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    MEMS ACTUATORS AND SWITCHES
    1.
    发明申请
    MEMS ACTUATORS AND SWITCHES 失效
    MEMS执行器和开关

    公开(公告)号：US20080223699A1

    公开(公告)日：2008-09-18

    申请号：US11687572

    申请日：2007-03-16

    Applicant: Stephane Menard ,  Jun Lu ,  Nicolas Gonon

    Inventor： Stephane Menard ,  Jun Lu ,  Nicolas Gonon

    IPC: H01H57/00

    CPC classification number: H01H61/04 ,  H01H2061/008

    Abstract: Microelectromechanical (MEMS) structures and switches employing movable actuators wherein particular ones of which move perpendicular to an underlying substrate and particular others move in a direction substantially parallel to the underlying substrate thereby providing more positive actuation.

    Abstract translation: 使用可移动致动器的微机电（MEMS）结构和开关，其中特定的其中一些垂直于下面的衬底移动，特别是其它致动器在基本上平行于下面的衬底的方向上移动，从而提供更多的正致动。

    MEMS actuators with even stress distribution
    2.
    发明申请
    MEMS actuators with even stress distribution 审中-公开
    具有均匀应力分布的MEMS致动器

    公开(公告)号：US20090033454A1

    公开(公告)日：2009-02-05

    申请号：US11882457

    申请日：2007-08-01

    Applicant: Stephane Menard ,  Nicolas Gonon ,  Jean-Francois Saheb

    Inventor： Stephane Menard ,  Nicolas Gonon ,  Jean-Francois Saheb

    IPC: H01H37/00

    CPC classification number: B81B3/0072 ,  B81B2201/014 ,  B81B2203/051 ,  H01H2061/008

    Abstract: The micro-electromechanical (MEMS) switch comprises a first double-sided cantilever MEMS actuator attached to a substrate and movable in two opposite directions, and a second cantilever MEMS actuator attached to the substrate. In use, the first MEMS actuator is moved in either directions to distribute the stress more uniformly, thereby reducing the mechanical creep and improving its reliability as well as its operation life.

    Abstract translation: 微机电（MEMS）开关包括附接到基板并可在两个相反方向上移动的第一双边悬臂MEMS致动器和附接到基板的第二悬臂MEMS致动器。 在使用中，第一MEMS致动器在任一方向上移动以更均匀地分布应力，从而减少机械蠕变并提高其可靠性以及其使用寿命。

    MEMS actuators and switches
    3.
    发明授权
    MEMS actuators and switches 失效
    MEMS执行器和开关

    公开(公告)号：US07602266B2

    公开(公告)日：2009-10-13

    申请号：US11687572

    申请日：2007-03-16

    Applicant: Stephane Menard ,  Jun Lu ,  Nicolas Gonon

    Inventor： Stephane Menard ,  Jun Lu ,  Nicolas Gonon

    IPC: H01H51/22

    CPC classification number: H01H61/04 ,  H01H2061/008

    Abstract: Microelectromechanical (MEMS) structures and switches employing movable actuators wherein particular ones of which move perpendicular to an underlying substrate and particular others move in a direction substantially parallel to the underlying substrate thereby providing more positive actuation.

    Abstract translation: 使用可移动致动器的微机电（MEMS）结构和开关，其中特定的其中一些垂直于下面的衬底移动，特别是其它致动器在基本上平行于下面的衬底的方向上移动，从而提供更多的正致动。

    MEMS actuators with stress releasing design
    4.
    发明申请
    MEMS actuators with stress releasing design 审中-公开
    具有应力释放设计的MEMS致动器

    公开(公告)号：US20090033445A1

    公开(公告)日：2009-02-05

    申请号：US11882460

    申请日：2007-08-01

    Applicant: Stephane Menard ,  Nicolas Gonon

    Inventor： Stephane Menard ,  Nicolas Gonon

    IPC: H01H51/22

    CPC classification number: H01H61/04 ,  F03G7/06 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

    Abstract: The micro-electromechanical (MEMS) actuator comprises a hot arm member and a cold arm member. The cold arm member comprises at least two longitudinally spaced-apart flexors. The actuators may also be constructed with at least one among the hot arm member and the cold arm member comprising at least one spring section. The stress in this improved MEMS actuator is more uniformly distributed, thereby reducing the mechanical creep and improving its reliability as well as its operation life.

    Abstract translation: 微机电（MEMS）致动器包括热臂构件和冷臂构件。 冷臂构件包括至少两个纵向间隔开的屈曲部。 致动器还可以构造为包括至少一个弹簧部分的热臂部件和冷臂部件中的至少一个。 这种改进的MEMS致动器中的应力更均匀分布，从而减少机械蠕变，提高其可靠性及其使用寿命。

    Programmed pulse electroplating process
    8.
    发明授权
    Programmed pulse electroplating process 失效
    程序脉冲电镀工艺

    公开(公告)号：US06402924B1

    公开(公告)日：2002-06-11

    申请号：US09561883

    申请日：2000-05-01

    Applicant: James L. Martin ,  Stephane Menard ,  David N. Michelen

    Inventor： James L. Martin ,  Stephane Menard ,  David N. Michelen

    IPC: C25D518

    CPC classification number: C25D3/38 ,  C25D5/18 ,  H05K3/241 ,  H05K3/423 ,  Y10S205/92

    Abstract: The present invention relates to a method of electrodepositing metal onto a substrate, which comprises applying a pulsed periodic reverse current across the electrodes of a plating cell utilizing a peak reverse current density and peak forward current density; and varying the ratio of peak reverse current density to peak forward current density in periodic cycles to provide metal deposits of uniform thickness and appearance upon the substrate. The invention also relates to a process for improving the properties of an electrodeposit, particularly on substrates having uneven surfaces or apertures, by using programmed pulse periodic reverse current modulation. More particularly, it involves varying the anodic to cathodic current density ratio, in order to improve the surface uniformity appearance, grain structure and levelling of the deposit while maintaining high current density throwing power.

    Abstract translation: 本发明涉及一种将金属电沉积到衬底上的方法，其包括使用峰值反向电流密度和峰值正向电流密度施加脉冲周期反向电流跨越电镀单元的电极; 并且在周期性循环中改变峰值反向电流密度与峰值正向电流密度的比率，以提供在衬底上具有均匀厚度和外观的金属沉积物。 本发明还涉及通过使用编程的脉冲周期性反向电流调制来改善电沉积物的性质，特别是在具有不平坦表面或孔的基底上的方法。 更具体地，涉及改变阳极至阴极电流密度比，以便在保持高电流密度投射功率的同时改善沉积物的表面均匀性外观，晶粒结构和平整度。

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