公开(公告)号：US07468507B2

公开(公告)日：2008-12-23

申请号：US11339044

申请日：2006-01-25

申请人： Steven R. Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali ,  Doron Meshulach

发明人： Steven R. Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali ,  Doron Meshulach

IPC分类号： H01J3/14 ,  H01J5/16 ,  H01J40/14

CPC分类号： G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/10 ,  G01N2201/1042 ,  G01N2201/106

摘要： A method for scanning a surface, consisting of focusing an array of optical beams using optics having an axis, so as to illuminate a region of the surface intercepted by the axis, such that each optical beam illuminates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the optical beams is scanned over the respective sub-region in a second direction, which is different from the first direction.

摘要翻译： 一种用于扫描表面的方法，其包括使用具有轴的光学器件聚焦光束阵列，以便照亮由所述轴线截取的表面的区域，使得每个光束照亮所述光束中的相应子区域的一部分 该区域。 所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。 在第一方向的平移期间，每个光束在与第一方向不同的第二方向上在相应的子区域上被扫描。

公开(公告)号：US07468506B2

公开(公告)日：2008-12-23

申请号：US11334963

申请日：2006-01-19

申请人： Steven R. Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali

发明人： Steven R. Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali

IPC分类号： H01J3/14 ,  H01J5/16 ,  H01J40/14

CPC分类号： G01N21/8851 ,  G01N21/9501 ,  G03F7/70275 ,  G03F7/70358

摘要： A method for scanning a surface, consisting of focusing an array of beams using optics having an axis, so as to irradiate a region of the surface intercepted by the axis, such that each beam irradiates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the beams is scanned over the respective sub-region in a second direction, which is different from the first direction.

摘要翻译： 一种用于扫描表面的方法，包括使用具有轴的光学器件聚焦光束阵列，以便照射由所述轴线截取的表面的区域，使得每个光束照射所述区域内的相应子区域的一部分 。 所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。 在第一方向的平移期间，每个光束在与第一方向不同的第二方向上扫描相应的子区域。

公开(公告)号：US20060261261A1

公开(公告)日：2006-11-23

申请号：US11334963

申请日：2006-01-19

申请人： Steven Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali

发明人： Steven Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali

IPC分类号： H01J40/14

CPC分类号： G01N21/8851 ,  G01N21/9501 ,  G03F7/70275 ,  G03F7/70358

摘要： A method for scanning a surface, consisting of focusing an array of beams using optics having an axis, so as to irradiate a region of the surface intercepted by the axis, such that each beam irradiates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the beams is scanned over the respective sub-region in a second direction, which is different from the first direction.

摘要翻译： 一种用于扫描表面的方法，包括使用具有轴的光学器件聚焦光束阵列，以便照射由所述轴线截取的表面的区域，使得每个光束照射所述区域内的相应子区域的一部分 。 所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。 在第一方向的平移期间，每个光束在与第一方向不同的第二方向上扫描相应的子区域。

公开(公告)号：US20070133077A1

公开(公告)日：2007-06-14

申请号：US11339044

申请日：2006-01-25

申请人： Steven Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali ,  Doron Meshulach

发明人： Steven Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali ,  Doron Meshulach

IPC分类号： G02B26/08

CPC分类号： G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/10 ,  G01N2201/1042 ,  G01N2201/106

摘要： A method for scanning a surface, consisting of focusing an array of optical beams using optics having an axis, so as to illuminate a region of the surface intercepted by the axis, such that each optical beam illuminates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the optical beams is scanned over the respective sub-region in a second direction, which is different from the first direction.

摘要翻译： 一种用于扫描表面的方法，其包括使用具有轴的光学器件聚焦光束阵列，以便照亮由所述轴线截取的表面的区域，使得每个光束照亮所述光束中的相应子区域的一部分 该区域。 所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。 在第一方向的平移期间，每个光束在与第一方向不同的第二方向上在相应的子区域上被扫描。