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公开(公告)号：US12087606B2
公开(公告)日：2024-09-10
申请号：US17894328
申请日：2022-08-24
发明人： Masahiro Osawa , Toshihiro Kawai
IPC分类号： H01L21/673
CPC分类号： H01L21/67396 , H01L21/67389
摘要： An EFEM includes a housing having a substantially closed substrate transfer space in the housing and a control part configured to perform a control of supplying an inert gas into at least the housing. The control part includes an inert gas total supply amount setting part configured to set a total supply amount of the inert gas to be supplied into the housing; a door open/purge determination part configured to determine whether a container door of a substrate storage container is in an open state and whether a purge device is performing a purge process; and an in-housing inert gas supply amount calculation part configured to calculate a supply amount of the inert gas to be supplied into the housing. The supply amount of the inert gas to be supplied into the housing is determined according to an inert gas supply amount command value determined based on a calculation result.
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公开(公告)号：US09239228B2
公开(公告)日：2016-01-19
申请号：US14689551
申请日：2015-04-17
CPC分类号： G01B11/002 , G01B11/14 , G01B11/22 , G01B11/24 , G01N21/64 , G01N35/1016 , G01N2035/1025 , H01L21/67265
摘要： The left-right span between a light projection section 5a and a light receiving section 5b of a mapping sensor 5 having an optical axis L1 extending in a left-right horizontal direction is arranged to be narrower than the span of a front opening of a open cassette 12 which is a smaller one of differently-sized containers conveyed to a load port, and the mapping sensor is attached to a mapping device 4. A first protrusion sensor 6 having an optical axis L2 extending in the left-right horizontal direction is attached to the mapping device 4 to be separated from the mapping sensor 5 in a moving direction of the mapping sensor 5. Furthermore, a second protrusion sensor 7 having an optical axis extending in the up-down moving direction of the mapping sensor 5 is provided.
摘要翻译： 在具有沿左右水平方向延伸的光轴L1的映射传感器5的光投射部分5a和光接收部分5b之间的左右跨度布置成比开口的前开口的跨度窄 盒式录像带12是不同尺寸的容器中较小的一个传送到负载端口的盒式磁带12，并且映射传感器附接到映射装置4.附接有沿左右水平方向延伸的光轴L2的第一突出传感器6 到映射装置4，以在映射传感器5的移动方向上与映射传感器5分离。此外，提供具有在映射传感器5的上下移动方向上延伸的光轴的第二突起传感器7。
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公开(公告)号：US20230066029A1
公开(公告)日：2023-03-02
申请号：US17894328
申请日：2022-08-24
发明人： Masahiro Osawa , Toshihiro Kawai
IPC分类号： H01L21/673
摘要： An EFEM includes a housing having a substantially closed substrate transfer space in the housing and a control part configured to perform a control of supplying an inert gas into at least the housing. The control part includes an inert gas total supply amount setting part configured to set a total supply amount of the inert gas to be supplied into the housing; a door open/purge determination part configured to determine whether a container door of a substrate storage container is in an open state and whether a purge device is performing a purge process; and an in-housing inert gas supply amount calculation part configured to calculate a supply amount of the inert gas to be supplied into the housing. The supply amount of the inert gas to be supplied into the housing is determined according to an inert gas supply amount command value determined based on a calculation result.
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公开(公告)号：US20150308812A1
公开(公告)日：2015-10-29
申请号：US14689551
申请日：2015-04-17
IPC分类号： G01B11/00
CPC分类号： G01B11/002 , G01B11/14 , G01B11/22 , G01B11/24 , G01N21/64 , G01N35/1016 , G01N2035/1025 , H01L21/67265
摘要： The left-right span between a light projection section 5a and a light receiving section 5b of a mapping sensor 5 having an optical axis L1 extending in a left-right horizontal direction is arranged to be narrower than the span of a front opening of a open cassette 12 which is a smaller one of differently-sized containers conveyed to a load port, and the mapping sensor is attached to a mapping device 4. A first protrusion sensor 6 having an optical axis L2 extending in the left-right horizontal direction is attached to the mapping device 4 to be separated from the mapping sensor 5 in a moving direction of the mapping sensor 5. Furthermore, a second protrusion sensor 7 having an optical axis extending in the up-down moving direction of the mapping sensor 5 is provided.
摘要翻译： 在具有沿左右水平方向延伸的光轴L1的映射传感器5的光投射部分5a和光接收部分5b之间的左右跨度布置成比开口的前开口的跨度窄 盒式录像带12是不同尺寸的容器中较小的一个传送到负载端口的盒式磁带12，并且映射传感器附接到映射装置4.附接有沿左右水平方向延伸的光轴L2的第一突出传感器6 到映射装置4，以在映射传感器5的移动方向上与映射传感器5分离。此外，提供具有在映射传感器5的上下移动方向上延伸的光轴的第二突起传感器7。
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