公开(公告)号：US07040017B2

公开(公告)日：2006-05-09

申请号：US10251483

申请日：2002-09-19

申请人： Stephen M. Smith ,  Randolph E. Treur

发明人： Stephen M. Smith ,  Randolph E. Treur

IPC分类号： B21K21/08 ,  B05B1/14

CPC分类号： H01L21/67051 ,  B08B3/02 ,  Y10S134/902 ,  Y10T29/49432 ,  Y10T29/49433

摘要： A fluid delivery module for use in preparing a substrate is provided. The fluid delivery module includes a process bowl designed to contain a substrate to be prepared. The process bowl has a bottom wall and a sidewall. The fluid delivery module further includes a fluid delivery ring configured to be attached to the sidewall of the process bowl. The fluid delivery ring includes a plurality of inlet and outlet pairs. Each of the plurality of inlet and outlet pairs is defined in the fluid ring and is designed to receive a respective supply tube. Each respective supply tube has an end that terminates at each of the outlets of the fluid delivery ring and is configured to direct fluid onto a surface of the substrate.

摘要翻译： 提供了一种用于制备基板的流体输送模块。 流体输送模块包括设计成容纳要制备的基底的处理碗。 处理碗具有底壁和侧壁。 流体输送模块还包括流体输送环，该流体输送环被配置为附接到处理碗的侧壁。 流体输送环包括多个入口和出口对。 多个入口和出口对中的每一个限定在流体环中并且被设计成容纳相应的供给管。 每个相应的供应管具有终止于流体输送环的每个出口处的端部，并且构造成将流体引导到基板的表面上。

公开(公告)号：US06481447B1

公开(公告)日：2002-11-19

申请号：US09672173

申请日：2000-09-27

申请人： Stephen M. Smith ,  Randolph E. Treur

发明人： Stephen M. Smith ,  Randolph E. Treur

IPC分类号： B08B302

CPC分类号： H01L21/67051 ,  B08B3/02 ,  Y10S134/902 ,  Y10T29/49432 ,  Y10T29/49433

摘要： A fluid delivery module for use in preparing a substrate is provided. The fluid delivery module includes a process bowl designed to contain a substrate to be prepared. The process bowl has a bottom wall and a sidewall. The fluid delivery module further includes a fluid delivery ring configured to be attached to the sidewall of the process bowl. The fluid delivery ring includes a plurality of inlet and outlet pairs. Each of the plurality of inlet and outlet pairs is defined in the fluid ring and is designed to receive a respective supply tube. Each respective supply tube has an end that terminates at each of the outlets of the fluid delivery ring and is configured to direct fluid onto a surface of the substrate.

摘要翻译： 提供了一种用于制备基板的流体输送模块。 流体输送模块包括设计成容纳要制备的基底的处理碗。 处理碗具有底壁和侧壁。 流体输送模块还包括流体输送环，该流体输送环被配置为附接到处理碗的侧壁。 流体输送环包括多个入口和出口对。 多个入口和出口对中的每一个限定在流体环中并且被设计成接收相应的供给管。 每个相应的供应管具有终止于流体输送环的每个出口处的端部，并且构造成将流体引导到基板的表面上。

公开(公告)号：US07494550B2

公开(公告)日：2009-02-24

申请号：US11285986

申请日：2005-11-23

申请人： Stephen M. Smith ,  Randolph E. Treur

发明人： Stephen M. Smith ,  Randolph E. Treur

IPC分类号： B08B3/02

CPC分类号： H01L21/67051 ,  B08B3/02 ,  Y10S134/902 ,  Y10T29/49432 ,  Y10T29/49433

摘要： A method for rinsing a semiconductor wafer in a module utilizing a fluid delivery ring is provided. The method includes providing a process bowl having a generally circular shape bottom wall, a sidewall that extends upwardly from the bottom wall to define a cylindrical chamber, and a plurality of channels in the sidewall that extend from the bottom wall to an upper edge of the sidewall. A fluid delivery ring is attached onto the sidewall of the process bowl. Utilizing the process bowl, a plurality of supply tubes is inserted into the fluid delivery ring. The fluid delivery ring has a plurality of ring inlet and outlet pairs and a plurality of respective slots. Fluid is supplied to the supply tubes, and fluid is directed onto a surface of the semiconductor wafer defined within the process bowl.

