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公开(公告)号：US20160246010A1
公开(公告)日：2016-08-25
申请号：US15047032
申请日：2016-02-18
Applicant: Si-Ware Systems
Inventor： Mostafa Medhat , Bassem Mortada , Yasser Sabry , Sebastian Nazeer , Yasseen Nada , Mohamed Sadek , Bassam A. Saadany
Abstract: A shadow mask having two or more levels of openings enables selective step coverage of micro-fabricated structures within a micro-optical bench device. The shadow mask includes a first opening within a top surface of the shadow mask and a second opening within the bottom surface of the shadow mask. The second opening is aligned with the first opening and has a second width less than a first width of the first opening. An overlap between the first opening and the second opening forms a hole within the shadow mask through which selective coating of micro-fabricated structures within the micro-optical bench device may occur.
Abstract translation: 具有两个或多个开口级别的荫罩使得可以在微型光学台装置内的微结构的选择性阶梯覆盖。 荫罩包括在荫罩的顶表面内的第一开口和荫罩的底表面内的第二开口。 第二开口与第一开口对准并且具有小于第一开口的第一宽度的第二宽度。 第一开口和第二开口之间的重叠在荫罩内形成一个孔，通过该孔可以发生微光学工作台装置内的微结构的选择性涂层。
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公开(公告)号：US11499218B2
公开(公告)日：2022-11-15
申请号：US16730947
申请日：2019-12-30
Applicant: Si-Ware Systems
Inventor： Mostafa Medhat , Bassem Mortada , Yasser Sabry , Sebastian Nazeer , Yasseen Nada , Mohamed Sadek , Bassam A. Saadany
Abstract: A shadow mask having two or more levels of openings enables selective step coverage of micro-fabricated structures within a micro-optical bench device. The shadow mask includes a first opening within a top surface of the shadow mask and a second opening within the bottom surface of the shadow mask. The second opening is aligned with the first opening and has a second width less than a first width of the first opening. An overlap between the first opening and the second opening forms a hole within the shadow mask through which selective coating of micro-fabricated structures within the micro-optical bench device may occur.
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3.发明申请MICRO-OPTICAL BENCH DEVICE WITH HIGHLY/SELECTIVELY-CONTROLLED OPTICAL SURFACES 审中-公开具有高/可选光控表面的微光学设备公开(公告)号：US20160246002A1
公开(公告)日：2016-08-25
申请号：US15047205
申请日：2016-02-18
Applicant: Si-Ware Systems
Inventor： Bassam Saadany , Yasser M. Sabry , Mostafa Medhat , Bassem Mortada , Muhammed Nagi , Mohamed Sadek , Yasseen Nada , Khaled Hassan
CPC classification number: G02B6/136 , B81B2201/047 , B81C1/00833 , G01B9/02051 , G01J3/0259 , G01J3/453 , G02B6/3692
Abstract: A micro-optical bench device is fabricated by a process that provides control over one or more properties of the micro-optical bench device and/or one or more properties of optical surfaces in the micro-optical bench device. The process includes etching a substrate to form a permanent structure including optical elements and a temporary structure. The shape of the temporary structure and gaps between the temporary structure and permanent structure facilitate control of a property of the micro-optical bench and/or optical surfaces therein. The process further includes removing the temporary structure from an optical path of the micro-optical bench device.
Abstract translation: 通过提供对微型光学台装置的一个或多个特性的控制和/或微型光学台装置中的光学表面的一个或多个特性的方法制造微型光学台装置。 该方法包括蚀刻衬底以形成包括光学元件和临时结构的永久结构。 临时结构的形状和临时结构和永久结构之间的间隙便于控制微光学台和/或其中的光学表面的性质。 该方法还包括从微型光学平台装置的光路中移除临时结构。
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Patent Agency Ranking
公开(公告)号：US09557556B2
公开(公告)日：2017-01-31
申请号：US14210904
申请日：2014-03-14
Applicant: Si-Ware Systems
Inventor： Yasser M. Sabry , Diaa Abdel Maged Khalil , Mohamed Sadek
IPC: G02B6/24 , G02B26/00 , G01B9/02 , G01J1/04 , G02B6/35 , G02B26/02 , G02B6/36 , G02B6/26 , G02B6/293 , B81B5/00 , G02B1/00
CPC classification number: G02B26/001 , B81B5/00 , G01B9/02049 , G01J1/0411 , G02B1/005 , G02B6/24 , G02B6/262 , G02B6/29368 , G02B6/29395 , G02B6/3514 , G02B6/3518 , G02B6/353 , G02B6/357 , G02B6/3584 , G02B6/3616 , G02B26/02 , G02B26/023
Abstract: An integrated apertured micromirror is provided in which the micromirror is monolithically integrated with a micro-optical bench fabricated on a substrate using a lithographic and deep etching technique. The micromirror has an aperture therein and is oriented such that the micromirror is optically coupled to receive an incident beam having an optical axis in a plane of the substrate and to at least partially transmit the incident beam therethrough via the aperture.
