is stacked on a front surface of a silicon substrate including heat generating resistant members for generating energy for discharging liquid and an electric circuit for driving the heat generating resistant members. The liquid can be supplied from a liquid supply port extending through the silicon substrate to flow paths provided between the silicon substrate and the nozzle plate. Recessed portions having predetermined depths are formed in a region of the surface of the silicon substrate, where the flow paths are formed, and discharge ports are formed above the recessed portions.

摘要翻译： 本发明允许以低成本和良好的通过量制造其中由无机材料形成喷嘴板的液体排出记录头。 在根据本发明的液体排出记录头中，由无机材料形成的喷嘴板堆叠在硅基板的前表面上，该硅基板包括用于产生排出液体的能量的产生发热性的部件和用于驱动发热电阻的电路 会员 液体可以从延伸穿过硅衬底的液体供应口提供到设置在硅衬底和喷嘴板之间的流动路径。 在硅基板的形成有流路的区域形成有规定深度的凹部，在凹部上形成排出口。