摘要翻译： 提供了一种利用流体输送环冲洗模块中的半导体晶片的方法。 该方法包括提供具有大致圆形形状的底壁的过程碗，从底壁向上延伸以限定圆柱形室的侧壁，以及在侧壁中从底壁延伸到上边缘的多个通道 侧壁。 流体输送环附接到处理碗的侧壁上。 利用处理碗，将多个供给管插入到流体输送环中。 流体输送环具有多个环入口和出口对以及多个相应的槽。 流体被供应到供应管，并且流体被引导到在处理碗内限定的半导体晶片的表面上。

公开(公告)号：US07087122B2

公开(公告)日：2006-08-08

申请号：US11005754

申请日：2004-12-06

申请人： Stephen M. Smith ,  Randolph E. Treur

发明人： Stephen M. Smith ,  Randolph E. Treur

IPC分类号： B08B7/00 ,  C23F1/00

CPC分类号： H01L21/68728 ,  H01L21/68785 ,  H01L21/68792

摘要： A method for spinning a wafer to enable rinsing and drying is provided. The method includes engaging the wafer at a wafer processing plane and spinning the wafer. The method further includes moving a wafer backside plate from a first position to a second position as spinning of the wafer proceeds to an optimum spinning speed. The second position defines a reduced gap between an under surface of the wafer and a top surface of the wafer backside plate. The method also includes repositioning the wafer backside plate from the second position to the first position as the spinning reduces in speed. The first position defines an enlarged gap to enable loading and unloading of the wafer from the engaged position.

摘要翻译： 提供了一种用于纺丝晶片以实现冲洗和干燥的方法。 该方法包括使晶片在晶片处理平面处接合并旋转晶片。 该方法还包括当晶片的旋转进行到最佳旋转速度时，将晶片背面板从第一位置移动到第二位置。 第二位置限定晶片的下表面和晶片背面板的顶表面之间的减小的间隙。 该方法还包括当旋转速度降低时将晶片背面板从第二位置重新定位到第一位置。 第一位置限定了扩大的间隙，以使晶片能够从接合位置加载和卸载。

公开(公告)号：US06827092B1

公开(公告)日：2004-12-07

申请号：US09747660

申请日：2000-12-22

申请人： Stephen M. Smith ,  Randolph E. Treur

发明人： Stephen M. Smith ,  Randolph E. Treur

IPC分类号： B08B300

CPC分类号： H01L21/68728 ,  H01L21/68785 ,  H01L21/68792

摘要： An apparatus for preparing a wafer is provided. The apparatus includes a wafer backside plate and a central shaft. The wafer backside plate has a top surface that includes a cylindrical edge lip, which defines a central aperture. The central shaft is designed to fit within the central aperture. The wafer backside plate is designed to automatically slide between an up position during rotational wager processing and a down position when the wafer is not in rotational wafer processing. A gap defined between the top surface of the wafer backside plate and the wafer is less when the wafer backside plate is in the up position than when the wafer backside plate is in the down position.

摘要翻译： 提供了一种用于制备晶片的装置。 该装置包括晶片背面板和中心轴。 晶片背面板具有顶表面，其包括限定中心孔的圆柱形边缘。 中心轴设计成适合中心孔。 晶片背面板被设计成在旋转下注处理期间的上升位置和当晶片不处于旋转晶片处理时的向下位置之间自动滑动。 当晶片背面板处于向上位置时，当晶片背面板处于向下位置时，在晶片背面板的顶表面和晶片之间限定的间隙较小。

公开(公告)号：US06578853B1

公开(公告)日：2003-06-17

申请号：US09747665

申请日：2000-12-22

申请人： Randolph E. Treur ,  Stephen M. Smith

发明人： Randolph E. Treur ,  Stephen M. Smith

IPC分类号： H01L21304

CPC分类号： H01L21/68728 ,  G03F7/3021 ,  H01L21/68785 ,  H01L21/68792 ,  Y10S134/902 ,  Y10T279/185 ,  Y10T279/1973

摘要： A chuck assembly for use in a substrate spin, rinse, and dry (SRD) module is provided. The chuck assembly includes a wedge, a chuck body, and a plurality of grippers. The wedge has a sidewall and is designed to move from a lower position to an upper position and from the upper position to the lower position thus opening and closing the chuck assembly, respectively. The chuck body has a cylindrical shape and is designed to include a plurality of linkage arms. The chuck body is designed to enclose the wedge such that each linkage arm is substantially in contact with the sidewall of the wedge. The cylindrical shape of the chuck body is designed to reduce air disturbance around a surface of a substrate. The plurality of grippers are designed to be coupled to the chuck body via a plurality of rotation pins. Each of the grippers is configured to stand substantially upright so as to engage the substrate when the wedge is in a lower position, and each of the grippers is configured to lie substantially flat so as to disengage the substrate when the wedge is in the lower position.

