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公开(公告)号：US20070015093A1
公开(公告)日：2007-01-18
申请号：US11476660
申请日：2006-06-29
IPC分类号： G03C5/00
CPC分类号： G03F7/0035 , G02F1/1339 , G03F7/0007 , G03F7/40
摘要： A method for manufacturing a printing plate is realizes a precise and fine pattern by minimizing a variation of etching critical dimension. The method includes forming a hard mask having an opening on an insulating substrate; forming a first trench having a first depth in the insulating substrate using the hard mask; coating, patterning and developing a first photoresist over an entire surface of the insulating substrate including the hard mask; and forming at least a second trench having a second depth in the insulating substrate using the hard mask, wherein the second depth is deeper than the first depth.
摘要翻译： 制版印版的方法通过最小化蚀刻临界尺寸的变化来实现精确和精细的图案。 该方法包括在绝缘基板上形成具有开口的硬掩模; 使用所述硬掩模在所述绝缘基板中形成具有第一深度的第一沟槽; 在包括硬掩模的绝缘基板的整个表面上涂覆，图案化和显影第一光致抗蚀剂; 以及使用所述硬掩模在所述绝缘基板中形成具有第二深度的至少第二沟槽，其中所述第二深度比所述第一深度更深。
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公开(公告)号：US20070002249A1
公开(公告)日：2007-01-04
申请号：US11471648
申请日：2006-06-21
申请人： Soon Yoo , Oh Kwon , Youn Chang , Heung Cho , Seung Nam
发明人： Soon Yoo , Oh Kwon , Youn Chang , Heung Cho , Seung Nam
IPC分类号： G02F1/1343
CPC分类号： G02F1/134363 , G02F1/136213 , G02F1/136286 , G02F2001/13629 , G02F2001/136295
摘要： A liquid crystal display device and a fabricating method thereof for simplifying a process are disclosed. In the method of fabricating the liquid crystal display device, a first conductive pattern group including a gate line and a gate electrode, a common line and a common electrode, a pixel electrode and a pad in a multiple conductive layer having a stepwise shape including a transparent conductive layer is formed on a substrate by a first mask process. An insulating film and a semiconductor layer including a plurality of contact holes are formed on the first mask pattern group by a second mask process. A second pattern group including a data line, a source electrode and a drain electrode is formed on the semiconductor layer and the semiconductor layer is patterned, and an active layer is exposed between the source electrode and the drain electrode by a third mask process.
摘要翻译： 公开了一种用于简化处理的液晶显示装置及其制造方法。 在制造液晶显示装置的方法中，包括栅极线和栅电极，公共线和公共电极的第一导电图案组，具有逐层形状的多导电层中的像素电极和焊盘，包括 通过第一掩模工艺在衬底上形成透明导电层。 通过第二掩模处理在第一掩模图案组上形成包括多个接触孔的绝缘膜和半导体层。 在半导体层上形成包括数据线，源电极和漏电极的第二图案组，对半导体层进行构图，通过第三掩模工艺在源电极和漏电极之间露出有源层。
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3.发明申请Method of forming fine pattern, liquid crystal display device having a fine pattern and fabricating method thereof 有权形成精细图案的方法，具有精细图案的液晶显示装置及其制造方法公开(公告)号：US20070001979A1
公开(公告)日：2007-01-04
申请号：US11473590
申请日：2006-06-23
IPC分类号： G09G3/36
CPC分类号： G02F1/13439 , G02F1/134363 , G02F1/136286 , G02F2201/123
摘要： This invention relates to a method of forming fine pattern that is adaptive for forming a fine pattern without limit of an exposure resolution, a liquid crystal display device and a fabricating method. The method of forming fine pattern comprises forming a photo-resist pattern on a transparent conductive layer. The photo-resist pattern having a minimum line width corresponding to an exposure resolution of an exposure device. The method further comprises over-etching the transparent conductive layer by an etching process using the photo-resist pattern as a mask to form an electrode pattern having a line width narrower than the exposure resolution of the exposure device.
