公开(公告)号：US07612479B2

公开(公告)日：2009-11-03

申请号：US11473110

申请日：2006-06-23

申请人： Akira Doi ,  Haruaki Otsuki ,  Atsushi Sakamoto ,  Souichi Toyama ,  Yaichi Okubo

发明人： Akira Doi ,  Haruaki Otsuki ,  Atsushi Sakamoto ,  Souichi Toyama ,  Yaichi Okubo

IPC分类号： H02K21/12

CPC分类号： H02K1/2733 ,  H02K29/03

摘要： A scanner has a rotor, and a stator disposed in the outside of the rotor. The rotor includes a shaft, and a permanent magnet mounted on the outer circumferential side of the shaft. The stator includes a casing, a yoke held in the inner circumferential side of the casing, and coils disposed in the inner circumferential side of the yoke. The permanent magnet of the rotor has radially depressed grooves formed in its outer circumferential portion. The torque constant of the scanner is circumferentially equalized by the grooves.

摘要翻译： 扫描器具有转子和设置在转子外侧的定子。 转子包括轴和安装在轴的外周侧上的永磁体。 定子包括壳体，保持在壳体的内周侧的轭和设置在轭的内周侧的线圈。 转子的永磁体在其外周部形成有径向凹槽。 扫描仪的转矩常数由凹槽周向平衡。

公开(公告)号：US07023598B2

公开(公告)日：2006-04-04

申请号：US10758287

申请日：2004-01-16

申请人： Souichi Toyama ,  Atsushi Sakamoto ,  Haruaki Otsuki ,  Yaichi Okubo

发明人： Souichi Toyama ,  Atsushi Sakamoto ,  Haruaki Otsuki ,  Yaichi Okubo

IPC分类号： G02B26/08

CPC分类号： G02B26/105

摘要： An optical scanner which can realize target trajectory tracking machining at a high speed and with a high accuracy. In a servo control circuit controlling the operation of an X-axis scanner for positioning a mirror and the operation of a Y-axis scanner for positioning another mirror, sine wave response is performed at a specific frequency on feedback control for each axis so that the gain characteristic and the phase characteristic of the feedback control are estimated. This arithmetic operation processing is performed by a microprocessor prior to machining, and the results of estimation of the two axes are stored as data for each frequency. In the stage of machining, the results of estimation in terms of the gain characteristic and the phase characteristic are used for correcting the amplitude and phase of a sine wave of a target trajectory in order to cancel each characteristic.

摘要翻译： 一种可以高速，高准确地实现目标轨迹跟踪加工的光学扫描仪。 在控制用于定位反射镜的X轴扫描仪的操作的伺服控制电路以及用于定位另一镜的Y轴扫描器的操作中，在每个轴的反馈控制上以特定频率执行正弦波响应，使得 估计反馈控制的增益特性和相位特性。 这种算术运算处理在加工之前由微处理器执行，并且两轴的估计结果作为每个频率的数据被存储。 在加工阶段，根据增益特性和相位特性的估计结果，用于校正目标轨迹的正弦波的振幅和相位，以消除每个特性。

公开(公告)号：US20050128553A1

公开(公告)日：2005-06-16

申请号：US10927082

申请日：2004-08-27

申请人： Souichi Toyama ,  Haruaki Otsuki ,  Atsushi Sakamoto ,  Kenta Seki ,  Yaichi Okubo

发明人： Souichi Toyama ,  Haruaki Otsuki ,  Atsushi Sakamoto ,  Kenta Seki ,  Yaichi Okubo

IPC分类号： B23K26/08 ,  G02B26/10 ,  H05K3/00 ,  B23K26/06

CPC分类号： G02B26/105 ,  B23K26/08 ,  B23K26/082 ,  H05K3/0026

摘要： A scanner system includes a servo control unit. A rotation angle of a rotating shaft supporting a mirror is detected, and an error of the detected value with respect to a commanded value is integrated by an integral compensator so that the detected value is able to track the commanded value. A tracking error proportional compensator is disposed in parallel with the integral compensator so as to add a correction value proportional to the error to the integrated value of the error. A plurality of gains are prepared for each of the integral compensator, the tracking error proportional compensator, a detected value proportional compensator and a detected value differential compensator of the servo control unit. Each gain is changed in accordance with a travel angle of the commanded value. Thus, the mirror can be positioned quickly so that the machining speed can be improved.