Abstract translation: 提供了一种集成的有孔微镜，其中微镜与使用光刻和深蚀刻技术在基板上制造的微型光学台单片集成。 微镜在其中具有孔，并且被定向成使得微反射镜被光学耦合以接收在衬底的平面中具有光轴的入射光束，并且至少部分地透射经由孔的入射光束。
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公开(公告)号：US20150010026A1
公开(公告)日：2015-01-08
申请号：US14497648
申请日：2014-09-26
Applicant: Si-Ware Systems
Inventor： Bassam A. Saadany , Mohamed Sadek , Haitham Omran , Diaa Abdel Maged Khalil
IPC: H01S5/14
CPC classification number: H01S5/141 , H01S3/06754 , H01S5/02248 , H01S5/0287 , H01S5/142 , H01S5/146
Abstract: A MEMS-based swept laser source is formed from two coupled cavities. The first cavity includes a first mirror and a fully reflective moveable minor and operates to tune the output wavelength of the laser. The second cavity is optically coupled to the first cavity and includes an active gain medium, the first mirror and a second mirror. The second cavity further has a length substantially greater than the first cavity such that there are multiple longitudinal modes of the second cavity within a transmission bandwidth of the first cavity output.
Abstract translation: 基于MEMS的扫频激光源由两个耦合腔形成。 第一腔体包括第一反射镜和全反射可移动次级并且用于调节激光器的输出波长。 第二腔被光耦合到第一腔，并且包括主动增益介质，第一反射镜和第二反射镜。 第二腔还具有基本上大于第一空腔的长度，使得在第一空腔输出的传输带宽内存在第二空腔的多个纵向模式。
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公开(公告)号：US20140268174A1
公开(公告)日：2014-09-18
申请号：US14210904
申请日：2014-03-14
Applicant: Si-Ware Systems
Inventor： Yasser M. Sabry , Diaa Abdel Maged Khalil , Mohamed Sadek
CPC classification number: G02B26/001 , B81B5/00 , G01B9/02049 , G01J1/0411 , G02B1/005 , G02B6/24 , G02B6/262 , G02B6/29368 , G02B6/29395 , G02B6/3514 , G02B6/3518 , G02B6/353 , G02B6/357 , G02B6/3584 , G02B6/3616 , G02B26/02 , G02B26/023
Abstract: An integrated apertured micromirror is provided in which the micromirror is monolithically integrated with a micro-optical bench fabricated on a substrate using a lithographic and deep etching technique. The micromirror has an aperture therein and is oriented such that the micromirror is optically coupled to receive an incident beam having an optical axis in a plane of the substrate and to at least partially transmit the incident beam therethrough via the aperture.
Abstract translation: 提供了一种集成的有孔微镜，其中微镜与使用光刻和深蚀刻技术在基板上制造的微型光学台单片集成。 微镜在其中具有孔，并且被定向成使得微反射镜被光学耦合以接收在衬底的平面中具有光轴的入射光束，并且至少部分地透射经由孔的入射光束。
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公开(公告)号：US10562055B2
公开(公告)日：2020-02-18
申请号：US15047032
申请日：2016-02-18
Applicant: Si-Ware Systems
Inventor： Mostafa Medhat , Bassem Mortada , Yasser Sabry , Sebastian Nazeer , Yasseen Nada , Mohamed Sadek , Bassam A. Saadany
Abstract: A shadow mask having two or more levels of openings enables selective step coverage of micro-fabricated structures within a micro-optical bench device. The shadow mask includes a first opening within a top surface of the shadow mask and a second opening within the bottom surface of the shadow mask. The second opening is aligned with the first opening and has a second width less than a first width of the first opening. An overlap between the first opening and the second opening forms a hole within the shadow mask through which selective coating of micro-fabricated structures within the micro-optical bench device may occur.
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公开(公告)号：US10120134B2
公开(公告)日：2018-11-06
申请号：US15047205
申请日：2016-02-18
Applicant: Si-Ware Systems
Inventor： Bassam Saadany , Yasser M. Sabry , Mostafa Medhat , Bassem Mortada , Muhammed Nagi , Mohamed Sadek , Yasseen Nada , Khaled Hassan
Abstract: A micro-optical bench device is fabricated by a process that provides control over one or more properties of the micro-optical bench device and/or one or more properties of optical surfaces in the micro-optical bench device. The process includes etching a substrate to form a permanent structure including optical elements and a temporary structure. The shape of the temporary structure and gaps between the temporary structure and permanent structure facilitate control of a property of the micro-optical bench and/or optical surfaces therein. The process further includes removing the temporary structure from an optical path of the micro-optical bench device.
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