摘要翻译： 本发明涉及一种形成精细图案的方法，该方法适于形成无限制的曝光分辨率的精细图案，液晶显示装置和制造方法。 形成精细图案的方法包括在透明导电层上形成光刻胶图案。 具有对应于曝光装置的曝光分辨率的最小线宽的光刻胶图案。 该方法还包括通过使用光致抗蚀剂图案作为掩模的蚀刻工艺来过度蚀刻透明导电层，以形成具有比曝光装置的曝光分辨率窄的线宽的电极图案。
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公开(公告)号：US20060290867A1
公开(公告)日：2006-12-28
申请号：US11471653
申请日：2006-06-21
IPC分类号： G02F1/1343
CPC分类号： G02F1/134363 , G02F1/13439 , G02F1/136213 , G02F1/136286 , G02F2001/13629 , G02F2001/136295
摘要： A liquid crystal display device and a fabricating method thereof for simplifying a process are disclosed. In the method of fabricating the liquid crystal display device, a first conductive pattern group including a gate line and a gate electrode, a common line and a common electrode, a pixel electrode and a pad is formed on a substrate. An insulating film including a plurality of contact holes and a semiconductor pattern is formed on the first mask pattern group. And a second conductive pattern group including a data line, a source electrode and a drain electrode is formed on an insulating film provided with the semiconductor pattern, and exposes an active layer of the semiconductor pattern
摘要翻译： 公开了一种用于简化处理的液晶显示装置及其制造方法。 在制造液晶显示装置的方法中，在基板上形成包括栅极线和栅电极的第一导电图案组，公共线和公共电极，像素电极和焊盘。 在第一掩模图案组上形成包括多个接触孔和半导体图案的绝缘膜。 并且在设置有半导体图案的绝缘膜上形成包括数据线，源极和漏电极的第二导电图案组，并且暴露半导体图案的有源层
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5.发明申请Apparatus and method for rubbing alignment layer of liquid crystal display device 有权用于摩擦液晶显示装置取向层的装置和方法公开(公告)号：US20060274245A1
公开(公告)日：2006-12-07
申请号：US11410852
申请日：2006-04-26
IPC分类号： G02F1/1337
CPC分类号： G02F1/133784 , G02F1/1303
摘要： An apparatus and method for rubbing an alignment layer of an LCD device is disclosed. The alignment layer is rubbed over an entire surface of a substrate at uniform pressure and dust or particle is not adsorbed into the alignment layer during rubbing process. The apparatus for rubbing an alignment layer of an LCD device includes a rubbing means to rub the alignment layer while the rubbing means is rotated along one direction to contact a surface of the alignment layer formed on a substrate, and a liquid jet to jet liquid when the alignment layer is rubbed by the rubbing means.
摘要翻译： 公开了一种用于摩擦LCD装置的取向层的装置和方法。 取向层在均匀的压力下在基片的整个表面上摩擦，并且在摩擦过程中灰尘或颗粒不被吸附到取向层中。 用于摩擦LCD装置的取向层的装置包括摩擦装置，当摩擦装置沿着一个方向旋转以摩擦取向层时，接触基板上形成的取向层的表面，并且液体喷射到喷射液体时， 对准层被摩擦装置摩擦。
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公开(公告)号：US20060126003A1
公开(公告)日：2006-06-15
申请号：US11289449
申请日：2005-11-30
IPC分类号： G02F1/13
CPC分类号： G02F1/136259
摘要： The present invention relates to an apparatus and method for repairing a liquid crystal display panel, which is capable of improving a yield thereof by darkening a bright point to minimize a defect ratio thereof. An apparatus for repairing a liquid crystal display panel according to the present invention includes: a liquid crystal display panel including a repair film formed on any one of a first substrate and a second substrate, which are facing to each other with a liquid crystal layer therebetween; and a laser irradiating device to irradiate a laser to the repair film to darken a specific area of the repair film, which is corresponded to an area where a bright point appears in the liquid crystal display panel.
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公开(公告)号：US20070218577A1
公开(公告)日：2007-09-20
申请号：US11643653
申请日：2006-12-22
IPC分类号： H01L21/00
CPC分类号： G02F1/13458 , G02F1/136286 , G02F2001/136236 , H01L27/124 , H01L27/1288 , H01L29/66742
摘要： A liquid crystal display (LCD) panel is fabricated with a reduced number of mask processes and includes a thin film transistor (TFT) array substrate and a color filter array substrate. The TFT array substrate includes gate and data lines insulatively crossing each other to define a pixel area, a TFT provided at the crossing of the gate and data lines, a passivation film protecting the TFT, a pixel electrode partially overlapped by the TFT, a gate pad connected to the gate line, and a data pad connected to the data line. The gate line, the gate and data pads, and the pixel electrode include a transparent conductive material. A gate metal material is on the transparent conductive material where the TFT partially overlaps the pixel electrode. The passivation film over the gate and data pads is removed to expose the transparent conductive material included within the gate and data pads.
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公开(公告)号：US20050077524A1
公开(公告)日：2005-04-14
申请号：US10963925
申请日：2004-10-14
IPC分类号： G02F1/136 , G02F1/1362 , H01L21/336 , H01L21/77 , H01L21/84 , H01L27/12 , H01L29/04
CPC分类号： G02F1/13458 , G02F1/136286 , G02F2001/136236 , H01L27/124 , H01L27/1288 , H01L29/66742
摘要： A liquid crystal display (LCD) panel is fabricated with a reduced number of mask processes and includes a thin film transistor (TFT) array substrate and a color filter array substrate. The TFT array substrate includes gate and data lines insulatively crossing each other to define a pixel area, a TFT provided at the crossing of the gate and data lines, a passivation film protecting the TFT, a pixel electrode partially overlapped by the TFT, a gate pad connected to the gate line, and a data pad connected to the data line. The gate line, the gate and data pads, and the pixel electrode include a transparent conductive material. A gate metal material is on the transparent conductive material where the TFT partially overlaps the pixel electrode. The passivation film over the gate and data pads is removed to expose the transparent conductive material included within the gate and data pads.
