公开(公告)号：US20170125429A1

公开(公告)日：2017-05-04

申请号：US15295022

申请日：2016-10-17

Applicant: Silicon Storage Technology, Inc.

Inventor： CHIEN-SHENG SU ,  FENG ZHOU ,  JENG-WEI YANG ,  HIEU VAN TRAN ,  NHAN DO

IPC: H01L27/115 ,  H01L29/423 ,  H01L29/66 ,  H01L21/28 ,  H01L29/788

CPC classification number: H01L27/11521 ,  H01L21/28273 ,  H01L27/11524 ,  H01L29/42328 ,  H01L29/66825 ,  H01L29/788 ,  H01L29/7881

Abstract: A memory device including a silicon substrate having a planar upper surface in a memory cell area and an upwardly extending silicon fin in a logic device area. The silicon fin includes side surfaces extending up and terminating at a top surface. The logic device includes spaced apart source and drain regions with a channel region extending there between (along the top surface and the side surfaces), and a conductive logic gate disposed over the top surface and laterally adjacent to the side surfaces. The memory cell includes spaced apart source and drain regions with a second channel region extending there between, a conductive floating gate disposed over one portion of the second channel region, a conductive word line gate disposed over another portion of the second channel region, a conductive control gate disposed over the floating gate, and a conductive erase gate disposed over the source region.

公开(公告)号：US20170098654A1

公开(公告)日：2017-04-06

申请号：US15225393

申请日：2016-08-01

Applicant: Silicon Storage Technology, Inc.

Inventor： FENG ZHOU ,  XIAN LIU ,  JENG-WEI YANG ,  CHIEN-SHENG SU ,  NHAN DO

IPC: H01L27/115 ,  H01L29/66 ,  H01L29/423 ,  H01L29/788 ,  H01L29/49

CPC classification number: H01L27/11521 ,  H01L21/28273 ,  H01L21/8238 ,  H01L29/42328 ,  H01L29/42332 ,  H01L29/4916 ,  H01L29/66825 ,  H01L29/7881 ,  H01L29/7883

Abstract: A method of forming a pair of memory cells that includes forming a polysilicon layer over and insulated from a semiconductor substrate, forming a pair of conductive control gates over and insulated from the polysilicon layer, forming first and second insulation layers extending along inner and outer side surfaces of the control gates, removing portions of the polysilicon layer adjacent the outer side surfaces of the control gates, forming an HKMG layer on the structure and removing portions thereof between the control gates, removing a portion of the polysilicon layer adjacent the inner side surfaces of the control gates, forming a source region in the substrate adjacent the inner side surfaces of the control gates, forming a conductive erase gate over and insulated from the source region, forming conductive word line gates laterally adjacent to the control gates, and forming drain regions in the substrate adjacent the word line gates.