摘要翻译： 扫描仪系统包括伺服控制单元。 检测支撑反射镜的旋转轴的旋转角度，并且通过积分补偿器将检测值相对于指令值的误差积分，使得检测值能够跟踪指令值。 跟踪误差比例补偿器与积分补偿器并联设置，以便将误差成比例的校正值与误差的积分值相加。 为积分补偿器，跟踪误差比例补偿器，检测值比例补偿器和伺服控制单元的检测值差分补偿器中的每一个准备多个增益。 每个增益根据指令值的行进角度而改变。 因此，可以快速地定位镜子，从而可以提高加工速度。

公开(公告)号：US07432681B2

公开(公告)日：2008-10-07

申请号：US10927082

申请日：2004-08-27

申请人： Souichi Toyama ,  Haruaki Otsuki ,  Atsushi Sakamoto ,  Kenta Seki ,  Yaichi Okubo

发明人： Souichi Toyama ,  Haruaki Otsuki ,  Atsushi Sakamoto ,  Kenta Seki ,  Yaichi Okubo

IPC分类号： G05B11/42

CPC分类号： G02B26/105 ,  B23K26/08 ,  B23K26/082 ,  H05K3/0026

摘要： A scanner system includes a servo control unit. A rotation angle of a rotating shaft supporting a mirror is detected, and an error of the detected value with respect to a commanded value is integrated by an integral compensator so that the detected value is able to track the commanded value. A tracking error proportional compensator is disposed in parallel with the integral compensator so as to add a correction value proportional to the error to the integrated value of the error. A plurality of gains are prepared for each of the integral compensator, the tracking error proportional compensator, a detected value proportional compensator and a detected value differential compensator of the servo control unit. Each gain is changed in accordance with a travel angle of the commanded value. Thus, the mirror can be positioned quickly so that the machining speed can be improved.

摘要翻译： 扫描仪系统包括伺服控制单元。 检测支撑反射镜的旋转轴的旋转角度，并且通过积分补偿器将检测值相对于指令值的误差积分，使得检测值能够跟踪指令值。 跟踪误差比例补偿器与积分补偿器并联设置，以便将误差成比例的校正值与误差的积分值相加。 为积分补偿器，跟踪误差比例补偿器，检测值比例补偿器和伺服控制单元的检测值差分补偿器中的每一个准备多个增益。 每个增益根据指令值的行进角度而改变。 因此，可以快速地定位镜子，从而可以提高加工速度。

公开(公告)号：US20070007828A1

公开(公告)日：2007-01-11

申请号：US11473110

申请日：2006-06-23

申请人： Akira Doi ,  Haruaki Otsuki ,  Atsushi Sakamoto ,  Souichi Toyama ,  Yaichi Okubo

发明人： Akira Doi ,  Haruaki Otsuki ,  Atsushi Sakamoto ,  Souichi Toyama ,  Yaichi Okubo

IPC分类号： H02K33/00 ,  H01F7/14

CPC分类号： H02K1/2733 ,  H02K29/03

摘要： A scanner has a rotor, and a stator disposed in the outside of the rotor. The rotor includes a shaft, and a permanent magnet mounted on the outer circumferential side of the shaft. The stator includes a casing, a yoke held in the inner circumferential side of the casing, and coils disposed in the inner circumferential side of the yoke. The permanent magnet of the rotor has radially depressed grooves formed in its outer circumferential portion. The torque constant of the scanner is circumferentially equalized by the grooves. Thus, positioning accuracy is improved.

摘要翻译： 扫描器具有转子和设置在转子外侧的定子。 转子包括轴和安装在轴的外周侧上的永磁体。 定子包括壳体，保持在壳体的内周侧的轭和设置在轭的内周侧的线圈。 转子的永磁体在其外周部形成有径向凹槽。 扫描仪的转矩常数由凹槽周向平衡。 因此，提高定位精度。

公开(公告)号：US20050184156A1

公开(公告)日：2005-08-25

申请号：US10929519

申请日：2004-08-31

申请人： Haruaki Otsuki ,  Souichi Toyama ,  Kenta Seki ,  Yaichi Okubo ,  Daisuke Kitamura

发明人： Haruaki Otsuki ,  Souichi Toyama ,  Kenta Seki ,  Yaichi Okubo ,  Daisuke Kitamura

