Abstract:
Aspects of the disclosure relate to an integrated spectral unit including a micro-electro-mechanical systems (MEMS) interferometer fabricated within a first substrate and a light redirecting structure integrated on a second substrate, where the second substrate is coupled to the first substrate. The light redirecting structure includes at least one mirror for receiving an input light beam propagating in an out-of-plane direction with respect to the first substrate and redirecting the input light beam to an in-plane direction with respect to the first substrate towards the MEMS interferometer.
Abstract:
Aspects relate to a compact material analyzer including a light source, a detector, and a module including a first optical window on a first side of the module, a second optical window on a second side of the module opposite the first side, and a light modulator. The light source produces input light at a high power that is passed through the first optical window to the light modulator. The light modulator is configured to attenuate the input light, produce modulated light based on the input light, and direct the modulated light through the second optical window to the sample. The modulated light produced by the light modulator is at a lower power safe for the sample. The detector is configured to receive output light from the sample produced from interaction with the modulated light through the second optical window and to detect a spectrum of the output light.
Abstract:
Aspects relate to a compact material analyzer including a light source, a detector, and a module including a first optical window on a first side of the module, a second optical window on a second side of the module opposite the first side, and a light modulator. The light source produces input light at a high power that is passed through the first optical window to the light modulator. The light modulator is configured to attenuate the input light, produce modulated light based on the input light, and direct the modulated light through the second optical window to the sample. The modulated light produced by the light modulator is at a lower power safe for the sample. The detector is configured to receive output light from the sample produced from interaction with the modulated light through the second optical window and to detect a spectrum of the output light.
Abstract:
Aspects of the disclosure relate to an integrated spectral unit including a micro-electro-mechanical systems (MEMS) interferometer fabricated within a first substrate and a light redirecting structure integrated on a second substrate, where the second substrate is coupled to the first substrate. The light redirecting structure includes at least one mirror for receiving an input light beam propagating in an out-of-plane direction with respect to the first substrate and redirecting the input light beam to an in-plane direction with respect to the first substrate towards the MEMS interferometer.
Abstract:
A micro-optical bench device is fabricated by a process that provides control over one or more properties of the micro-optical bench device and/or one or more properties of optical surfaces in the micro-optical bench device. The process includes etching a substrate to form a permanent structure including optical elements and a temporary structure. The shape of the temporary structure and gaps between the temporary structure and permanent structure facilitate control of a property of the micro-optical bench and/or optical surfaces therein. The process further includes removing the temporary structure from an optical path of the micro-optical bench device.
Abstract:
A micro-optical bench device is fabricated by a process that provides control over one or more properties of the micro-optical bench device and/or one or more properties of optical surfaces in the micro-optical bench device. The process includes etching a substrate to form a permanent structure including optical elements and a temporary structure. The shape of the temporary structure and gaps between the temporary structure and permanent structure facilitate control of a property of the micro-optical bench and/or optical surfaces therein. The process further includes removing the temporary structure from an optical path of the micro-optical bench device.