摘要翻译： 提供了一种用于衬底旋转，冲洗和干燥（SRD）模块的卡盘组件。 卡盘组件包括楔形物，卡盘主体和多个夹具。 楔形件具有侧壁并且被设计成从下部位置移动到上部位置并且从上部位置移动到下部位置，从而分别打开和关闭卡盘组件。 卡盘体具有圆筒形状并且被设计成包括多个连杆臂。 卡盘体被设计成围绕楔形物，使得每个连杆臂基本上与楔形物的侧壁接触。 卡盘体的圆柱形被设计成减小基体表面周围的空气扰动。 多个夹持器被设计成经由多个旋转销耦合到卡盘主体。 每个夹持器构造成基本上竖直地站立，以便当楔形件处于较低位置时接合基板，并且每个夹具构造成基本上平坦，以便当楔形件处于较低位置时使基板脱离 。

公开(公告)号：US08033911B2

公开(公告)日：2011-10-11

申请号：US10982546

申请日：2004-11-05

申请人： Kenneth A. Vlazny ,  Joseph J. Tracy ,  Victor I. Harrison ,  Stephen M. Smith ,  Mark G. Meyer

发明人： Kenneth A. Vlazny ,  Joseph J. Tracy ,  Victor I. Harrison ,  Stephen M. Smith ,  Mark G. Meyer

IPC分类号： A63F9/24 ,  A63F13/00 ,  G06F17/00 ,  G06F19/00

CPC分类号： G06Q50/34 ,  G06Q40/025 ,  G06Q40/04 ,  G07F17/32 ,  G07F17/3288

摘要： The present invention provides methods and systems of conducting wagers, such as pari-mutuel wagers. In one exemplary embodiment, an event, such as a horse race, dog race, a combination of races, etc., is identified for which a plurality of bettors may each place at least one wager. Each bettor of the plurality is enabled to provide input regarding at least one portion of their respective at least one wager prior to the event. At least one other portion of each bettor's at least one wager is randomized prior to the event. The wager then comprises the combination of the bettor selected portion and randomized portion. In one exemplary embodiment, the player selected portion may include selecting bettor-preferred participants of the event while the randomly selected portion may include the randomly assigning a finishing order to the player selected participants.

摘要翻译： 本发明提供了进行投注的方法和系统，例如同时投注。 在一个示例性实施例中，识别诸如赛马，狗赛，种族的组合等的事件，其中多个投注者可以各自放置至少一个下注。 在事件之前，多个的每个下注者能够提供关于它们各自的至少一个下注的至少一部分的输入。 每个投注者的至少一个赌注的至少一个其他部分在事件之前被随机化。 赌注然后包括投注者选择部分和随机化部分的组合。 在一个示例性实施例中，玩家选择的部分可以包括选择事件的优先参与者，而随机选择的部分可以包括随机地向玩家选择的参与者分配完成顺序。

公开(公告)号：US07883411B2

公开(公告)日：2011-02-08

申请号：US10704533

申请日：2003-11-07

申请人： Kenneth A. Vlazny ,  Joseph J. Tracy ,  Victor I. Harrison ,  Jeffery B. Murphy ,  Stephen M. Smith

发明人： Kenneth A. Vlazny ,  Joseph J. Tracy ,  Victor I. Harrison ,  Jeffery B. Murphy ,  Stephen M. Smith

IPC分类号： A63F9/24 ,  A63F13/00 ,  G06F17/00 ,  G06F19/00

CPC分类号： G06Q50/34 ,  G06Q40/025 ,  G06Q40/04 ,  G07F17/32 ,  G07F17/3288

摘要： The present invention contemplates methods and systems of conducting wagers, such as parimutuel wagers. In one exemplary embodiment an event, such as a horse race, dog race, a combination of races, etc., is identified for which a plurality of bettors may each place at least one wager. Each bettor of the plurality is enabled to provide input regarding at least one portion of their respective at least one wager prior to the event. At least one other portion of each bettor's at least one wager is randomized prior to the event. The wager then comprises the combination of the bettor-selected portion and randomized portion. In one exemplary embodiment, the player-selected portion may include selecting bettor-preferred participants of the event while the randomly selected portion may include randomly assigning a finishing order to the player-selected participants.