IPC分类号： B23K26/00 ,  B23K26/08 ,  G02B5/08 ,  G02B7/182 ,  G02B26/00 ,  G02B26/10 ,  G02B26/12 ,  G06K7/10 ,  G06K7/14 ,  H05K3/00

CPC分类号： G02B26/105 ,  G02B7/1821

摘要： A optical scanner control method and a optical scanner capable of positioning a mirror at a high speed independently of a rocking angle, and a laser machining apparatus for irradiating a printed circuit board with a laser beam by use of the optical scanner to thereby perforate the printed circuit board. In order to operate an actuator for rocking the mirror based on a deviation of a current position from an commanded value, a change in gain of the actuator is measured in accordance with each rocking angle in advance, and the manipulated variable of the actuator is corrected to cancel the change in gain. Thus, the influence of the alteration of a torque constant in accordance with the rocking angle can be suppressed so that the response characteristic becomes uniform all over a scanning region, and the positioning speed can be improved.

摘要翻译： 一种光学扫描仪控制方法和能够独立于摇摆角度高速定位反射镜的光学扫描仪，以及激光加工设备，用于通过使用光学扫描器用激光束照射印刷电路板，从而穿孔印刷 电路板。 为了操作基于当前位置与指令值的偏差来摇动反射镜的致动器，预先根据每个摇摆角度来测量致动器的增益的变化，并且校正致动器的操纵变量 取消收益变动。 因此，可以抑制根据摆动角度的转矩常数的变化的影响，使得在整个扫描区域上的响应特性变得均匀，并且可以提高定位速度。

公开(公告)号：US07270270B2

公开(公告)日：2007-09-18

申请号：US10929519

申请日：2004-08-31

申请人： Haruaki Otsuki ,  Souichi Toyama ,  Kenta Seki ,  Yaichi Okubo ,  Daisuke Kitamura

发明人： Haruaki Otsuki ,  Souichi Toyama ,  Kenta Seki ,  Yaichi Okubo ,  Daisuke Kitamura

IPC分类号： G06K7/10

CPC分类号： G02B26/105 ,  G02B7/1821

摘要： A optical scanner control method and a optical scanner capable of positioning a mirror at a high speed independently of a rocking angle, and a laser machining apparatus for irradiating a printed circuit board with a laser beam by use of the optical scanner to thereby perforate the printed circuit board. In order to operate an actuator for rocking the mirror based on a deviation of a current position from an commanded value, a change in gain of the actuator is measured in accordance with each rocking angle in advance, and the manipulated variable of the actuator is corrected to cancel the change in gain. Thus, the influence of the alteration of a torque constant in accordance with the rocking angle can be suppressed so that the response characteristic becomes uniform all over a scanning region, and the positioning speed can be improved.

摘要翻译： 一种光学扫描仪控制方法和能够独立于摇摆角度高速定位反射镜的光学扫描仪，以及激光加工设备，用于通过使用光学扫描器用激光束照射印刷电路板，从而穿孔印刷 电路板。 为了操作基于当前位置与指令值的偏差来摇动反射镜的致动器，预先根据每个摇摆角度来测量致动器的增益的变化，并且校正致动器的操纵变量 取消收益变动。 因此，可以抑制根据摆动角度的转矩常数的变化的影响，使得在整个扫描区域上的响应特性变得均匀，并且可以提高定位速度。

公开(公告)号：US08872064B2

公开(公告)日：2014-10-28

申请号：US11707153

申请日：2007-02-16

申请人： Takashi Ono ,  Souichi Toyama ,  Yaichi Okubo ,  Hiromu Hirai

发明人： Takashi Ono ,  Souichi Toyama ,  Yaichi Okubo ,  Hiromu Hirai

IPC分类号： B23K26/00 ,  G05B13/02 ,  G05B11/18 ,  G05B19/23

CPC分类号： G05B19/231 ,  G05B2219/41029 ,  G05B2219/41127 ,  G05B2219/45139

摘要： A positioning control system for positioning a moving element on a basis of position command data is provided with a feedback loop. The system is also provided with a loop gain modifier for determining a loop gain, which is to be used in a following positioning operation, on a basis of a difference between an amount of overshoot measured in a current positioning operation and a predetermined tolerance or on a basis of a difference between an amount of overshoot measured in a current positioning operation and a first predetermined tolerance and a difference between an amount of undershoot measured in the current positioning operation and a second predetermined tolerance. The first and second tolerances may preferably be the same in absolute value. The moving element may specifically be a steerable mirror for drilling holes in a work by reflecting a laser beam. Also disclosed is a laser drilling machine including the system.

