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    MEMS ACTUATORS AND SWITCHES
    1.
    发明申请
    MEMS ACTUATORS AND SWITCHES 失效
    MEMS执行器和开关

    公开(公告)号：US20080223699A1

    公开(公告)日：2008-09-18

    申请号：US11687572

    申请日：2007-03-16

    申请人： Stephane Menard ,  Jun Lu ,  Nicolas Gonon

    发明人： Stephane Menard ,  Jun Lu ,  Nicolas Gonon

    IPC分类号： H01H57/00

    CPC分类号： H01H61/04 ,  H01H2061/008

    摘要： Microelectromechanical (MEMS) structures and switches employing movable actuators wherein particular ones of which move perpendicular to an underlying substrate and particular others move in a direction substantially parallel to the underlying substrate thereby providing more positive actuation.

    摘要翻译： 使用可移动致动器的微机电（MEMS）结构和开关，其中特定的其中一些垂直于下面的衬底移动，特别是其它致动器在基本上平行于下面的衬底的方向上移动，从而提供更多的正致动。

    MEMS actuators with even stress distribution
    2.
    发明申请
    MEMS actuators with even stress distribution 审中-公开
    具有均匀应力分布的MEMS致动器

    公开(公告)号：US20090033454A1

    公开(公告)日：2009-02-05

    申请号：US11882457

    申请日：2007-08-01

    申请人： Stephane Menard ,  Nicolas Gonon ,  Jean-Francois Saheb

    发明人： Stephane Menard ,  Nicolas Gonon ,  Jean-Francois Saheb

    IPC分类号： H01H37/00

    CPC分类号： B81B3/0072 ,  B81B2201/014 ,  B81B2203/051 ,  H01H2061/008

    摘要： The micro-electromechanical (MEMS) switch comprises a first double-sided cantilever MEMS actuator attached to a substrate and movable in two opposite directions, and a second cantilever MEMS actuator attached to the substrate. In use, the first MEMS actuator is moved in either directions to distribute the stress more uniformly, thereby reducing the mechanical creep and improving its reliability as well as its operation life.

    摘要翻译： 微机电（MEMS）开关包括附接到基板并可在两个相反方向上移动的第一双边悬臂MEMS致动器和附接到基板的第二悬臂MEMS致动器。 在使用中，第一MEMS致动器在任一方向上移动以更均匀地分布应力，从而减少机械蠕变并提高其可靠性以及其使用寿命。

    MEMS actuators and switches
    3.
    发明授权
    MEMS actuators and switches 失效
    MEMS执行器和开关

    公开(公告)号：US07602266B2

    公开(公告)日：2009-10-13

    申请号：US11687572

    申请日：2007-03-16

    申请人： Stephane Menard ,  Jun Lu ,  Nicolas Gonon

    发明人： Stephane Menard ,  Jun Lu ,  Nicolas Gonon

    IPC分类号： H01H51/22

    CPC分类号： H01H61/04 ,  H01H2061/008

    摘要： Microelectromechanical (MEMS) structures and switches employing movable actuators wherein particular ones of which move perpendicular to an underlying substrate and particular others move in a direction substantially parallel to the underlying substrate thereby providing more positive actuation.

    摘要翻译： 使用可移动致动器的微机电（MEMS）结构和开关，其中特定的其中一些垂直于下面的衬底移动，特别是其它致动器在基本上平行于下面的衬底的方向上移动，从而提供更多的正致动。

    MEMS actuators with stress releasing design
    4.
    发明申请
    MEMS actuators with stress releasing design 审中-公开
    具有应力释放设计的MEMS致动器

    公开(公告)号：US20090033445A1

    公开(公告)日：2009-02-05

    申请号：US11882460

    申请日：2007-08-01

    申请人： Stephane Menard ,  Nicolas Gonon

    发明人： Stephane Menard ,  Nicolas Gonon

    IPC分类号： H01H51/22

    CPC分类号： H01H61/04 ,  F03G7/06 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

    摘要： The micro-electromechanical (MEMS) actuator comprises a hot arm member and a cold arm member. The cold arm member comprises at least two longitudinally spaced-apart flexors. The actuators may also be constructed with at least one among the hot arm member and the cold arm member comprising at least one spring section. The stress in this improved MEMS actuator is more uniformly distributed, thereby reducing the mechanical creep and improving its reliability as well as its operation life.

    摘要翻译： 微机电（MEMS）致动器包括热臂构件和冷臂构件。 冷臂构件包括至少两个纵向间隔开的屈曲部。 致动器还可以构造为包括至少一个弹簧部分的热臂部件和冷臂部件中的至少一个。 这种改进的MEMS致动器中的应力更均匀分布，从而减少机械蠕变，提高其可靠性及其使用寿命。

    MEMS actuators with stress releasing design
    6.
    发明授权
    MEMS actuators with stress releasing design 有权
    具有应力释放设计的MEMS致动器

    公开(公告)号：US08115579B2

    公开(公告)日：2012-02-14

    申请号：US12839708

    申请日：2010-07-20

    申请人： Stéphane Mènard ,  Nicolas Gonon

    发明人： Stéphane Mènard ,  Nicolas Gonon

    IPC分类号： H01H51/22

    CPC分类号： H01H61/04 ,  F03G7/06 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

    摘要： The micro-electromechanical (MEMS) actuator comprises a hot arm member and a cold arm member. The cold arm member comprises at least two longitudinally spaced-apart flexors. The actuators may also be constructed with at least one among the hot arm member and the cold arm member comprising at least one spring section. The stress in this improved MEMS actuator is more uniformly distributed, thereby reducing the mechanical creep and improving its reliability as well as its operation life.

    摘要翻译： 微机电（MEMS）致动器包括热臂构件和冷臂构件。 冷臂构件包括至少两个纵向间隔开的屈曲部。 致动器还可以构造为包括至少一个弹簧部分的热臂部件和冷臂部件中的至少一个。 这种改进的MEMS致动器中的应力更均匀分布，从而减少机械蠕变，提高其可靠性及其使用寿命。

    MEMS ACTUATORS WITH STRESS RELEASING DESIGN
    7.
    发明申请
    MEMS ACTUATORS WITH STRESS RELEASING DESIGN 有权
    具有应力释放设计的MEMS执行器

    公开(公告)号：US20110012705A1

    公开(公告)日：2011-01-20

    申请号：US12839708

    申请日：2010-07-20

    申请人： Stéphane Ménard ,  Nicolas Gonon

    发明人： Stéphane Ménard ,  Nicolas Gonon

    IPC分类号： H01H37/46 ,  H01H37/04

    CPC分类号： H01H61/04 ,  F03G7/06 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

    摘要： The micro-electromechanical (MEMS) actuator comprises a hot arm member and a cold arm member. The cold arm member comprises at least two longitudinally spaced-apart flexors. The actuators may also be constructed with at least one among the hot arm member and the cold arm member comprising at least one spring section. The stress in this improved MEMS actuator is more uniformly distributed, thereby reducing the mechanical creep and improving its reliability as well as its operation life.

    摘要翻译： 微机电（MEMS）致动器包括热臂构件和冷臂构件。 冷臂构件包括至少两个纵向间隔开的屈曲部。 致动器还可以构造为包括至少一个弹簧部分的热臂部件和冷臂部件中的至少一个。 这种改进的MEMS致动器中的应力更均匀分布，从而减少机械蠕变，提高其可靠性及其使用寿命。