摘要翻译： 本发明考虑了进行下注的方法和系统，例如parimutuel投注。 在一个示例性实施例中，识别诸如赛马，狗赛，种族的组合等的事件，其中多个投注者可以各自投放至少一个下注。 在事件之前，多个的每个下注者能够提供关于它们各自的至少一个下注的至少一部分的输入。 每个投注者的至少一个赌注的至少一个其他部分在事件之前被随机化。 赌注然后包括下注者选择部分和随机化部分的组合。 在一个示例性实施例中，玩家选择的部分可以包括选择事件的优先参与者，而随机选择的部分可以包括向玩家选择的参与者随机分配完成顺序。

公开(公告)号：US08292729B2

公开(公告)日：2012-10-23

申请号：US10727154

申请日：2003-12-02

申请人： Kenneth A. Vlazny ,  Scott B. Pfennighausen ,  Stephen M. Smith ,  Joseph J. Tracy ,  Victor I. Harrison

发明人： Kenneth A. Vlazny ,  Scott B. Pfennighausen ,  Stephen M. Smith ,  Joseph J. Tracy ,  Victor I. Harrison

IPC分类号： A63F9/24

CPC分类号： G07F17/32 ,  G07F17/3288

摘要： Methods and systems of pari-mutuel wagering are disclosed to facilitate the wager construction process. In one method, patrons select runners, and betting options of selected runners are presented. In another method, a first wager is placed and other wagers are presented, wherein the additional wagers may include a runner of the first wager. Another method allows patrons to wager on a runner, wherein an area representing the runner is marked to indicate that this runner was selected on a previous wager or in the current wager. In another method, a portion of a wager is patron selected and a portion of the wager is suggested by the betting interface. In another method, patrons may construct wager(s) for single or future races, or specify criteria for those wagers. In another method, runners are displayed in a table and patrons may select or deselect runner combinations by selecting cells within the table. Methods and systems of pari-mutuel wagering that enable an organization to set rules to display the gaming activity, and an embodiment where players make subscription as well as programmed bets are described.

摘要翻译： 公开了同时投注的方法和系统，以便于下注建设过程。 在一种方法中，顾客选择跑步者，并且呈现所选跑步者的投注选项。 在另一种方法中，放置第一投注和呈现其他投注，其中附加投注可以包括第一投注者的转牌。 另一种方法允许顾客在跑步者上投注，其中代表跑步者的区域被标记以指示在以前的下注或当前下注中选择了该选手。 在另一种方法中，投注的一部分被选中，并且投注的一部分由投注界面建议。 在另一种方法中，顾客可以为单一或未来的种族构建投注，或者为这些投注规定标准。 在另一种方法中，跑步者显示在表中，顾客可以通过选择表中的单元格来选择或取消选择赛跑者组合。 描述了使组织能够设置显示游戏活动的规则的同步赌注的方法和系统，以及玩家进行订阅以及编程赌注的实施例。

公开(公告)号：US20090028679A1

公开(公告)日：2009-01-29

申请号：US12171522

申请日：2008-07-11

申请人： Stephen M. Smith

发明人： Stephen M. Smith

IPC分类号： B60P9/00

CPC分类号： B60P1/4421 ,  B60R9/06 ,  B66F9/06 ,  B66F9/075 ,  B66F9/12

摘要： A load transport device that mounts to a vehicle mounted trailer hitch. The load transport system comprises a channel portion fitted with a pinion gear, and the channel portion is rigidly attached to a mounting bar that slideably engages a receiver portion of a vehicle's trailer hitch. The device also comprises an invertible shaft with an optionally-motorized rack gear system. The invertible shaft has a channel portion insertion end and a load lifting end. The invertible shaft slideably engages in either a load-low or load-high orientation depending on which end, the insertion end or the load lifting end first engages with the channel portion. The pinion gear and the rack gear system are functionally engaged. The load transport device further comprises a load support member attached to the load lifting end and comprising one or more bars that support a load.

摘要翻译： 一种装载到车辆挂车挂车上的装载运输装置。 负载传送系统包括配有小齿轮的通道部分，并且通道部分刚性地附接到可滑动地接合车辆拖车挂钩的接收器部分的安装杆。 该装置还包括具有任选地机动的齿条系统的可逆轴。 可逆轴具有通道部分插入端和负载提升端。 可逆轴可滑动地接合负载低或负载高的方向，取决于该端，插入端或负载提升端首先与通道部分接合。 小齿轮和齿条系统功能接合。 负载传送装置还包括附接到负载提升端并且包括支撑负载的一个或多个杆的负载支撑构件。