摘要翻译： 基于位置指令数据定位移动元件的定位控制系统具有反馈回路。 该系统还设置有环路增益修正器，用于基于在当前定位操作中测量的过冲量与预定公差之间的差异或者在预定公差上基于在随后的定位操作中使用的环路增益来确定环路增益， 在当前定位操作中测量的过冲量与第一预定公差之间的差异与在当前定位操作中测量的下冲量之差与第二预定公差之间的差的基础。 第一和第二公差可以优选地具有相同的绝对值。 移动元件可以具体地是用于通过反射激光束在工件中钻孔的可操纵镜。 还公开了一种包括该系统的激光钻孔机。

公开(公告)号：US20050187650A1

公开(公告)日：2005-08-25

申请号：US11049706

申请日：2005-02-04

申请人： Souichi Toyama ,  Yaichi Okubo ,  Hiromu Hirai ,  Makoto Iwasaki ,  Motohiro Kawafuku ,  Noriaki Hirose

发明人： Souichi Toyama ,  Yaichi Okubo ,  Hiromu Hirai ,  Makoto Iwasaki ,  Motohiro Kawafuku ,  Noriaki Hirose

IPC分类号： G02B26/10 ,  B23K26/08 ,  B23K26/10 ,  B23K26/38 ,  G05B13/02 ,  G05D3/12 ,  G06F19/00

CPC分类号： B23K26/10 ,  B23K26/382 ,  B23K2103/50

摘要： A difference between each position command data outputted in a form of a step signal from a high-level controller and its corresponding detected position data of a movable body is integrated by an integral compensator to position the movable body. Assuming, for example, that the movable body is a steerable mirror, digital filters are arranged to compensate the value of an initial state of an angular displacement and the value of an initial state of an angular velocity, respectively, and respective impulse responses of the digital filters as additional input elements are added to an output terminal of the integral compensator. For higher effectiveness, internal state variables of the digital filters can desirably be cleared to zero whenever an angle (position) command data is received.

摘要翻译： 通过积分补偿器将来自高级别控制器的步进信号输出的每个位置指令数据和可移动体的对应检测位置数据之间的差积分在一起，以定位移动体。 假设例如可移动体是可转向反射镜，数字滤波器被布置成分别补偿角位移的初始状态的值和角速度的初始状态的值以及相应的脉冲响应 作为附加输入元件的数字滤波器被添加到积分补偿器的输出端子。 为了更高的有效性，每当接收到角度（位置）命令数据时，数字滤波器的内部状态变量可期望地被清除为零。

公开(公告)号：US07768225B2

公开(公告)日：2010-08-03

申请号：US11049706

申请日：2005-02-04

申请人： Souichi Toyama ,  Yaichi Okubo ,  Hiromu Hirai ,  Makoto Iwasaki ,  Motohiro Kawafuku ,  Noriaki Hirose

发明人： Souichi Toyama ,  Yaichi Okubo ,  Hiromu Hirai ,  Makoto Iwasaki ,  Motohiro Kawafuku ,  Noriaki Hirose

IPC分类号： G06F19/00 ,  B23K26/04

CPC分类号： B23K26/10 ,  B23K26/382 ,  B23K2103/50

摘要： A difference between each position command data outputted in a form of a step signal from a high-level controller and its corresponding detected position data of a movable body is integrated by an integral compensator to position the movable body. Assuming, for example, that the movable body is a steerable mirror, digital filters are arranged to compensate the value of an initial state of an angular displacement and the value of an initial state of an angular velocity, respectively, and respective impulse responses of the digital filters as additional input elements are added to an output terminal of the integral compensator. For higher effectiveness, internal state variables of the digital filters can desirably be cleared to zero whenever an angle (position) command data is received.

摘要翻译： 通过积分补偿器将来自高级别控制器的步进信号输出的每个位置指令数据和可移动体的对应检测位置数据之间的差积分在一起，以定位移动体。 假设例如可移动体是可转向反射镜，数字滤波器被布置成分别补偿角位移的初始状态的值和角速度的初始状态的值以及相应的脉冲响应 作为附加输入元件的数字滤波器被添加到积分补偿器的输出端子。 为了更高的有效性，每当接收到角度（位置）命令数据时，数字滤波器的内部状态变量可期望地被清除为零。