摘要翻译： 液晶显示器（LCD）面板以较少数量的掩模工艺制造，并且包括薄膜晶体管（TFT）阵列基板和滤色器阵列基板。 TFT阵列基板包括彼此绝缘交叉以限定像素区域的栅极和数据线，设置在栅极和数据线的交叉处的TFT，保护TFT的钝化膜，与TFT部分重叠的像素电极，栅极 焊盘连接到栅极线，以及连接到数据线的数据焊盘。 栅极线，栅极和数据焊盘以及像素电极包括透明导电材料。 栅极金属材料在透明导电材料上，其中TFT部分地与像素电极重叠。 去除栅极和数据焊盘上的钝化膜以暴露包括在栅极和数据焊盘内的透明导电材料。
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公开(公告)号：US20070004108A1
公开(公告)日：2007-01-04
申请号：US11474977
申请日：2006-06-27
IPC分类号： H01L21/84
CPC分类号： H01L27/1288 , H01L27/1214 , Y10S438/951
摘要： A method and an apparatus of fabricating a liquid crystal display device adapted to improve a lift-off efficiency are disclosed. The liquid crystal display device is also disclosed. The method includes forming a first thin film on a substrate; forming a photo-resist pattern on the first thin film; etching the first thin film using the photo-resist pattern as a mask; forming a second thin film on the substrate having the photo-resist pattern; forming a plurality of stripper infiltration paths; and removing the photo-resist pattern and the second thin film using a stripper within the stripper infiltration paths. The device includes two substrates facing each other; a liquid crystal layer; data lines and gate lines that cross each other to define pixel regions; thin film transistors; pixel electrodes connected to the thin film transistors; and an inorganic layer in each pixel region, wherein the inorganic layer includes a plurality of cracks.
摘要翻译： 公开了一种制造适于提高剥离效率的液晶显示装置的方法和装置。 还公开了液晶显示装置。 该方法包括在基板上形成第一薄膜; 在所述第一薄膜上形成光刻胶图案; 使用光刻胶图案作为掩模蚀刻第一薄膜; 在具有光致抗蚀剂图案的基板上形成第二薄膜; 形成多个汽提器渗透路径; 以及在剥离器渗透路径内使用剥离剂去除光致抗蚀剂图案和第二薄膜。 该装置包括彼此面对的两个基板; 液晶层; 数据线和栅极线彼此交叉以限定像素区域; 薄膜晶体管; 连接到薄膜晶体管的像素电极; 和每个像素区域中的无机层，其中无机层包括多个裂纹。
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公开(公告)号：US20060138426A1
公开(公告)日：2006-06-29
申请号：US11172036
申请日：2005-06-30
IPC分类号： H01L29/04
CPC分类号： G02F1/134363 , G02F1/13458 , G02F1/136227 , G02F2001/136272 , G02F2001/13629
摘要： A liquid crystal display device according to an embodiment of the present invention includes: a gate line formed on a substrate; a data line to provide a pixel area by crossing the gate line with a gate insulating film therebetween; a common line formed in parallel to the gate line; a thin film transistor connected to the gate line and the data line; a passivation film formed to cover the thin film transistor; a contact hole which penetrates the passivation film; a pixel electrode connected with the thin film transistor; and a common electrode connected with the common line to form a horizontal electric field with the pixel electrode, and wherein at lease one of the gate line, the data line, the common line, the pixel electrode and the common electrode is composed of a first conductive layer and a second conductive layer which is formed to cover the first conductive layer by being extended more outward than the first conductive layer, and is formed to have a border with the passivation film within the contact hole.
摘要翻译： 根据本发明的实施例的液晶显示装置包括：形成在基板上的栅极线; 数据线，通过使栅极线与栅极绝缘膜交叉而提供像素区域; 与栅极线并联形成的公共线; 连接到栅极线和数据线的薄膜晶体管; 形成为覆盖薄膜晶体管的钝化膜; 穿过钝化膜的接触孔; 与薄膜晶体管连接的像素电极; 以及与公共线连接以与像素电极形成水平电场的公共电极，并且其中栅极线，数据线，公共线，像素电极和公共电极中的至少一个由第一 导电层和第二导电层，其被形成为通过比第一导电层更向外延伸来覆盖第一导电层，并且形成为与接触孔内的钝化膜具有边界。
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