摘要:
An ink supply port is opened in an Si substrate on which an ink discharge energy generating element is formed, by anisotropic etching, from a back surface opposite to a surface on which the ink discharge energy generating element is formed. When the anisotropic etching is effected, OSF (oxidation induced laminate defect) is remained on the back surface of the Si substrate with OSF density equal to or greater than 2×104 parts/cm2 and a length of OSF equal to or greater than 2 μm.
摘要翻译:在与形成有喷墨能量产生元件的表面相反的背面上,通过各向异性蚀刻在其上形成有喷墨能量产生元件的Si基板上打开供墨口。 当进行各向异性蚀刻时,OSF密度等于或大于2×10 4 / cm 2以上的Si衬底的背面上残留有OSF(氧化诱导层叠缺陷) >并且OSF的长度等于或大于2μm。
摘要:
An ink supply port is opened in an Si substrate on which an ink discharge energy generating element is formed, by anisotropic etching, from a back surface opposite to a surface on which the ink discharge energy generating element is formed. When the anisotropic etching is effected, OSF (oxidation induced laminate defect) is remained on the back surface of the Si substrate with OSF density equal to or greater than 2×104 parts/cm2 and a length of OSF equal to or greater than 2 μm.
摘要翻译:在与形成有喷墨能量产生元件的表面相反的背面上,通过各向异性蚀刻在其上形成有喷墨能量产生元件的Si基板上打开供墨口。 当进行各向异性蚀刻时,OSF密度等于或大于2×10 4 / cm 2的Si衬底的背面上残留有OSF(氧化诱导层压缺陷) SUP>并且OSF的长度等于或大于2μm。
摘要:
An ink supply port is opened in an Si substrate on which an ink discharge energy generating element is formed, by anisotropic etching, from a back surface opposite to a surface on which the ink discharge energy generating element is formed. When the anisotropic etching is effected, OSF (oxidation induced laminate defect) is remained on the back surface of the Si substrate with OSF density equal to or greater than 2×104 parts/cm2 and a length of OSF equal to or greater than 2 μm.
摘要翻译:在与形成有喷墨能量产生元件的表面相反的背面上,通过各向异性蚀刻在其上形成有喷墨能量产生元件的Si基板上打开供墨口。 当进行各向异性蚀刻时,OSF密度等于或大于2×10 4 / cm 2以上的Si基板的背面残留有OSF(氧化诱导层叠缺陷) >并且OSF的长度等于或大于2μm。
摘要:
An ink supply port is opened in an Si substrate on which an ink discharge energy generating element is formed, by anisotropic etching, from a back surface opposite to a surface on which the ink discharge energy generating element is formed. When the anisotropic etching is effected, OSF (oxidation induced laminate defect) is remained on the back surface of the Si substrate with OSF density equal to or greater than 2×104 parts/cm2 and a length of OSF equal to or greater than 2 μm.
摘要翻译:在与形成有喷墨能量产生元件的表面相反的背面上,通过各向异性蚀刻在其上形成有喷墨能量产生元件的Si基板上打开供墨口。 当进行各向异性蚀刻时,OSF密度等于或大于2×10 4 / cm 2的Si衬底的背面上残留有OSF(氧化诱导层压缺陷) SUP>并且OSF的长度等于或大于2μm。
摘要:
An ink supply port is opened in an Si substrate on which an ink discharge energy generating element is formed, by anisotropic etching, from a back surface opposite to a surface on which the ink discharge energy generating element is formed. When the anisotropic etching is effected, OSF (oxidation induced laminate defect) remains on the back surface of the Si substrate with OSF density equal to or greater than 2×104 parts/cm2 and a length of OSF equal to or greater than 2 μm.
摘要翻译:在与形成有喷墨能量产生元件的表面相反的背面上,通过各向异性蚀刻在其上形成有喷墨能量产生元件的Si基板上打开供墨口。 当进行各向异性蚀刻时,OSF密度等于或大于2×10 4 / cm 2,并且OSF的长度等于或更大的OSF(氧化诱导层压缺陷)保留在Si衬底的背面上 超过2个妈妈。
摘要:
The present invention provides an ink jet head substrate comprising a heat generating resistance member forming a heat generating portion, an electrode wiring electrically connected to the heat generating resistance member, and an anti-cavitation film provided on the heat generating resistance member and the electrode wiring via an insulation protection layer, and wherein the anti-cavitation film is formed from different materials with more than two layers.
摘要:
A liquid discharge head is provided with discharge ports for discharging liquid, liquid flow paths communicated with the discharge ports for supplying liquid to the discharge ports, a substrate having heat generating members for creating bubbles in the liquid, and movable members facing the heat generating members and being arranged in the liquid flow paths. The movable members have a free end on the discharge port side with a specific gap with respect to the heat generating members. The movable member is fixed to the substrate above the heat generating member on the substrate.
摘要:
An ink jet recording head with a heat-generating resistance layer for generating thermal energy used for ink discharge, and a wiring electrode layer electrically connected to the heat-generating resistance layer to form an electro-thermal converting element, an insulating protective layer covering the electro-thermal converting element, and an external electrical connection portion electrically connected to the electro-thermal converting element and configured to connect to an external wiring for applying a voltage to the electro-thermal converting element. Further, the external electrical connection portion is formed by a layer grown by electroless plating from the wiring electrode layer through a through hole formed in the insulating protective layer. The external electrical connection portion projects beyond the insulating protective layer and has a flat surface at the most extended projection of the external electrical connection portion.
摘要:
There is provided a liquid discharge head provided with an element substrate and a ceiling plate fixed in a mutually opposed state, plural liquid path lateral walls provided between the ceiling plate and the element substrate and defining plural light flow paths, plural discharge energy generating elements arranged in parallel on the surface of the element substrate so as to be respectively positioned in the plural liquid paths, plural movable members in the form of a beam supported at an end, provided on the element substrate so as to be respectively opposed to the plural discharge energy generating elements and provided with fixed ends at the upstream side in the liquid flowing direction in the liquid paths and free ends at the downstream ends, and plural projections provided on the ceiling plate for respectively limiting the amount of displacement of the plural movable members, the element substrate and the ceiling plate being composed of similar materials, wherein the liquid path lateral walls are formed on the element substrate, and, on the ceiling plate, there is provided an engaging layer having recesses for fitting with the upper end faces of the liquid path lateral walls.
摘要:
A method for manufacturing liquid discharge heads is provided with discharge ports for discharging liquid, liquid flow paths communicated with the discharge ports for supplying liquid to the discharge ports, a substrate having heat generating members for creating bubbles in liquid, and movable members facing the heat generating members, each being arranged in each liquid flow path, having the free end on the discharge port side with a specific gap with the heat generating member. This method comprises the steps of forming the boundary layer used for providing a gap between the movable member and the substrate above the heat generating member on the substrate, of laminating the movable member on the boundary layer so as to position the free end above the heat generating member, at the same time fixing the movable member on the substrate, and of forming the gap between the movable member and the heat generating member by use of the boundary layer. With the structure thus arranged, there is no need for the step to position the movable member with the substrate, and also, the movable portion of the movable member is separated from the substrate after the movable member is formed on the substrate and incorporated in the liquid discharge head so as to implement arranging the interior of each liquid flow path finer and more precisely.